STP-603/1003 Series Instruction Manual
4.3.1
Cleaning the Seal
Installation
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before
installing the STP pump to the vacuum equipment.
Take the following measures for cleaning the seals:
•
Clean off with a pure gas.
•
Wipe with proper solvent (such as alcohol).
◇
A splinter shield is attached to the inlet port flange to prevent foreign
materials from falling into the STP pump.
Always leave the splinter shield attached during operation.
◇
The wipes used for clean the flange of the pump might become
hazardous waste depending upon the solvent (alcohol). Dispose of
the contaminated wipes appropriately according to the regulations of
each national and/or local government.
◇
The splinter shield cannot perfectly prevent foreign materials from
falling into the STP pump.
DO NOT install the STP pump in such a manner that foreign materials
can easily fall into it (for example, Si wafers or samples are
positioned above the STP pump). If installing the STP pump in such
a manner, always attach a shield plate with sufficient conductance
above the STP pump to prevent foreign materials from falling into it.
Foreign materials falling into the STP pump through the splinter
shield may result in product damage.
◇
Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before
installing the STP pump.
4-7