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Agilent Technologies XGS-600 Скачать руководство пользователя страница 11

XGS-600 Gauge Controller

DRAFT 4/15/14

11

Chapter 1: Introduction

Congratulations on your purchase of the XGS-600. This product represents a major advance
in the simplicity, functionality and performance of vacuum gauge controllers. It was
conceived after extensive interviews with end users in a variety of applications. Its design
incorporates the latest in electronics and is certified to CE and CSA requirements, and is
RoHS compliant. It is compact, taking only ½ rack and it is simply without peer in terms of
its capacity, usability and capability.

You can view up to 8 gauges on one screen and can employ as many as 5 ion gauges or
12 convection or Agilent gauges in one unit. With its simple user interface (designed to be
operated without a manual) and its many standard features (8 set points, serial
communication, universal voltage and pressure units), vacuum measurement is simplified.
And where speed is necessary for certain critical applications it was designed to process a
signal in less than 20 milliseconds. These are just some of the many features that make the
XGS-600, a unique and powerful device. Once you have used the XGS-600, we trust that
you, too will find that it is not only a convenient and economical tool in your vacuum
system but an indispensable one as well.

Read this manual carefully to discover all the capability of this device, but if you don't have
time, simply turn it on and navigate through the screens to get started.

Backwards Compatibility

The XGS-600 is designed to be substantially backwards compatible with the SenTorr and
MultiGauge instruments. Refer to page 63 for a full description.

Part Number Scheme

** HFIG = Hot Filament Ion Gauge

* IMG = Inverted Magnetron Gauge

1

A

X

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9
10
11
12
13
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Содержание XGS-600

Страница 1: ...DRAFT 4 15 14 ICES NMB 001 XGS 600 Gauge Controller Manual No 699908410 Revision D April 2014 INSTRUCTION MANUAL ...

Страница 2: ...Copyright 2014 Agilent Technologies XGS 600 Gauge Controller ...

Страница 3: ... representatives of Seller which are inconsistent or in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller ...

Страница 4: ...XGS 600 Gauge Controller This page intentionally left blank ...

Страница 5: ...llation 15 Connect the Unit 15 Operating Instructions 23 Operational Screens 23 Service and Troubleshooting 41 Troubleshooting 46 Appendix A XGS 600 Gauge Specifications 51 Instrument Specifications 51 Board Specifications Descriptions 55 I O Pin Assignments 60 XGS 600 vs MultiGauge and SenTorr Backwards Compatibility Detail 63 Appendix B ASCII Serial Commands 67 Appendix C BCD Serial Commands 77 ...

Страница 6: ...XGS 600 Gauge Controller This page intentionally left blank ...

Страница 7: ...ons NOTE The notes contain important information This product must only be operated and maintained by trained personnel Board installation replacement requires a properly trained service technician Before operating or servicing equipment read and thoroughly understand all operation maintenance manuals provided by Agilent Technologies Be aware of the hazards associated with this equipment know how ...

Страница 8: ...erating conditions due to the lack of shielding of these devices Add supplemental shielding for the glass BA gauge by installing a grounded metal cage or screen that completely surrounds the gauge but still allows for air flow This reduces emissions to acceptable levels and provides additional protection against accidental breakage of the glass BA gauge FCC This device complies with Part 15 of the...

Страница 9: ...c phenomena electrostatic discharges and power line voltage spikes and or surges can cause the XGS 600 to become blank If this occurs the screen should recover in approximately five seconds Only the screen is affected measurements setpoint state analog outputs and serial communications are not affected ...

Страница 10: ...XGS 600 Gauge Controller This page intentionally left blank ...

Страница 11: ...al and its many standard features 8 set points serial communication universal voltage and pressure units vacuum measurement is simplified And where speed is necessary for certain critical applications it was designed to process a signal in less than 20 milliseconds These are just some of the many features that make the XGS 600 a unique and powerful device Once you have used the XGS 600 we trust th...

Страница 12: ... Rear Panel Components Item Description Page 1 Display See Screen Flow on page 23 2 Keypad Navigation Keys See General Navigation and Data Entry on page 24 3 Open Collector Set Point Outputs See Set Point Connector Pin Assignments on page 61 4 Serial Communication Connector Serial Connector Pin Assignments on page 61 5 Gauge Board Slots 6 See Board Specifications Descriptions on page 55 6 On Off P...

Страница 13: ...ltigauge or senTorr controller However the relays have a maximum rating of 30 VDC at 2 A See Table A 1 on page 51 for additional specifications 7 Ground Connection See Connect the Unit on page 15 8 Setpoint Relay Connector See Connect the Unit on page 15 Table 1 1 Front Rear Panel Components Continued Item Description Page ...

Страница 14: ...XGS 600 Gauge Controller 14 D R A F T 4 1 5 1 4 Unit Dimensions Figure 1 3 shows the unit dimensions with mm in brackets Figure 1 3 XGS 600 Dimensions ...

Страница 15: ...ir flow 1 Install the included ferrite bead onto the AC power Mains cable near the XGS 600 chassis Ensure that the locking tab is fully engaged 2 Plug the AC line cord into the receptacle on the rear panel of the unit and into the power source Keep power off while connecting the remaining cables 3 Connect gauge and I O cables depending on controller configuration according to Figure 2 1 Figure 2 1...

Страница 16: ... 250 C R32463010 R32463025 R32463050 UHV 24 UHV 24p Standard non bakeable R32453010 R32453025 R32453050 Glass BA Gauge Standard non bakeable R32443010 R32443025 R32443050 Ion Gauge Extension R32473065 R32473090 MBA l00 Gauge R32483010 R32483025 R32483050 IMG 100 Gauge R03113010 R03113025 R03113050 R03113075 R03113100 IMG UHV Gauge R03413010 R03413025 R03413065 R03413100 Thermocouple Gauge L9131301...

Страница 17: ...4235 Analog Input PCB Field Install R3487301 UK Ireland 13A 230 VAC 2 5 Meter 656494250 Tilt Stand Accessory R3124301 India 10A 220 250 VAC 2 5 Meter 656494245 Center Rack Mount Kit L6423301 Israel 10A 230 VAC 2 5 Meter 656494230 Off Center Rack Mount Kit L6422301 Japan 12A 100 VAC 2 3 Meter 656494240 Dual Mount Rack Mount Kit L6426301 North America 15A 125 VAC 2 0 Meter 656458203 Four Channel TC ...

Страница 18: ...XGS 600 Gauge Controller 18 D R A F T 4 1 5 1 4 Rack Mounting Instructions Depending on Rack Mounting kit selected assemble per Figure 2 2 Figure 2 2 Rack Mounting Instructions ...

Страница 19: ...ccurate and reliable fast response Capacitance diaphragm gauge Fast response gas independent over whole range High 10 3 to 10 9 572 glass Most popular general purpose HV gauge hot filament Measures to 1 x 10 9 Torr Tungsten filaments More accurate and repeatable Glass Can see when it is on 563 glass Best general purpose HV gauge hot filament for overall performance and reliability Measures to 1 x ...

Страница 20: ...d Magnetron Most durable and fastest responding UHV gauge cold cathode Measures to 1 x 10 11 Torr Bakeable with magnet to 250 C Bakeable without magnet to 450 C Reliable rugged will not burn out Can be cleaned UHV 24 nude Most popular UHV gauge hot filament Measures to 1 x 10 10 Torr Bakeable with magnet to 250 C Thoriated iridium filaments run cooler less outgassing Dual tungsten filaments run ho...

Страница 21: ...74016 4336 TK 1 T 100 N 274017 T 100 K 274018 T 100 P 274021 T CFF 133 T CFF 275 T KF25 T KF40 Select Sensor model 571 for the following 274002 4336 P IGT 075 IP 100 G075F I 075 N 274003 4336 K IGT 100 IK 100 G100F I 075 P 274005 4336 F IK 100 F G100KQF25 I 075 K 274006 4336 P 1 IP 150 G100KQF40 I 100 N 274008 4336 F 1 IK 150 G075N I 100 K 274020 4336 K 1 IK 150 F G100K I 100 P 274032 8140 I CFF 1...

Страница 22: ...el 564 for the following GX100 564F I 164 K GX100 564K I 164 N GX100 564N I 164 275 I 164 KF25 I 164 KF40 Table 2 4 Compatible Agilent Gauges Agilent Inficon Leybold MKS Auto ID Code PVG500 502 PSG500 502 PVG500 PVG550 552 PSG550 552 PVG500 PCG750 752 PCG550 552 PCG750 FRG700 702 MPG400 401 FRG700 FRG720 730 BPG400 402 ITR 90 ITR 200 FRG720 CDG500 CDG025D CRT100 CDG500 CT 100 CT 100 622B 623B 626B...

Страница 23: ...igure 3 1 shows the screen flow Figure 3 1 Screen Flow Main Setpoints Large Font Sensor Setup System Setup Reset See page 25 See page 40 See page 29 See page 31 See page 37 See page 40 Press EXIT Press SETPTS Press LARGER Press EXIT Press Exit Press EXIT Press EXIT Press RESET SCREEN Press SYSTEM SETUP Press SETUP ...

Страница 24: ... of screen b Press OK NOTE Escape keys While scrolling through options or data using the keys you can escape without accepting new data by pressing any cursor navigation key The original data is kept and displayed Use navigation keys to locate cursor on an area of interest ex data entry gauge control or screen navigation soft key Only fields that are user variable are accessible by the cursor Hold...

Страница 25: ...ollows the board installation sequence from left to right when viewed from the front Use this screen to View a list of installed sensors View real time pressure readings and status by sensor Turn an ion gauge on off or calibrate a Convection gauge View the setpoint status Figure 3 2 Main Screen Auto On Indicator Pressure Readings Sensor ID s Soft keys ...

Страница 26: ...set up to trigger both ion gauges HFIG1 and HFIG2 Multiple Auto ON setups are possible with a different symbol shape for each Convection gauge See Sensor Setup Screen on page 31 for Auto ON details Pressure Reading Displays the gauge pressure reading The pressure units as selected in the System Setup screen appear at the top of the column Convection gauge readings always appear as they are always ...

Страница 27: ...ection Gauges CAL Inverted Magnetron Gauges OFF ON Active Gauges with Analog Input Card CAL Degas HFIG only To activate the DEGAS function select DEGAS1 ON or DEGAS2 ON depending on which filament is currently on Emission has to be on before Degas starts and the pressure reading must be below 1E 5T or equivalent in other units When Degas times out approximately 25 minutes the field reverts to FIL1...

Страница 28: ...auge calibration at atmosphere depends on orientation Be sure to install the gauge sensor in final orientation before calibrating To calibrate 1 Cursor down to the CAL control for the required gauge 2 Present either vacuum or atmospheric pressure to the gauge Allow the gauge to stabilize for 15 minutes after first power up 3 Press OK Vacuum calibration defaults to 1E 4T and atmosphere calibration ...

Страница 29: ...SETPTS on the Main screen Figure 3 3 Set Point Screen Set Point This number corresponds to the sequence of eight rear panel Set Point outputs This is also the number that appears on the Main screen if the setpoint is activated These are fixed numbers and not user changeable SETPT Select an available gauge in this list to assign to a Setpoint Only two set points are allowed per sensor If two setpoi...

Страница 30: ...ng of 1 2 results in a delay of approximately 1 2 seconds OFF Select a Setpoint OFF pressure value If the sensor pressure rises above this value the rear panel output de activates voltage high and the Setpoint clears from the Main screen The OFF reading must be a higher pressure than the ON reading or an error ERR warning appears in the rightmost column Once valid settings are entered ERR changes ...

Страница 31: ... D R A F T 4 1 5 1 4 31 Sensor Setup Screen To open this screen select SETUP on the Main screen Figure 3 4 Sensor Setup Screen HFIG and IMG Sensors Figure 3 5 Sensor Setup Screen CNV Convection Sensors and Active Gauges Sensor ...

Страница 32: ...rds Active Gauges where x indicates the number of the transducer attached The num ber is system assigned based on the sequence of board installation left to right when viewed from the front Convection boards have two sensors per board When more than 4 convection boards are installed the 10 11 and 12 channels are designated CNVA CNVB and CNVC respectively User Label Use this field to enter your lab...

Страница 33: ...or Pascal 1 When using the MBA100 select sensor type MBA200 However since the MBA100 has only one filament if you try to turn on filament 2 the error message NOFIL appears 2 If you already have an XGS 600 with MBA cables and you want to retrofit the new MBA2 Gauge you need an adapter cable Agilent PN X3202 60011 Then select MBA200 and change the Sens value to 20 Display does not change Table 3 1 D...

Страница 34: ...updated every 10 msec SLOW and the update is every 250 msec The default setting is FAST for the IMGs SLOW for hot filament and rough gauges SENSITIVITY This field is active for HFIG and IMG gauges only Use this field to raise or lower the sensitivity EMIS CURRENT mA This field is active for HFIG gauges only Use this field to configure the EMIS Current See Table 3 1 on page 33 for sensor default va...

Страница 35: ...ld have been done at a specific emission current You should enter that value into the emission current setting of the XGS 600 The XGS 600 employs a feature that automatically changes the emission current based on the pressure that is measured If the emission current is set to values greater than or equal to 1 1 ma the controller applies the full value when the measured pressure is below 1 0E 5 Tor...

Страница 36: ...ssure instead In this application the foreline may never get down as low as 5 mTorr especially if a large volume of gas is being pumped The XGS 600 allows you to program a threshold pressure as high as 1 Torr When Auto ON is being used the gauge overprotection feature is still active to protect the high vacuum gauge When the Analog Board is installed any of the active type gauges or CDGs can be us...

Страница 37: ... to the analog board System Setup Screen Use this screen to set values for overall system operation To open this screen select SYSTEM SETUP on the Sensor Setup screen Figure 3 7 System Setup Screen UNITS Select Torr default Pascal or mbar Once the units are changed the values throughout the system are updated to the new units SETUP LOCKOUT Toggle this to ON to make all fields on the SYSTEM SETUP a...

Страница 38: ...older Multigauge controllers running Px x EPROMs SERIAL BAUD RATE Selects between baud rate options 9600 default and 19200 RS485 ADDRESS Set the RS485 address default 00 as used in the first two charac ters of all serial protocol commands see ASCII Serial Commands on page 67 REMOTE INPUTS ACTIVE WHEN Use this to select either active LO default or active HI logic for the HFIG and IMG board on off a...

Страница 39: ...dix A XGS 600 Gauge Specifications for the pin specifications The BCD selection is a so called packed BCD protocol that was used on older Multigauge controllers using software revisions Px x ie P3 3 for example NOTE Sentorr never used the BCD protocol This protocol can only use the RS232 transceiver and is intended for applications that require the XGS 600 to operate in older sys tems where it is ...

Страница 40: ...reset of user defined variables reverting the system to as shipped factory set state EXIT Select to return to the Main Screen page 25 Large Font Screen To open this screen select LARGER on the Main screen Figure 3 9 Large Font Screen The leftmost column shows the User Label as configured on the Sensor Setup screen You can select which transducers appear on this screen by moving the cursor to the U...

Страница 41: ...0 Slot Numbers Slots are numbered from left to right as viewed from the front of the XGS 600 Option slots 1 though 4 are Long High Profile Slots and can accommodate any board HFIG boards are Long High Profile boards and can only be installed in slots 1 through 4 Option slots 5 and 6 are Short Low Profile slots and can accommodate only analog convection or IMG boards with the following restrictions...

Страница 42: ...work Disconnect the XGS 600 mains connection by unplugging the IEC power cord from the back of the unit before removing the unit s cover CAUTION Wear an ESD bracelet and observe all appropriate precautions to avoid damage to PCBs CAUTION When these boards are assembled certain components are bent over intentionally Do not straighten them 1 Turn off and unplug the line cord AC mains 2 Remove the co...

Страница 43: ... plate by installing the two hooks into the case bottom and snapping in the foot Contact Agilent if additional fillers are needed 5 Install the replacement board a Place the end of the board into the end guide Figure 4 3 Figure 4 3 End Guide and HFIG Connector b Guide the board down as straight as possible onto the connector on the main board Figure 4 4 shows the connector on the base of all three...

Страница 44: ...hing any adjacent boards 6 Replace the covers a Push the cover straight in under the lip at the XGS front bezel b Replace the two Philips head screws c The cover must be flat and fully seated It may be necessary to adjust the boards and filler plates slightly for the cover to fully engage The cover should drop on front of the filler plate 7 Plug the unit back in and turn on the power switch NOTE A...

Страница 45: ...urn off and unplug the line cord AC mains 2 Remove the cover by unscrewing the two Philips head screws 3 Locate the mains fuse under the IEC input module and replace Figure 4 5 Figure 4 5 Fuse Replacement 4 Replace the cover by a Pushing the cover straight in under the lip at the XGS front bezel b Replacing the two Philips head screws c Ensuring the cover is flat and fully seated It may be necessa...

Страница 46: ...around the unit NOFIL1 HFIG bds only Filament is open or cable disconnected Filament failure Ion gauge cable not connected 1 Use second filament 2 Replace BA gauge 3 Check that cable is installed NOFIL2 HFIG bds only Second filament is open or cable disconnected Filament failure Ion gauge cable not connected 1 Replace BA gauge 2 Check internal sensor board connections 3 Check that cable is plugged...

Страница 47: ...e Meaning Cause Action Table 4 2 Troubleshooting Problem Cause Action Hot filament gauge hunts or cycles around 1E 5Torr 1E 3Pa Auto emission adjustment occurs at this pressure Increased filament power causes a rise in pressure Condition will clear as system pressure decreases If taking pressure measurements in this range reduce emission current setting for the gauge to 1 0 mA or less to turn off ...

Страница 48: ...s at a time 4 Finish a degas before attempting to start a third The front panel display indicates the setpoint triggers releases at a slightly different pressure than what is programmed Time delay 0 0 0 1 XGS 600 uses a less accurate pressure measurement for setpoint delays of 0 1 secs to obtain the fastest response Changes to baud rate comm mode units keypad lockout or ATM value do not take effec...

Страница 49: ...ing range or use Auto On feature to control IMG Display goes blank A major EMI has caused a display or software error Cycle AC mains power to the unit OFF and ON again to recover or wait for the automatic screen refresh every 20 minutes Convection or TC readings fluctuate when first at HI VAC but then quiet down This is normal behavior of the Convectorr and TC gauges when doing a pumpdown None Con...

Страница 50: ...XGS 600 Gauge Controller This page intentionally left blank ...

Страница 51: ...embrane with positive tactile feedback Serial Communication ASCII protocol RS232 and RS485 no parity BCD protocol RS232 RS485 address range 00 FF Baud Rate 9600 or 19600 Open Collector Set Point Outputs Type 8 open collector type ground referenced outputs Voltage Rating 32 VDC max Current Rating 50 mA max Output Voltage Vout To Gnd Von 5 mA 0 6 Vmax Von 25 mA 0 75 Vmax Von 50 mA 0 90 V Programming...

Страница 52: ...h set point output Response Time Make 30 msec max Break 40 msecs max Chassis Dimensions rack 2U high 11 deep Material Grey Polycarbonate Ventilation Internal fan with plenum and over temperature sensing Fuse Rating 250V 5A FAST BLO 5x20mm Mains Power and Cordage Voltage 100 120 200 240 VAC 10 50 60 HZ 2A Available worldwide IEC cords Environmental Installation Storage Temperature 15 to 70 C Operat...

Страница 53: ...r and the output voltage will be near ground See Table A 1 for a specification of this voltage as a function of current Regulatory Approval CE Certified Safety EN61010 Emissions EN6100 3 2 2006 EN6100 3 2 2005 EN61326 1997 A1 1998 A2 2001 A3 2003 EN55011 FCC Part 15 subpart J Certified to CSA1010 for US and Canada RoHS Compliant WEEE labeled Table A 1 General XGS 600 Gauge Specifications Continued...

Страница 54: ...terfacing to a PLC requires that the PLC logic input sources current Figure A 2 Figure A 2 PLC Input Module Current Configuration 5 4 3 2 1 XGS 600 Setpoint 9 Pin Dsub Connector External Power Supply 32 VDC PLC Input Module Input Terminal GND Terminal ...

Страница 55: ...played Measurement Range 5 0E 12 Torr to 1 mTorr UHV24 UHV24p 572 5 0E 11 Torr to 10 mTorr 563 571 MBA100 MBA200 MBA2 This represents the ability of the controller to display pressure values and not the capability of the gauge heads to accurately measure pressure Emission Current 0 1 to 10 0 mA Sensitivity Input Range 00 1 to 99 9 Torr Gas Correction Factor Range 0 01 to 9 99 Degas E Beam type 600...

Страница 56: ...tive LO or Active HI Driving the input to the active state turns on that function HI 5 V max 2 4 V min LO 0 8 V max 0 V min Filament Select input Pin 1 open or driven HI selects Fil1 Pin 1 grounded selects Fil2 Status Output goes HI during error condition Analog Output Allowable Cable Length up to 50 using Agilent standard cable up to 300 using under 10 Agilent standard cable Agilent extension cab...

Страница 57: ...ayed Measurement Range 1 0E 4 Torr to 1000 Torr Gas Types Air Argon or Helium see Helium Measurement Capability on page 36 Atmosphere Value Range 500 to 1000 Torr Analog Output Range 0 10 VDC Slope 1 V per decade log Characteristic output voltage Log Pressure 4 Output when gauge OFF or Error 10 V Load Impedance 10 kOhms Response Time SLOW 250 msec FAST 10 msec Error Detection Open cable sensor Gau...

Страница 58: ...lity of the gauge heads to accurately measure pressure Sensitivity Input Range 00 1 to 99 9 Gas Correction Factor Range 0 1 to 9 9 Analog Output Range 0 10 VDC Slope 1 V per decade log Characteristic output voltage Log Pressure 11 Output when gauge OFF or Error 10 V Load Impedance 10 kOhms Response Time SLOW 250 msec FAST 10 msec Error Detection Over Temperature Gauge Connector SHV Remote I O Conn...

Страница 59: ...e than two 2 FRG720 730 can be installed per base unit PCG750 Combination CDG Pirani PVG500 550 Pirani CDG500 CT 100 Must set SETPT2 to VAC Temperature Compensated CGD MKS Display Measurement Range FRG Type CT 100 PCG750 PVG500 CDG 1 x 10 4 Torr to 1000 Torr Analog Output Range 0 10 VDC Slope 0 5 V per decade log Characteristic output voltage output voltage 0 5Log Pres sure 5 5 35 mV max Output fo...

Страница 60: ...Assignments Function Pin J26 EMIS ON 6 ANALOG OUT 5 STATUS OUT 4 GND 2 Shield 1 3 Table A 7 HFIG Board I O Pin Assignments Function Pin J26 EMIS ON 6 ANALOG OUT 5 STATUS OUT 4 GND 2 Shield FIL 2 SELECT INPUT 1 DEGAS ON INPUT 3 Table A 8 Convection and Analog Board I O Pin Assignments Function Pin J1 CH1 ANALOG OUT 5 CH2 ANALOG OUT 3 EXT CH1 CAL IN 1 EXT CH2 CAL IN 6 STATUS OUT 4 GND 2 Shield ...

Страница 61: ...T 5 SET POINT 5 OUTPUT 6 SET POINT 6 OUTPUT 7 SET POINT 7 OUTPUT 8 SET POINT 8 OUTPUT 9 Table A 10 Relay Connector Set Point vs Terminal Pin Assignments Pin Setpoint Number C NC NO 1 1 2 14 2 3 15 16 3 4 17 5 4 6 18 19 5 7 9 20 6 8 21 22 7 10 11 23 8 13 24 25 Table A 11 Serial Connector Pin Assignments Function Pin RS485 XFD DIFF INPUT OUTPUT 1 TXD OUTPUT RS232 2 RXD INPUT RS232 3 NOT USED 4 ...

Страница 62: ...PUT RS232 8 RS485 XFD DIFF INPUT OUTPUT 9 Table A 12 Analog Input Board Connector Pin Assignments Function Pin 15 V out MKS CDG 5 15 V out MKS CDG 4 Spare 3 Sig Ret 2 Pwr Gnd 1 Signal In 0 10 V 9 Gauge ID 8 Cable Detect 7 24 V 6 Table A 11 Serial Connector Pin Assignments Function Pin ...

Страница 63: ...tion board has the same gauge cable connectors as the current MultiGauge Convection card and the SenTorr xxTC and xx2C models MultiGauge uses the Dsub connector for the analog output as well as for the sensor connections and this is supported in XGS 600 The RS232 serial communications connector and protocol is supported in XGS 600 as well However the RS485 connection is now housed in the same Dsub...

Страница 64: ...GS 600 MultiGauge SenTorr BA or UHV SenTorr CC Hot Filament Gauges All All All n a Cold Cathode Gauges IMG100 IMG300 UHV IMG IMG100 UHV IMG 525CCG n a 525CCG Convection Gauges 2 ch Convection Bd using 2 Dsub9 4 ch TC Bd using DsuB37 2 ch ConvecTorr Bd using 2 Dsub9 2 ch ConvecTorr using 2 Dsub9 2 ch TC 2 ch ConvecTorr using 2 Dsub9 2 ch TC CDG s Analog Input Board 2 Dual Ch CDG Bds n a n a Rem I O...

Страница 65: ...ing relays using term block type conn access to C NO NC contacts Optional 4 setpoints using relays using term block type conn access to C NO NC contacts RS232 Std Dsub9 IBM pinout supports MG protocol Opt Dsub9 IBM pinout Opt Dsub9 IBM pinout Opt Dsub9 IBM pinout RS485 Std in Dsub9 supports MG protocol Opt with choice of daisy chain using MiniDIN or Dsub9 Opt with choice of daisy chain using MiniD...

Страница 66: ...600 MultiGauge SenTorr BA or UHV SenTorr CC UHV Bakeable L6440 Yes Yes Yes N A UHV non bakeable L6441 Yes Yes Yes N A Glass BA L6455 Yes Yes Yes N A Ion Gauge Extension L6456 Yes Yes Yes N A 525 CCG L5671 No Yes n a Yes IMG R0341 R0311 Yes Yes n a No MBA R1172 Yes Yes Yes n a Quad Dual TC L6475 No Yes No No Single TC L9131 Yes Yes Yes Yes Single Conv L9122 Yes Yes Yes Yes CDG L9153 No Yes No No ...

Страница 67: ... hex digits 01 FF c Sensor Code U signifies User Label is to follow n User Labels As found on Sensor Setup screen Examples 00B0UION4UGATE3 2E 03 sets AUTO ON for ion gauge ION4 using CNV gauge GATE 0030UGATE1 turns on emissions of sensor User Label Gate1 0055UTOP26 00 sets sensitivity for ion gauge with User Label Top Note If User Label is not defined by user default User Label is Sensor ID Note A...

Страница 68: ...vection board CNV Analog Board 4C FE Empty slot Lists two character codes identifying the 6 board slots in the system following board installation sequence from left to right front view Read pressure aa02cn x xxxE xx Read software revision aa05 hhhh hhhh where hhhh represents revision hh hh Revisions shown for main board then each sensor board following board installation sequence from left to rig...

Страница 69: ... fewer characters AHZ 0 9 or space except for IMGxx HFIGx CNVxxx and AUXxxx where x is any character which are reserved Read User Label of Sensor aa15cn LABEL where LABEL is user defined 1 5 characters If no User Label is assigned defaults to system assigned Sensor ID Setup Lockout OFF aa20 Setup Lockout ON aa21 Read Setup Lockout status aa22 xx where xx 00 is OFF xx 01 is ON Set Auto On aaB0cn1cn...

Страница 70: ... xx where xx 11 for IMG100 default 13 for IMG300 51 for MBA100 MBA2 52 for MBA200 63 for 563 64 for 564 71 for 571 72 for 572 80 for UHV24 default 81 for UHV24p Set Emission OFF aa30cn Set Emission ON Fil 1 aa31cn Also used for single filament gauges Read Emission status aa32cn xx where xx 00 is OFF xx 01 is ON Set Emission ON Fil2 aa33cn Read Filament Lit aa34cn xx where xx 01 is Filament 1 xx 02...

Страница 71: ...ificant two digits always zero Set Emission current aa53cnx xxx Least significant two digits will be ignored Read Sensitivity aa54cn xx xx Always reads in Torr Least significant digit is always zero Set Sensitivity aa55cnxx xx This sensitivity value must always be in Torr due to xx xx format restriction Note however the value displayed on front panel is in Torr mbar or Pascal Least significant dig...

Страница 72: ...ts 1 8 and value 0 Not assigned 1 Assigned Set Setpoint OFF ON Auto aa5Ehx where h is setpoint number 1 8 and x is state 0 OFF manual override 1 ON manual override 3 Auto based on pressure Example 005E83 sets setpoint 8 to Auto Read Setpoint OFF ON Auto aa5Fh where h is setpoint number 1 8 x where x is state 0 OFF manual override 1 ON manual override 3 Auto based on pressure Set Setpoint On pressu...

Страница 73: ...ssigned to a sensor Read Setpoint On pressure level aa8h where h is setpoint number 1 8 x xxxE xx Read Setpoint ON Delay time aaEh where h is setpoint number 1 8 x x where x x is delay in seconds Read Setpoint Off pressure level aa9h where h is setpoint number 1 8 x xxxE xx Read Setpoint Off Delay time aaFh where h is setpoint number 1 8 xx where x x is delay in seconds AUX and CNV Commands Calibr...

Страница 74: ...ot supported by the XGS 600 result in FF error message Backward compatible sensor code can still be used in XGS 600 as with Multi Gauge SenTorr protocol Read CNV gas type CNV only aa4Ecn x where x 0 for Nitrogen Air x 1 for Argon Set CNV gas type CNV only aa4Fcnx where x 0 for Nitrogen Air x 1 for Argon Table B 1 Serial Command Set Continued Description Command Response from XGS 600 Notes Command ...

Страница 75: ...down list The Com Properties Port Setting dialog box appears 7 Configure the following settings Bits per second baud rate 9600 or 19200 whichever is set on XGS 600 Data bits 8 Parity None Stop bits 1 Flow Control None 8 Click OK 9 Select Properties from the File menu The Properties window appears 10 Configure the following settings on the Connect To tab Connect using Verify the COM port is correct...

Страница 76: ...ntroller 76 D R A F T 4 1 5 1 4 Character delay 0 milliseconds ASCII Receiving Wrap lines that exceed terminal width The cursor begins blinking 14 Type some simple commands and see if there is a response 0001 0005 000F ...

Страница 77: ... command is not completely received within approximately 5 seconds the XGS600 ignores the command in process and expect a fully new command In all of the following the suffix H indicates hexadecimal notation C 1 1 Card Information Byte This byte tells the controller which gauge channel to act on for reading pressure or changing status The card information byte consists of two nibbles The first nib...

Страница 78: ...a Read Contents command reports 40h for slot 5 BCD addr 1 b The card installed in slot 5 is addressed as BCD addrs 11 12 The card in slot 6 is addressed as BCD addrs 13 and 14 Example 2 Convection cards are installed in slots 5 and 1 a The Read Contents command reports the cards as 48H at BCD addresses 1 and 2 b The card installed in slot 5 is addressed as 11 12 The card in slot 1 is addressed as ...

Страница 79: ...ead all installed gauge channels with a single query command The number of returned bytes is three times the number of installed gauges The gauges are read in the order of the BCD base address No separators are sent between bytes C 1 5 Read MultiGauge Contents Command To maintain compatibility with Multigauge which only had 5 slots this command outputs the ID of cards that are installed in address...

Страница 80: ...Ah IMG card 40h emulated 4ch TC card 48h Convection card FFh empty slot Byte 1 card 1 ID Byte 2 card 1 ID Byte 3 card 1 ID Byte 4 card 1 ID Byte 5 card 1 ID Read Pressure 2 bytes Response 3 bytes Byte 1 02h Byte 2 card info byte while appears the response is 3 bytes of 00h Byte 1 mantissa digits 1 2 Byte 2 mantissa digits 3 4 Byte 3 exponent Read SW Revision 1 byte Response 2 bytes Byte 1 05h wher...

Страница 81: ...card info byte Read Degas Status 2 bytes Response 1 byte Byte 1 42h Byte 2 card info byte where 00h OFF 01h ON Byte 1 xxh Read Emission Curr 2 bytes Response 2 bytes Byte 1 52h Byte 2 card info byte Byte 1 mantissa digits 1 2 Byte 2 mantissa digits 3 4 Set Emission Curr 4 bytes Byte 1 53h Byte 2 card info byte Byte 3 mantissa digits 1 2 Byte 4 mantissa digits 3 4 Read Sensitivity 2 bytes Response ...

Страница 82: ...ytes Byte 1 A1h Byte 2 card info byte Set TC Conv to VAC 2 bytes Byte 1 A2h Byte 2 card info byte Read Pressure All 1 byte Response 3 bytes times the number of gauges Byte 1 0Fh Byte 1 mantissa digits 1 2 Byte 2 mantissa digits 3 4 Byte 3 exponent Runs from the lowest address gauge to the highest addr gauge Table C 2 BCD Command List Continued Command Byte and Syntax Byte Response ...

Страница 83: ...rmally calibrated for nitrogen to read pressures of the other gasses 1 Use Sensor Setup to access the GAS CORRECTION function 2 Enter the correction constant from the table The XGS600 multiplies the initial pressure reading by the gas correction constant and displays the correct adjusted value The default for Gas Correction is 1 The correction for different gas species is purely arithmetic The sen...

Страница 84: ...ype Gas Correction Factor Air Nitrogen 1 00 Acetone 0 28 Argon 0 77 Carbon Dioxide 0 71 Carbon Monoxide 0 95 Chlorine 1 47 Deuterium 2 86 Ethanol 0 28 Ethylene 0 43 Helium 5 56 Hydrogen 2 17 Krypton 0 53 Methane 0 71 Methanol 0 56 Neon 0 30 Nitrous Oxide 0 67 Oxygen 1 00 Water 0 91 Xenon 0 34 ...

Страница 85: ...product e g inlet screens vent valves x Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue x If ordering an Advance Exchange product p please use the packaging from the Advance Exchange to return the defective product x Seal the product in a plastic bag and package product carefully to avoid damage in transit You are responsible for loss or ...

Страница 86: ... been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled out Check boxes for all materials to which product s pumped or was exposed Toxic Corrosive Reactive Flammable Explosive Biological Radioactive List all toxic hazardous materials Include product name chemic...

Страница 87: ...r Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Products and Services Terms of Sale x Customer is responsible for the freight charges for the returning product Return shipments must comply with all applicable Shipping Regulations IATA DOT etc and carrier re...

Страница 88: ...XGS 600 Gauge Controller This page intentionally left blank ...

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Страница 90: ...y Agilent Technologies Italia S p A via F lli Varian 54 10040 Leini Torino ITALY Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 vpt sales agilent com vpt customerservice agilent com Japan Agilent Technologies Japan Ltd 8th Floor Sumitomo Shibaura Building 4 16 36 Shibaura Minato ku Tokyo 108 JAPAN Tel 81 3 5232 1253 Toll Free 0120 655 040 Fax 81 3 5232 1710 vpj customerservice...

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