Agilent Technologies VHS-4 Скачать руководство пользователя страница 32

Sales and Service Offices

Argentina

Varian Argentina Ltd.

Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172

Australia

Varian Australia Pty Ltd.

679-701 Springvale Road
Mulgrave, Victoria ZZ 3170
Australia
Tel: (61) 395607133
Fax: (61) 395607950

Benelux

Varian Vacuum Technologies

Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961

Brazil

Varian Industria e Comercio Ltda.

Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350

Canada

Central coordination through:

Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

China

Varian Technologies - Beijing

Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6641 1530
Fax: (86) 10 6641 1534

France and Wallonie

Varian s.a.

7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08

Germany and Austria

Varian Deutschland GmbH

Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302

India

Varian India PVT LTD

101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445

Italy

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Japan

Varian Vacuum Technologies

Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263

Korea

Varian Technologies Korea, Ltd.

Shinsa 2nd Bldg. 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451

Mexico

Varian S.A.

Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472

Taiwan

Varian Technologies Asia Ltd. 

18F-13 No.79, Hsin Tai Wu Road
Sec. 1, Hsi Chih
Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678

UK and Ireland 

Varian Ltd.

28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769

United States

Varian Vacuum Technologies

121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426

Other Countries

Varian Vacuum Technologies

Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9111
Fax: (39) 011 997 9350

Internet Users:

Customer Service & Technical Support:

[email protected]

Worldwide Web Site:

www.varianinc.com/vacuum

Order On-line:

www.evarian.com

Representatives in most countries

02/02

Содержание VHS-4

Страница 1: ...m technologies VHS 4 Diffusion Pump Part No 699901021 Rev No D Date October 2000 NOTICE This document contains references to Varian Please note that Varian Inc is now part of Agilent Technologies For more information go to www agilent com chem ...

Страница 2: ...D R A F T 8 7 0 2 Copyright 2000 Varian Vacuum Technologies VHS 4 Diffusion Pump ...

Страница 3: ...ng standard s or other normative documents auf das sich diese Erklärung bezieht mit der den flogenden Norm en oder Richtlinie n übereinstimmt auquel se réfère cette déclaration est conforme à la auz norme s ou au x document s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn...

Страница 4: ...serious risk It is the responsibility of the user to maintain safe operating conditions at all times Varian assumes no liability for personal injury or damage resulting from operation or service of the equipment Varian has no control over the use of this equipment and is not responsible for personal injury or damage resulting from its use The safe use and disposal of hazardous or potentially hazar...

Страница 5: ... improper use by untrained persons non authorized interference with the equipment or any action contrary to that proved for by specific national standards This manual uses the following standard safety protocol WARNING The warnings are for attracting the attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The cautions...

Страница 6: ...VHS 4 Diffusion Pump This page intentionally left blank D R A F T 8 7 0 2 ...

Страница 7: ... 4 Unpacking 4 Pump Oil Installation 4 Vacuum System Connections 4 Cooling Water Connections 5 Electrical Connections 5 Thermal Switch 6 Section II Operation 7 Startup Procedure 7 Shutdown Procedure 8 Section III Maintenance and Service 9 General 9 Periodic Inspection 9 Cleaning 9 Cold Cap Removal Installation 10 Jet Assembly Removal Installation 11 Heater Replacement 12 Adding Pump Fluid 12 Secti...

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Страница 9: ...vide an interlock to ensure that the power supply to the pump heater cannot be activated if the foreline pump is not running and or the pressure in foreline is above 0 5 Torr 0 38 mbar Overtemperature Fit temperature sensors and pump fluid level sensors with feedback to an interlock on the heater power supply Insufficient water flow through the main cooling coils Use water flow sensor and feedback...

Страница 10: ...s with clean dry oil free compressed air Oxygen and other strong oxidizers are even more dangerous than air Certain conditions of temperature and pressure can cause a combustible mixture to explode The larger the diffusion pump the greater the risk of explosion and the greater the risk of dam age and injury Never operate large diffusion pumps utilizing hydrocarbon oils without a complete safety an...

Страница 11: ...nous and Corrosive Compounds When pump ing poisonous reactive and or corrosive gas vapors or chemicals proper operation and regeneration do not always ensure that all hazardous materials have been totally removed If hazardous gas vapors chemicals or combustible mixtures are pumped suf ficient quantities may exist during operation or remain after regeneration to cause severe injury or death Pump Fl...

Страница 12: ...oils from previous use turns to steam when the pump is reheated This steam must be allowed to escape with out contacting personnel Whenever possible design the water system with interlock valves so that power cannot be applied to the pump unless water is flow ing in the main cooling coils not Quick Cool coils High Voltages Diffusion pump heaters operate at voltages high enough to kill Design syste...

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Страница 31: ......

Страница 32: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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