BOC Edwards CV-6SL, Инструкция по эксплуатации

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2.11 Remote Wiring
2.11.1 Gun Control
Digital Interlock Inputs (Required)
INTERLOCK PIN WIRE FUNCTION
TANK 13, 14 O, BK Prevents the gun from being switched on unless
all vacuum system doors and covers are closed
and locked so that personnel cannot come into
contact with high voltage within the vacuum
cubicle.
VACuum 15, 16 W, R Protects the gun filament GAUGE by ensuring
that the product chamber ion gauge is on before
the gun is switched on
AUXiliary 18, 19 G, R Customer defined. Used with multi pocket
sources to ensure that the beam is OFF while the
turret is rotating. Must be jumpered ON if not
used; can also be jumpered on at JP1 on the
display panel PCB.
GUN WATER 20, 21 BL, R Prevents the gun from being switched on unless
it is receiving sufficient cooling water. Signal to
be supplied by a customer- installed flow switch.
POSITION 22, 23 Y, R Prevents the gun from being switched on unless
the beam is correctly positioned in the pocket.
Signal can be supplied via these lines by an
external beam sweep controller. If no external
sweep controller is used, the position PCB in the
gun interface chassis supplies this signal
internally.
Analog Control Inputs
SIGNAL G1-J13 WIRE
PAIR FUNCTION
REMOTE
EMISSION
CURRENT
REQUEST 56, 57 O(+), R(-) If the gun control unit's REMote/RANGE switch
is in the REMOTE position, this input linearly
controls emission current within the selected
range: 0 V = min. current for the selected range;
+ 10V = max. current for that range
Digital Control Inputs
SIGNAL G1-J13 WIRE
PAIR
FUNCTION
REMOTE GUN
GO OFF*/ENABLE 5, 6 G, BK A momentary open pulse switched off the gun.
If all gun control interlocks are made, the gun
can be switched on again.
NOTE
If these pins are not connected to a remote
contact closure, they must be jumpered together
or the gun cannot be switched on.
REMOTE GUN
GO ON 7, 8 BL, BK If all gun control interlocks are made and the
GUN GO OFF*/ENABLE loop is closed, a 2-
sec. contact closure across these pins switches on
the gun.
FILAMENT
CURRENT
MONITOR 24, 25 Y, BK A 0 to 7.5 volt signal proportional to 0-75
amperes is available for driving a remote meter.
The impedance should be 1 megohm or higher.