Ametek TAYLOR HOBSON Surtronic S-100 Series, Руководство пользователя, Страница: 24 / 58

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English Measurement capability S-116 S-128
Gauge
Range
200 µm / 100 µm /
10 µm
400 µm / 100 µm /
10 µm
Resolution
100 nm / 20 nm /
10 nm
50 nm / 10 nm /
5 nm
Noise floor (Ra)
250 nm / 150 nm /
100 nm
150 nm / 100 nm /
50 nm
Repeatability (Ra)
1 % of value +
noise
0.5 % of value +
noise
Pickup type
Inductive
Gauge force
150-300 mg
Stylus tip radius
5 µm (200 µin) default / 2 µm (80 µin)
or 10 µm (400 µin) optional
Measurement type
Skidded
Calibration
Process
Automated software calibration
routine
Standards
Able to calibrate to ISO 4287
roughness standards
Analysis
Filter cut-off
0.25 mm / 0.8 mm / 2.5 mm
Filter type
2CR / Gaussian
Evaluation length
0.25 mm - 17.5 mm
(0.01 in - 0.70 in)
0.25 mm - 25.0 mm
(0.01 in - 1.00 in)
Max X axis range
17.5 mm 25.5 mm
Speed
Measuring speed 1 mm / sec (0.04 in / sec)
Returning speed
1.5 mm / sec (0.06 in / sec)
CE marking
Taylor Hobson products conform with all applicable legal
requirements of the European Union (EU) for CE marking.
The CE Mark on the product label indicates that
Taylor Hobson has checked that products meet
all applicable EU Essential Requirements, Standards
and Directives as declared on the ‘Declaration of
Conformity’ included with the product.