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Installation and Operation Manual

X-TMF-MfS-MFC-eng
PN 541-C-061-AAG
November, 2008

MF Smart Series

Brooks

MF Smart Series MFC/MFM

Smart Mass Flow Controller

Содержание MF50 S

Страница 1: ...Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series 1 Brooks MF Smart Series MFC MFM Smart Mass Flow Controller...

Страница 2: ...chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance...

Страница 3: ...maintenance is being performed by qualified persons to prevent electrical shock and personal injury Handling Procedure 1 Power to unit must be removed 2 Personnel must be grounded via a wrist strap or...

Страница 4: ...Procedure 24 4 5 Valve Dis Assembly Procedure 25 4 6 Housing Dis Assembly Procedure 25 Section 5 Specification 26 Section 6 Modellisting 31 Appendix A Gas Conversion Tables 36 Appendix B Dimensional D...

Страница 5: ...ss Flow Meter models MF60S MF61S MF63S and MF64S and Smart Mass Flow Controller models MF50S MF51S and MF53S Digital communication The presence of a computer icon to the left of the text as shown here...

Страница 6: ...traightening Besides reducing the effects of changes in upstream piping this also protects the measuring element from occasional debris in the flow stream In addition it eliminates the need for extra...

Страница 7: ...s rapid gas settling times with minimal over undershoot Standard factory setting 1 sec for MF50 51 and meter models 3 sec for MF53 Valve Override VOR available at pin 12 allows the user to fully open...

Страница 8: ...er 2008 MF Smart Series 8 Environmental errors No gas flow detected Power supply outside specification range Ambient temperature outside specified range high and low flow alarms Digital communication...

Страница 9: ...554 FLOW 3569 Tel 215 362 3700 Fax 215 362 3745 E mail BrooksAm BrooksInstrument com www BrooksInstrument com Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Nethe...

Страница 10: ...318 549 309 E mail BrooksEu BrooksInstrument com Instrument must have been purged in accordance with the following All flow instruments returned to Brooks requires completion of Form RPR003 1 Brooks I...

Страница 11: ...mponents c Install in a manner that allows the instrument to be easily removed for cleaning d The mounting position of the Smart Mass Flow Meter or Controller can be either horizontal or vertical in c...

Страница 12: ...tails of correct installation see figure 2 2 and Table 2 2 2 3 and 2 4 Table 2 1 Pin configuration Figure 2 2 Electrical compartment Table 2 2 Electrical connection 9 pins terminal PIN NO FUNCTION 1 V...

Страница 13: ...ntroller models only To open or close the control valve independently of the Set point signal e g for safety reasons pin 5 is available to carry a valve override signal Leave floating i e not connecte...

Страница 14: ...s possible to ensure that the minimum required voltage and current is available at the mass flow device Cable Shielding Earth Cable requirements Compliance with EMC directive 89 336 EEC requires that...

Страница 15: ...gnal middle screw terminal labeled VOR can always be used in parallel to the network The command OPEN or CLOSE issued through this VOR terminal always takes precedence over the network valve override...

Страница 16: ...he use of standards available Profibus approved network connectors enabling fast and easy connection of a Profibus network Figure 3 4 below shows the pin numbering The connector provides the four mand...

Страница 17: ...s incorporate two printed circuit boards one main board containing the processor and a piggyback board The piggyback board enables the device to communicate with a PC via an RS 232 or RS 485 connectio...

Страница 18: ...d with one or more RS 232 ports COM ports as standard The RS 232 usage and definitions are very diverse On the MF Smart Mass Flow device the TXD signal is the output signal of the device and the RxD t...

Страница 19: ...face board is therefore required to connect an RS 485 to a standard PC Figure 2 8 is an interconnection diagram showing two MFs linked to an IBM compatible PC via RS 485 and RS 485 to RS 232 converter...

Страница 20: ...e Profibus interconnection guidelines document 2 142 for further details refer to Profibus instruction manual 2 12 Interconnection A shielded cable must be used for interconnection between the device...

Страница 21: ...e a 0 10 mVdc signal at zero flow The adjustment is carried out in our calibration laboratory an ambient the temperature of 20 C is maintained After initial installation and warm up in the gas system...

Страница 22: ...roller for bench troubleshooting or return to the factory especially if the system is new 1 Verify a low resistance common connection and that the correct power supply voltage and signals are present...

Страница 23: ...valve or return the higher set points but will not go device to the factory Section 4 3 below 2 Output signal follows Set point at Insufficient inlet pressure or pressure Adjust pressures inspect in l...

Страница 24: ...countered during bench troubleshooting For controller models only Apply 5 to the 15 Vdc valve override pin pin 5 of 9 row and verify the output signal falls below 2 4 3 Cleaning Procedures When deposi...

Страница 25: ...available at your facility Brooks Instrument will supply you with copy of the valve dis assembly procedure document no 834 L 030 AAG upon request The model MF53S control valve assembly consists of an...

Страница 26: ...al PHYSICAL SPECIFICATIONS Materials of Wetted parts stainless steel with Viton Construction Buna N PTFE Kalrez or EPDM seals Mechanical NPT F Tube compression VCR and VCO Connections Option Flanged D...

Страница 27: ...or RS 485 Communication Baud rate 1200 2400 3600 4800 7200 9600 9K2 38K4 Default RS 232 Baudrate 9600 Profibus DP Alarm If self diagnostics detect a fallure the alarm mode will be Analogue activated...

Страница 28: ...or Profibus Temperature Both ambient and process gas 0 70 C Leak Integrity Outboard 1 x 10 9 mbar l sec Helium Security To prevent unauthorized setting or reranging of span or zero these functions are...

Страница 29: ...Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series 29 Section 5 Specification...

Страница 30: ...n u o w l a r i p s o t p U 0 0 1 N P 4 150 Up to spiral wound Acc Std flange ratings Acc Std flange ratings 2 300 Up to spiral wound Acc Std flange ratings Acc Std flange ratings 2 2 1 7 8 7 d n u o...

Страница 31: ...SPECIFY MF50S A C 1 H C 1 B A 0 K C 1 B 2 TYPICAL MODEL NUMBER NOTES 1 ENHANCEMENTS PLEASE FILL IN THE REQUESTED SPECIFICATIONS WHEN YOU HAVE DESCRIBED THE ENHANCEMENTS Standard response time of the...

Страница 32: ...F N O I S S E R P M O C E B U T m m 0 1 J 1 1 6 1 5 0 6 0 5 F M R O F Y L N O F P S B 4 1 K 1 3 6 3 5 F M R O F Y L N O F P S B Y 1 3 6 3 5 F M R O F Y L N O F P S B 1 Z 1 3 6 3 5 F M R O F Y L N O S...

Страница 33: ...L 0 5 1 4 I S N A A 4 Y L N O 4 6 F M S B L 0 0 3 4 I S N A B 4 Y L N O 4 6 F M D 2 S B L 0 0 6 4 I S N A C 4 Y L N O 4 6 F M D 2 6 1 N P 0 0 1 N D N I D D 4 Y L N O 4 6 F M D 2 0 4 N P 0 0 1 N D N I...

Страница 34: ...LECTRICAL INPUT OUTPUT INPUT OUTPUT S D B 0 0 6 9 2 3 2 S R L C N I A m 0 2 0 c d V 5 0 c d V 5 0 A S D B 0 0 6 9 2 3 2 S R L C N I c d V 5 1 A m 0 2 4 A m 0 2 4 B S D B 0 0 6 9 2 3 2 S R L C N I c d...

Страница 35: ...C 1 B A 0 K C 1 B 2 TYPICAL MODEL NUMBER NOTES 1 ENHANCEMENTS PLEASE FILL IN THE REQUESTED SPECIFICATIONS WHEN YOU HAVE DESCRIBED THE ENHANCEMENTS Standard response time of the flow output signal Mode...

Страница 36: ...mln min full scale The desired gas is carbon dioxide Multiply the output reading by 0 740 to calculate the flow of carbon dioxide When the output reading is 750 mln min the flow rate for carbon dioxid...

Страница 37: ...n o b r a C 4 1 2 3 8 9 5 1 6 7 8 0 2 L C e n i r o l h C 1 1 0 3 4 5 5 1 3 9 6 0 2 O L C e d i x o i D e n i r o l h C 5 2 1 4 2 1 8 1 3 3 4 0 3 F L C e d i r o u l f i r T e n i r o l h C Chlorodifl...

Страница 38: ...o l h C n e g o r d y H 9 7 1 1 3 7 9 0 4 4 7 0 N C H e d i n a y C n e g o r d y H 3 9 8 0 5 4 8 0 8 9 9 0 F H e d i r o u l F n e g o r d y H 9 8 7 5 4 4 1 2 3 5 9 0 I H e d i d o I n e g o r d y H...

Страница 39: ...o r P e n e l y p o r P 1 4 3 1 9 7 2 3 3 2 0 6 F e R e d i r o u l f a x e H m u i n e h R 4 4 1 7 0 1 5 2 6 0 4 H i S e n a l i S 9 7 5 7 2 6 4 2 1 3 0 4 L C i S e d i r o l h c a r t e T n o c i l...

Страница 40: ...Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series 40 Appendix B Dimensional Drawings...

Страница 41: ...Installation and Operation Manual X TMF MfS MFC eng PN 541 C 061 AAG November 2008 MF Smart Series 41 Appendix B...

Страница 42: ...dung eigener Verbindungskabel sollten Sie darauf achten da eine 80 igenSchirmababdeckung des Kabels gew hrleistet ist D oder Rund Verbindungsstecker sollten eine Abschirmung aus Metall besitzen Wenn m...

Страница 43: ...tierra Los conectores estandar de tipo tarjeta Card Edge no son met licos los cables utilizados deberan ser protegidos con un apantallamiento del 80 para cumplir con la certificaci n CE La pantalla de...

Страница 44: ...i elevata qualit che soddisfano le specifiche richieste dalla certificazione CE Se l utente intende usare propri cavi questi devono possedere una schermatura del 80 I connettori sia di tipo D che circ...

Страница 45: ...v det m letekniske utstyret Utf relse av signalkabel og tilh rende plugger Brooks Instrument tilbyr levert med utstyret egnet kabel som m ter de krav som stilles til CE sertifisering Dersom kunden sel...

Страница 46: ...ttuja jotta ne olisivat CE sertifikaatin mukaisia Suoja on oltava maadoitettu Svensk Brooks elektriska elektronik utrustning som r CE m rkt har testats och godk nts enligt g llande regler f r elektrom...

Страница 47: ...ect the product s performance and place the save operation of your process at risk It furthermore may result in fire electrical hazards or improper operation DANISH VIGTIGE SIKKERHEDSINSTRUKTIONER Den...

Страница 48: ...Brooks Instrument onderdelen worden gebruikt voor onderhoud en service aan het instrument U wordt erop gewezen dat het gebruik van universele onderdelen en voorschriften om daar mee om te gaan nadelig...

Страница 49: ...n Ger ten Verwendung von Fremdfabrikaten oder Nachbildungen kann die Leistung des Ger tes einschr nken und die Betriebssicherheit aufheben Fehlfunktionen und gef hrliche Betriebszust nde k nnen weiter...

Страница 50: ...s Instrument della Thermal Mass Flow Meter Controller Series Questi strumenti seguono la normativa PED Direttiva CE 97 23 EC per gli strumenti in pressione Consultare le autorit locali per i codici di...

Страница 51: ...restanda samt p verkar s kerheten i processen Det kan ven resultera i eldsv da elektrisk fara eller felaktig funktion ESPANIOL IMPORTANTES INSTRUCCIONES DE SEGURIDAD Este ap ndice contiene importantes...

Страница 52: ...OKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate f...

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