ATTOTECH GR020 Скачать руководство пользователя страница 10

 

10

Operation 

The valve must be cooled for steady operation and be powered by a high voltage amplifier 
delivering 

negative voltages

. Maximum negative voltage is -350 V. The backing pressure in the 

valve body should be set up to maximum 5 bars.  

Turning on-off procedure  

The following is a general presentation of the turning on/off procedure. If you ordered the Attotech 
driver, you may skip to section “Turning on-off with the Attotech Driver”. 

 

The trigger frequency must not exceed 1 kHz and the opening gate must be in the range 120

μ

s to 

500

μ

s. Once the cooling is on and the backing pressure (1-5 Bar) is steady, progressively 

increase the negative voltage driving the valve until you see the pressure in your experimental 
chamber rising. It should be noted that the opening is not linear: the valve stays closed up to a 
certain threshold (called hereafter the opening voltage) after which the amount of gas sent in the 
target increases rapidly with the voltage. Be careful when approaching the typical opening 
voltages given in the table in the “specifications” section.  
 
Once the right amount of gas is set, you should 

let it run for approximately 15 minutes

 to reach 

a thermal steady state. During this time, it might be necessary to slightly readjust the high 
voltage.  
Note that the opening voltage depends on the gas used (see table in the specifications section) 
 
Scan the delay controlling when the valve starts to open to find temporal overlap of the released 
gas and your laser.  
 
To turn off the valve, first, turn down the negative driving voltage, then, turn off the electrical 
power, the cooling and close the backing gas bottle.  
 

Turning on-off procedure with the Attotech Driver (Option) 

Preliminary checks  

  Make sure the Main power switch (#1) is off. 

  Check that the low voltage signal is not connected to the high voltage amplifier, (#5) is 

off. 

  Fully turn counter clockwise the Peak voltage adjustment knob (#4) 

  Make sure that the TTL signal feeding the Gate input connector (#8) is 

positive.

 The 

trigger frequency must not exceed 1 kHz and the opening gate must be in the range 
120

μ

s to 500

μ

s. 

  Make sure you are using the right power voltage (120/240V) and that the amplifier’s 

socket is plugged. 

  Turn on the cooling of the valve 

 

Turning on 

  Apply a steady backing pressure (1-5 Bar) to the gas inlet of the valve. 

  Turn on the Main power switch (#1) 

 (Optional). 

Progressively 

turn 

clockwise 

the Peak voltage adjustment knob (#4) and use 

an (high Z) oscilloscope to monitor the signal available on the Low Voltage Monitor 
connector (#6). It should show an image of the input gate with the amplitude displayed in 
the Peak Voltage indicator (#2) divided by 100. Make sure it is positive. Turn the Peak 
voltage adjustment knob (#4) back to zero.   

Содержание GR020

Страница 1: ...Manual GR020 PIEZO DRIVEN PULSED VALVE Attotech handelsbolag Gull kra Byav g 18 245 35 Staffanstorp Sweden...

Страница 2: ...2...

Страница 3: ...3...

Страница 4: ...Operation 10 Turning on off procedure 10 Turning on off procedure with the Attotech Driver Option 10 Settings 11 Target change 11 Piezo instructions 11 Trouble shooting 12 Gas leak diagnosis 12 Atten...

Страница 5: ...applied The valve opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through the body The amount of gas is controlled by the voltage applied to the PZD At the end of...

Страница 6: ...n this drawing 4 5 8 7 9 6 16 14 11 13 12 10 2 1 3 15 1 Body front piece 10 M2 5 slotted screw 2 Body back piece 11 Piezo electric disc PZD 3 M3 hex screw 12 Clamping screw 4 Cooling tube 13 Clamping...

Страница 7: ...turn is enough The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W A flow of 4 5 l min of 15 C tap water provides sufficient cooling The piezo electric...

Страница 8: ...ative operating voltage must not exceed 350 V Keep in mind that in high pressure atmosphere discharges occur at lower electric fields hence the voltage limit A delay box with microsecond resolution tr...

Страница 9: ...6 Low voltage monitor connector high Z 7 Control input connector high Z 8 Gate input connector high Z 9 High voltage offset disabled 10 Control input disabled 11 High voltage output Electrical connect...

Страница 10: ...high voltage Note that the opening voltage depends on the gas used see table in the specifications section Scan the delay controlling when the valve starts to open to find temporal overlap of the rele...

Страница 11: ...er switch 1 Close the cooling and close the backing gas bottle Settings The gas flow when the valve is open is dependent on the backing pressure Stable operation of the pulsed valve requires the backi...

Страница 12: ...k and front of the valve body Check if the gas feed through is mounted according to the instructions in the Installation Gas section If the gas feed through is mounted according to the instructions pr...

Страница 13: ...leak remains repeat the procedure step 3 Note that locking the position of the poppet with the poppet nut tends to retract the poppet hence the leak might reappear In that instance repeat the procedur...

Страница 14: ...rn the screw in the threaded hole The screws should be tightened in a cross tightening sequence Add a small amount of torque for every iteration Pay attention not to damage the threads Thanks to the l...

Страница 15: ...ons External input voltage range 0 to 350 V Electrical capacitance 65nF Electrical Power 50 W Repetition rate 0 1 kHz Electrical opening time 120 s to 500 s Heat removal power 2 W 4 5 L min of water O...

Страница 16: ...rranty Except as thus provided we disclaim all warranties express or implied including any warranty of fitting for a particular purpose Attotech HB will not assume responsibility for contingent liabil...

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