Manual
GR020
P
IEZO
D
RIVEN
ULSED
V
ALVE
Attotech handelsbolag, Gullåkra Byaväg 18, 245 35 Staffanstorp, Sweden
Страница 1: ...Manual GR020 PIEZO DRIVEN PULSED VALVE Attotech handelsbolag Gull kra Byav g 18 245 35 Staffanstorp Sweden...
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Страница 4: ...Operation 10 Turning on off procedure 10 Turning on off procedure with the Attotech Driver Option 10 Settings 11 Target change 11 Piezo instructions 11 Trouble shooting 12 Gas leak diagnosis 12 Atten...
Страница 5: ...applied The valve opens when applying a voltage to the PZD and the backing gas flows in the 1 mm pipe through the body The amount of gas is controlled by the voltage applied to the PZD At the end of...
Страница 6: ...n this drawing 4 5 8 7 9 6 16 14 11 13 12 10 2 1 3 15 1 Body front piece 10 M2 5 slotted screw 2 Body back piece 11 Piezo electric disc PZD 3 M3 hex screw 12 Clamping screw 4 Cooling tube 13 Clamping...
Страница 7: ...turn is enough The heat removal power of the chiller attached to the internal cooling circuit must be at least 2 W A flow of 4 5 l min of 15 C tap water provides sufficient cooling The piezo electric...
Страница 8: ...ative operating voltage must not exceed 350 V Keep in mind that in high pressure atmosphere discharges occur at lower electric fields hence the voltage limit A delay box with microsecond resolution tr...
Страница 9: ...6 Low voltage monitor connector high Z 7 Control input connector high Z 8 Gate input connector high Z 9 High voltage offset disabled 10 Control input disabled 11 High voltage output Electrical connect...
Страница 10: ...high voltage Note that the opening voltage depends on the gas used see table in the specifications section Scan the delay controlling when the valve starts to open to find temporal overlap of the rele...
Страница 11: ...er switch 1 Close the cooling and close the backing gas bottle Settings The gas flow when the valve is open is dependent on the backing pressure Stable operation of the pulsed valve requires the backi...
Страница 12: ...k and front of the valve body Check if the gas feed through is mounted according to the instructions in the Installation Gas section If the gas feed through is mounted according to the instructions pr...
Страница 13: ...leak remains repeat the procedure step 3 Note that locking the position of the poppet with the poppet nut tends to retract the poppet hence the leak might reappear In that instance repeat the procedur...
Страница 14: ...rn the screw in the threaded hole The screws should be tightened in a cross tightening sequence Add a small amount of torque for every iteration Pay attention not to damage the threads Thanks to the l...
Страница 15: ...ons External input voltage range 0 to 350 V Electrical capacitance 65nF Electrical Power 50 W Repetition rate 0 1 kHz Electrical opening time 120 s to 500 s Heat removal power 2 W 4 5 L min of water O...
Страница 16: ...rranty Except as thus provided we disclaim all warranties express or implied including any warranty of fitting for a particular purpose Attotech HB will not assume responsibility for contingent liabil...
