Brooks PC125, Инструкция по установке и эксплуатации

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5-1
PC100 Series
Installation and Operation Manual
X-PR-PC100-Series-PC-eng
Part Number: 541B207AAG
May, 2017
Section 5 Product Description Code
Table 5-1 PC100 Series Product Description Code Table
Code Description Code Description
Code Description Code Description Code Description
Code Option Code Option
Code Option Code Option Code Option
Option Description Option Description
Option Description Option Description Option Description
I. I. I. I. I. Base Model Code PC115 PC115 PC115 PC115 PC115 Pressure Controller, N2 & H2 at flow rates 0 to 5 slpm
PC125 PC125 PC125 PC125 PC125 Pressure Controller with Flow Meter, N2 & H2 at 10 SLPM only
II. II. II. II. II. Configurability X X X X X Specific Gas and Range Required
III. III. III. III. III. Flow Direction U U U U U Upstream (For PC115 only)
D D D D D Downstream (For PC125 and PC115)
IV. IV. IV. IV. IV. Full Scale Pressure 1000 1000 1000 1000 1000 Full Scale Pressure
V. V. V. V. V. Pressure Measurement TTTTT Torr
VI. VI. VI. VI. VI. Reference Pressure 0045 0045 0045 0045 0045 Reference Pressure - Downstream (psia) (default)
0004 0004 0004 0004 0004 Reference Pressure - Upstream (psia) (default)
VII. VII. VII. VII. VII. Pressure Measurement P PP P P PSIA
VIII. VIII. VIII. VIII. VIII. Gas and Flow Rate Options 0013 010L 0013 010L 0013 010L 0013 010L 0013 010L N2 at 10 slpm (PC125)
0007 010L 0007 010L
0007 010L 0007 010L
0007 010L H2 at 10 slpm (PC125)
XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX XXXX Specific Gas (H2 & N2 only), and flow rate 0 to 5 slpm for PC115
IX. IX. IX. IX. IX. Fitting VX VX VX VX VX 1 1/8" body width, 1/4" VCR male
X. X. X. X. X. Communications/Connector Option Option Option Option Option Poll IO Poll IO Poll IO External
Power On Full Scale Full Scale Full Scale Instance Instance State Baud
State Setting Setting Setting Producer Consumer Transition Rate
D0 D0
D0 D0
D0 Idle Count Integer 6000h 2 7 Executing 500KB
D1 D1 D1 D1 D1 Idle Count Integer 6000h 21 7 Executing 500KB
D2 D2
D2 D2 D2 Idle SCCM Float 7FFFh 13 19 Executing 500KB
D3 D3 D3 D3 D3 Idle Count Integer 6000h 22 7 Executing 500KB
D4 D4 D4 D4 D4 Executing Count Integer 6000h 22 8 Executing 500KB
D5 D5
D5 D5
D5 Idle Count Integer 6000h 6 8 Executing 500KB
D6 D6 D6 D6 D6 Idle Count Integer 7FFFh 3 7 Executing 500KB
D7 D7
D7 D7 D7 Idle Count Integer 7FFFh 6 8 Executing 500KB
D8 D8 D8 D8 D8 Idle Count Integer 6000h 3 7 Executing 500KB
D9 D9 D9 D9 D9 Executing Count Integer 6000h 2 7 Executing 500KB
D D
D D
DA A
A A
A Idle Count Integer 7FFFh 22 7 Executing 500KB
DB DB DB DB DB Idle Count Integer 6000h 22 8 Executing 500KB
DC DC
DC DC DC Idle Count Integer 7FFFh 3 7 Idle 500KB
DD DD DD DD DD Executing Count Integer 7FFFh 22 8 Executing 500KB
DE DE DE DE DE Executing SCCM Float 6000h 15 19 Executing 500KB
D D
D D
DX X
X X
X To be defined by CSR
XI. XI.
XI. XI.
XI. CSR XXXX XXXX
XXXX XXXX
XXXX Customer Special Request Number
XII. XII.
XII. XII.
XII. Reference Temperature 000 000
000 000
000 0 Degree C Reference
XIII. XIII.
XIII. XIII.
XIII. Firmware XXX XXX
XXX XXX
XXX Locked in Firmware Revision
LFW LFW LFW LFW LFW Latest Firmware
CSR CSR
CSR CSR CSR Firmware defined by CSR
Sample Model Code Sample Model Code Sample Model Code Sample Model Code Sample Model Code
IIIII II II II II II III III III III III IV IV IV IV IV V V V V V VI VI VI VI VI VII VII VII VII VII VIII VIII VIII VIII VIII IX IX IX IX IX X X X X X XI XI XI XI XI XII XII XII XII XII XIII XIII XIII XIII XIII
PC125 PC125 PC125 PC125 PC125 X X X X X D D D D D ----- 1000 1000 1000 1000 1000 TTTTT 0045 0045 0045 0045 0045 P PP P P ----- 0013 010L 0013 010L 0013 010L 0013 010L 0013 010L ----- VX VX VX VX VX DO DO DO DO DO ----- XXXX XXXX XXXX XXXX XXXX ----- 000 000 000 000 000 ----- 108 108 108 108 108