Installation and Operation Manual
X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008
MF Smart Series
5
Section 1: Introduction
1-1 How to use this manual.
It is recommended to read this manual before installing, operating or repairing
these Mass Flow Instruments. This manual is organised into nine sections:
Section 1.
Introduction
Section 2.
Installation
Section 3.
Operation
Section 4.
Maintenance
Section 5.
Specification
Sections 6
Modellisting
Appendices
A - D
This instruction manual is intended to provide the user with all the information
necessary to install, operate and maintain the Brooks MF-series Smart Mass
Flow Meters and Controllers.
This series of microprocessor-based field instruments is designed to meet
the rigorous demands of various industries/applications. The use of digital
technology ensures that the Brooks Smart series provides maximum accuracy
and signal integrity. In addition it allows easy interfacing to any peripheral
equipment either through analogue or digital communication.
This manual covers Smart Mass Flow Meter models: MF60S, MF61S, MF63S
and MF64S and Smart Mass Flow Controller models: MF50S, MF51S and
MF53S.
Digital communication
The presence of a computer icon to the left of the text (as shown here)
Denotes that the accompanying text refers to digital communication.
Smart Control
Digital communication (either via RS-232 or RS-485) allows to connect our
Brooks
model 0160 Smart Control
. This interface program can be used to
operate and (re)configure Smart Mass Flow Products (calibration parameters
are not accessible).
Smart DDE
If you require bi-directional links between your Windows-based applications
and Brooks Smart Mass Flow Products,our model
0162 Smart DDE
(a
powerful, user-friendly Dynamic Data Exchange software program) offers all
the features you need.
Smart Service
If you are equipped with primary standard Volumeter calibration equipment
or (secondary standard) Brooks Smart Mass Flow Meters, you can use the
model 0163 Brooks Smart Service
program for (re)configuration, diagnostics,
calibration and/or verification. The HART protocol-based commands are listed in
a separate document: Brooks part number:
541-C-053-AAA
.
Profibus-DP Communication manual Please, refer to Profibus instruction
manual partnumber 541-C-068-AAG.
