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Doc. no.: 9.17.084 rev. N Date: 23-09-2020

ATTENTION

Please read this document carefully before installing and operating the product.

Not following the guidelines could result in personal injury and/or damage to the equipment.

EL-FLOW® Prestige series

Thermal Mass Flow Meters/Controllers

Instruction Manual

Содержание EL-FLOW Prestige series

Страница 1: ...TION Pleaseread this documentcarefully beforeinstalling and operating theproduct Notfollowing theguidelines could resultin personalinjury and ordamageto theequipment EL FLOW Prestige series Thermal Mass Flow Meters Controllers Instruction Manual ...

Страница 2: ...nformationwill facilitatetheuseoftheinstrument and or contributetoitsoptimal performance Additional informationavailableontheinternet or from your Bronkhorst representative Receipt of equipment Check the outside packaging box for damage incurred during shipment If the box is damaged the local carrier must be notified at once regarding his liability if so required At the same time a report should b...

Страница 3: ...fety precautions This product is intended for use by qualified personnel who recognize shock hazards and are familiar with the safety precautions required to avoid possible injury Read the operating information carefully before using the product Before operating make sure the line cord is connected to a properly grounded power receptacle Inspect the connecting cables for cracks or breaks before ea...

Страница 4: ...Bronkhorst Instruction Manual EL FLOW Prestige 9 17 084N 4 ...

Страница 5: ...n 14 2 10 First use 14 2 11 Calibration 14 2 12 Maintenance 15 Basic operation 3 15 3 1 Mass flow measurement and control 15 Changing fluid set range or operating conditions 3 1 1 17 Valve Safe State 3 1 2 17 3 2 Communication interfaces 17 Using multiple interfaces 3 2 1 18 3 3 Analog operation 18 Cabling 3 3 1 18 3 4 Basic RS232 operation 19 Cabling 3 4 1 19 RS232 communication 3 4 1 1 20 RS232 ...

Страница 6: ...10 2 37 Advanced operation 4 37 4 1 Sealing material compatibility 38 4 2 Advanced parameters and properties 38 Measurement and control advanced 4 2 1 39 Special parameters 4 2 2 40 Fluid set 4 2 3 42 Advanced fluid set parameters 4 2 3 1 43 Fluid mixture parameters 4 2 3 2 44 Alarms 4 2 4 45 Counter 4 2 5 47 Network configuration 4 2 6 48 Master slave configuration FLOW BUS 4 2 7 49 4 3 Special f...

Страница 7: ...er isresponsiblefor takingthenecessary safetyprecautionsandproper useofappropriate personal protectiveequipment evenifsuchisnot explicitly recommendedor requiredinthisdocument Theenduser isconsideredtobefamiliar withthenecessarysafetyprecautions andtocomplywiththeappropriate protectivemeasuresasdescribedintheMaterial SafetyDataSheetsofthemediatobeusedinthesystem ifapplicable Bronkhorst High TechB ...

Страница 8: ...ate flow measurement and control stability An innovative static compensation algorithm FLUIDAT On Board uses the actual fluid temperature and pressure to calculate fluid properties in real time Density viscosity thermal conductivity and heat capacity of the processed media change under the influence of pressure and temperature The Fluidat On Board algorithm continuously recalculates these properti...

Страница 9: ...up diagram EtherNet IP 9 16 215 Hook up diagram CANopen 9 16 217 Hook up diagram DeviceNet 9 16 122 Hook up diagram EtherCAT 9 16 124 Hook up diagram FLOW BUS 9 16 120 Hook up diagram Modbus ASCII RTU 9 16 123 Hook up diagram Modbus TCP 9 16 234 Hook up diagram PROFIBUS DP 9 16 121 Hook up diagram PROFINET 9 16 147 Hook up diagram custom bus I O configurations 9 16 118 Dimensional drawing model sp...

Страница 10: ... key on the serial number label contains information about the technical properties of the instrument as ordered The actual properties of your instrument can be retrieved from the diagram below SeesectionCustomizedI O options pin5 for moreinformationabout thepin 5 configurationoptions ...

Страница 11: ...ngmaterial compatibilityfor acompatibilitylist for themost commonlyusedmedia Rapid gasdecompression explosivedecompression For instrumentsusedabove10 barg Bronkhorst recommendsamaximum decompressionrateof70 bar min accordingNACE TM0297 Exceedingthisratecanhavenegativeinfluenceonthelifetimeofthesealingmaterials Ambientconditions EL FLOW Prestige instruments are suitable for use in conditions betwee...

Страница 12: ...e instructions of the supplier of the fittings The use of Swagelok RS type stainless steel adapters is recommended Checkthefluidsystem for leaksbeforeapplyingfull operatingpressure especiallywhenusinghazardousmedia e g toxic or flammable 2 6 Electrical connection Electrical connections must be made with standard cables or according to the applicable hook up diagram see section Documentation The fa...

Страница 13: ...connector on the instrument side art no 7 03 004 7 03 536 or 7 03 537 and refer to the hook up diagram for analog operation to connect the required signals 2 7 2 Digital RS232 communication Digital operation over RS232 can be established when using the setup shown here or using a Bronkhorst E 8000 readout control unit See section Basic RS232 operation for more cabling examples Connecting the instr...

Страница 14: ...nor Argon isabsolutelynecessarybeforeuse After usewithcorrosive reactiveor hazardousmedia e g toxic or flammable purgingisalsonecessarybeforethefluidsystem isexposedtoair Theveryfirst timetheinstrument isused adjustingthezeropoint isrecommended SeeAdjustingzeropoint for backgroundinformationandinstructions 2 11 Calibration The EL FLOW Prestige is factory calibrated Periodical inspection recalibrat...

Страница 15: ...tsonarigid heat conducting surface Regular EL FLOW Prestige MFCshandlepressureshocksinthesystem well but arenot insensitivetopressure fluctuations For optimum control stability provideastable pressurecontrolled inlet pressurewithsufficient buffer volumebetweenthepressureregulator andtheMFC andavoidinstallingmultipleMFCsor other control valvesinclose proximitytoanother withsmall volumepipinginbetwe...

Страница 16: ...associateddocumentationcanbedownloadedfrom theproduct pagesontheBronkhorst website www bronkhorst com products Note regarding instruments with active pressure compensation For EL FLOW Prestige PI seeEL FLOW PrestigePI instrumentsandandinstrumentswithI Ooption H1P enabled see CustomizedI O options pin5 theinlet pressureenteredinFlowTuneisusedonlyfor flowrange capacitycalculations see Advancedfluids...

Страница 17: ...ly the instrument can be provided with one of the following optional digital fieldbus interfaces FLOW BUS Modbus ASCII RTU TCP PROFIBUS DP EtherNet IP CANopen DeviceNet EtherCAT PROFINET The default communication protocol of the instrument analog digital RS 232 or fieldbus is specified at ordering time 3 2 1 Using multiple interfaces The analog interface is always present on EL FLOW Prestige instr...

Страница 18: ... key and the pin description on the serial number label See also section Customized I O options pin 5 Whenoperatingtheinstrument throughtheanaloginterfaceit ispossibletoconnect theinstrument simultaneouslyto RS232 for reading changingparameters e g settingsor fluidselection 3 3 1 Cabling Use a loose end cable with a 9 pin D sub female connector on the instrument side art no 7 03 004 7 03 536 or 7 ...

Страница 19: ...s can be used providing a comprehensive user interface to the digital instrument functions This example uses the following components EL FLOW Prestige RS 232 T part cable art no 7 03 366 RS 232 USB converter art no 9 09 122 Windows computer for readout and control Plug in Power Supply PiPS art no 7 03 422 Connect the T part cable with the 9 pin D sub connector on the side of the instrument and use...

Страница 20: ...ximum power ofthepower supplyunit For all availablefieldbustypesexcept PROFIBUS DP thefieldbusconnectiononisusedtopower andoperatethe instrument For PROFIBUS DP theinstrument needstobepoweredthroughthe9 pinD subconnector onthesideofthe instrument asshowninRS232 communication Consult theaccordingfieldbusmanual for moreinformationabout settingupafieldbusnetworkwithBronkhorst instruments Ifyouneedass...

Страница 21: ...l spreadsheet can be linked to the measured value of an instrument FlowDDE updates the cell automatically when the measured value changes FlowDDE uses specific parameter numbers for communicating with the instrument A DDE parameter number is a unique number in a special FlowDDE instruments parameter database and not the same as the parameter number from the process on an instrument FlowDDE transla...

Страница 22: ...unication The factory selected baud rate is indicated on the serial number label See section Network configuration for changing the baud rate settings for the instrument The default baud rate for RS232 communication is 38400 Baud Mode Digital Interface medium RS232 Protocol FLOW BUS ProPar Baud rate 9600 16200 38400 57600 115200 230400 460800 Nodeaddress 3 Parity None Makesurethat theinstrument sb...

Страница 23: ...atic node search and bus optimization gap fixing RS 232 communication ProPar with Windows computer local host Connection of up to 120 instruments on a single bus Maximum bus length 600 m Consult Instruction manual FLOW BUS interface document no 9 17 024 for moreinformationabout settingupa FLOW BUS network Modbus Modbus is a 3 wire RS 485 based fieldbus communication system for parameter value exch...

Страница 24: ...ment serves as a local host for RS232 communication with a Windows computer through the 9 pin D sub connector on the side of the instrument All other instruments on the FLOW BUS network are also accessible via the local host It is even possible to use multiple local host RS232 FLOW BUS interfaces simultaneously The following components are used in this example 2x EL FLOW Prestige 2x modular Y adap...

Страница 25: ...nkhorst software When using Modbus operation software from third parties such as LabVIEW ModScan or a Modbus PLC must be used to serve as Modbus master Note aninstrument with9 pinD subsideconnector set for RS485 FLOW BUS or Modbuscommunicationwill not respond whenconnectingtoanRS232 configuration Iftheinstrument isnot set for RS232 communication usethemicroswitchon topoftheinstrument tooverridethe...

Страница 26: ...Configuration Mode Activate the Configuration Mode by pressing the micro switch at start up according to the description in the previous In Configuration Mode the bus type and baud rate are set to RS232 FLOW BUS ProPar at 38400 Baud Change the appropriate parameters as described in Network configuration When finished deactivate the Configuration Mode using the same procedure Now the instrument is ...

Страница 27: ... PROFIBUS DP node address The node address can be easily set by using the rotary switches on the side of the instrument Use the MSD Most Significant Digit to set the tens of the bus address and the LSD least Significant Digit to set the unit of the bus address Changing DeviceNet node address and data rate The node address and data rate can be easily set by using the rotary switches on the side of ...

Страница 28: ...f test long flash 2 sec on 0 1 sec off Configuration mode the 9 pin D sub power connector is set for RS232 communication ProPar at baud rate 38400 Red Pattern Time Indication off continuous No error on continuous Critical error the instrument needs servicing before it can be used short flash 0 1 sec on 2 sec off FLOW BUS Node occupied re install instrument PROFIBUSDP No data exchange between maste...

Страница 29: ... Prestigecanbeoperatedwithathinmetal or hardplastic pin e g theendofa paperclip 3 8 1 Normal operating functions In order to access these functions press and hold the switch while the instrument is in normal operation mode green LED glowing As long as the switch is held the LEDs show a repeating sequence of patterns where each pattern indicates a function All indications in this sequence are conti...

Страница 30: ... 3 8 3 Control mode readout change Reading controlmode By briefly pressing the switch 2 times with intervals of up to 1 second in normal operation mode the instrument shows its current control mode with a series of consecutive LED indication patterns The number of flashes corresponds to the current value of parameter Control Mode see Special parameters Step Pattern Indication 1 Green number of fla...

Страница 31: ... Reading network settings By briefly pressing the switch 3 times with intervals of up to 1 second in normal operation mode the instrument shows its current node address and baud rate with a series of consecutive LED indication patterns Step Pattern Indication 1 Green number of flashes indicates the tens of the node address 2 Red number of flashes indicates the units of the node address 3 Green and...

Страница 32: ...nd otherwise Count the number of LED flashes Release the switch as soon as the required value is reached In case you lose count keep the switch pressed and wait until the flash count reaches its maximum and restarts On completion of a step the instrument automatically advances to the next step When all required steps have been completed the instrument returns to its normal operation mode If the sw...

Страница 33: ...aximum length are truncated Other interfaceprotocols Consult the specific fieldbus manual for accessing parameters using fieldbus communication see Documentation 3 9 2 Measurement and control basic Measure Type Access Range FlowDDE FLOW BUS Modbus Unsigned int R 0 41942 65535 8 1 0 0x0020 33 This parameter indicates the flow metered by the instrument The signal of 0 100 is presented in a range of ...

Страница 34: ...e identification User Tag Type Access Range FlowDDE FLOW BUS Modbus Unsigned char 16 RW 115 113 6 0xF130 0xF137 61745 61752 With this parameter the instrument can be given a custom tag name with a maximum of 16 characters Customer Model Type Access Range FlowDDE FLOW BUS Modbus Unsigned char 16 RW 93 113 4 0xF120 0xF127 61729 61736 This parameter is used to add extra information to the model numbe...

Страница 35: ...ient conditions temperature pressure match those of the operating environment of the instrument the instrument is filled homogeneously with the operational media there is absolutely no flow through the instrument preferably this is achieved by closing a valve immediately after the outlet of the instrument control valve shut off valve Blockingtheflowthroughtheinstrument isabsolutelyessential zeroin...

Страница 36: ... close control valve 2 Init Reset 64 unlock secured parameters 3 Control Mode 9 enable calibration mode 4 Calibration Mode 0 reset calibration mode 5 Calibration Mode 9 start zeroing The green LED starts to blink fast indicating that the zeroing procedure is being performed On completion the green LED starts to glow continuously while the output signal is 0 parameter Measure 0 At the same time par...

Страница 37: ...ar g 50 C max 10 bar g 50 C ED compound1 max 30 bar g C2F6 Freon 116 C2H2 Acetylene 2 C2H4 Ethylene max 10 bar g 3 max 10 bar g max 10 bar g C2H6 Ethane C3H6 2 Propylene max 10 bar g max 58 bar g 3 C3H8 Propane Cl2 Chlorine He Helium H2 Hydrogen H2S Hydrogensulfide Kr Krypton NF3 Nitrogentrifluoride NH3 Ammonia NO Nitric oxide N2 Nitrogen N2O Nitrous oxide max 20 bar g 50 C O2 Oxygen SF6 Sulfur he...

Страница 38: ...35 The value of this parameter represents the time it would take to adjust the setpoint if it were changed from 0 to 100 This feature can be used to smooth nervous controller behavior e g to reduce setpoint overshoot or undershoot The supported range corresponds to 0 3000 seconds Default value 0 Example If Setpoint Slope 100 it will take 10 seconds to adjust the setpoint if it is changed from 0 to...

Страница 39: ...edbyReset Alarm Enable or Reset Counter Enable Makesurethevalueisaccepted bysendingvalue0 first Wink Type Access Range FlowDDE FLOW BUS Modbus Unsigned char 27 W 0 9 1 0 0 0x0000 1 Sending any text string value between 1 and 9 to this parameter makes the indication LEDs if present blink for a couple of seconds This can be useful in order to identify a specific device in a large fieldbus network Mo...

Страница 40: ...ult control modefor moreinformationabout thedefault control mode SeesectionControl mode readout changefor informationabout changingthecontrol modeusingthe multifunctional switch Parameter values3 8 20 and21 canbeusedregardlessifthecontroller isenabledor not Seealsoparameter Sensor Type Control Mode values2 and13 areonlyeffectiveinaFLOW BUS system seealsosectionMaster slaveconfiguration FLOW BUS 4 ...

Страница 41: ... ul s ml h ml min ml s l h l min l s cc h cc min cc s mm3 h mm3 m mm3 s cm3 h cm3 m cm3 s m3 h m3 min m3 s cfh cfm cfs Becauseofthemaximum stringlength 7 characters someunit namesareabbreviated For instancemm3n m means mm3n min CapacityUnitTypeTemperature Type Access Range FlowDDE FLOW BUS Modbus Float RW 273 15 3 4E 38 245 33 10 0xA150 0xA151 41297 41298 This parameter defines a reference tempera...

Страница 42: ...Fluid Temperature Type Access Range FlowDDE FLOW BUS Modbus Float RW 250 500 181 113 16 0xF180 0xF181 61825 61826 Temperature of the current fluid in C Density Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 3 4E 38 170 33 21 0xA1A8 0xA1A9 41385 41386 Density of the current fluid in kg m3 HeatCapacity Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 3 4E 38 250 113 18 0xF190 0xF191 61841 ...

Страница 43: ...f MixFractionType 0 MixComponentIndex Type Access Range FlowDDE FLOW BUS Modbus Unsigned char RW 0 4 349 126 7 0x0FC7 4040 Index of the current component in the mixture max 5 components MixComponentFraction Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 1 350 126 8 0xFE40 0xFE41 65089 65090 Mix fraction of the current mix component MixComponent Index The value range corresponds to 0 100 The ...

Страница 44: ...ter power down On DeviceNet instruments only modes 0 and 1 are available AlarmInfo Type Access Range FlowDDE FLOW BUS Modbus Unsigned char R 0 255 28 1 20 0x0034 53 This parameter provides information about the event type s that triggered an alarm situation The value is a bitwise summation of the issued alarm types convert the value to binary to see which types are issued The following alarm types...

Страница 45: ...int after an alarm situation is activated Value Description 0 No setpoint change default 1 Change setpoint to Alarm newsetpoint AlarmNew Setpoint Type Access Range FlowDDE FLOW BUS Modbus Unsigned int RW 0 32000 121 97 6 0x0C26 3111 New safe setpoint during an alarm until reset Range 0 32000 represents 0 100 setpoint Default value 0 ResetAlarmEnable Type Access Range FlowDDE FLOW BUS Modbus Unsign...

Страница 46: ...alue Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 10000000 122 104 1 0xE808 0xE809 59401 59402 Current counter value in units selected with parameter Counter Unit Counter Limit Type Access Range FlowDDE FLOW BUS Modbus Float RW 0 9999999 124 104 3 0xE818 0xE819 59417 59418 Counter limit batch size in units selected with parameter Counter Unit Default value 0 Counter SetpointMode Type Acces...

Страница 47: ...ccess Range FlowDDE FLOW BUS Modbus Unsigned char RW 0 255 199 125 10 0x0FAA 4011 Fieldbus1 Baud Rate Type Access Range FlowDDE FLOW BUS Modbus Unsigned long RW 0 1 0E10 201 125 9 0xFD48 0xFD49 64841 64842 Fieldbus1 Parity Type Access Range FlowDDE FLOW BUS Modbus Unsigned char RW 0 2 335 125 12 0x0FAC 4013 The following values are supported Value Description 0 No parity 1 Odd parity 2 Even parity...

Страница 48: ... then set Control Mode of the slave instrument to FLOW BUS Slave value 2 or FLOW BUS Analog Slave value 13 depending on how the setpoint should be calculated see parameter Control Mode The slave instrument polls the output value of its master periodically and uses the slave factor to set its own flow relative to the master s Setpointsfrom master instrumentscanbereceivedviaFLOW BUS only Toprevent d...

Страница 49: ...with the controller function enabled make sure to set parameter Valvemaximum to 0 3 A For mass flow controllers the controller output signal represents the valve actuator current This output is limited to a value below 20 mA due to the maximum valve current restriction B2V 3 8 20 8 mA sourcing output controller Analog signal for Badger Meter valve with TEIP11 signal converter control signal only C...

Страница 50: ...e Counter unit batch value with a pulse length of 1 second For instance when Counter unit is set to ln a pulse is given each time 1 ln has passed through the instrument An alternative pulse length must be specified on order Provide a pull up resistor of 5 10 kOhm to create 15 24 Vdc at pin 5 according to the applicable hook up diagram H1P 4 20 mA input external pressure sensor for active pressure ...

Страница 51: ...e procedures as described below Changing from digital operation to analog operation 1 Set parameter Init Reset to 64 unlocked 2 Read parameter IO Status 3 Add 64 to the read value 4 Write the new value to parameter IO Status 5 Set parameter Init Reset to 82 locked Changing from analog operation to digital operation 1 Set parameter Init Reset to 64 unlocked 2 Read parameter IO Status 3 Subtract 64 ...

Страница 52: ...specific alarm andcounter indicators 5 2 Restoring factory settings In case changes to the instrument configuration leads to non recoverable erroneous behavior the instrument can be reset to the pre configured factory settings This can be done with the following methods with the multifunctional switch see Micro switch functions with the restore function of a Bronkhorst readout and control unit BRI...

Страница 53: ...t pressure Valve blocked or damaged Return to factory Stoppage Remove contamination Flow signal is gradually decreasing without setpoint change Pressure difference across instrument insufficient to achieve requested flow rate Check inlet outlet pressure Process gas condensation occurs Decrease pressure or increase gas temperature Oscillating controller output Controller adjustment wrong PID settin...

Страница 54: ... product for your application Contact sales by e mail sales bronkhorst com For after sales questions our Customer Service Department is available with help and guidance To contact CSD by e mail support bronkhorst com No matter the time zone our experts within the Support Group are available to answer your request immediately or ensure appropriate further action Our experts can be reached at 31 859...

Страница 55: ...ininga Declarationondecontamination form document no9 17 032 canbe downloadedfrom theService Support sectionoftheBronkhorst website www bronkhorst com Important Clearly note on top of the package the customs clearance number of Bronkhorst High Tech B V NL801989978B01 only if applicable otherwise contact your Bronkhorst representative for local arrangements 6 2 Disposal end of lifetime Within the E...

Страница 56: ...Bronkhorst Instruction Manual EL FLOW Prestige 9 17 084N 56 ...

Страница 57: ...Unit Type Temperature 41 Controller Speed 41 Fluid Name 40 Fluid Set Index 40 Parameters Fluid set advanced Density 42 Fluid Temperature 42 Heat Capacity 42 Inlet Pressure 42 Outlet Pressure 42 Thermal Conductivity 42 Viscosity 42 Parameters Fluid set mixture Mix Component Fluid Name 43 Mix Component Fraction 43 Mix Component Index 43 Mix Fraction Type 43 Mix Volume Pressure 43 Mix Volume Temperat...

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