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取扱説明書

Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

163

高真空フランジの接続

もしローターが突然停止した場合、結果として生じるトルクは高真空フランジを
留めているハードウェアにより吸収されなければいけません。

ボルトまたはハードウェアは下記の仕様に適合していなければいけません

.

警告

必ず「使用の説明」セクションに指定されているトルクに耐える方法でポ
ンプを接続しなくてはいけません。特に、クランプのデザイン、材料、ボ
ルト、ボルトの固定トルクに注意してください。

高い耐荷重性クラスのクランプ（またはボルト）を使用してください

≥ 8.8

。

警告

もしポンプが、アジレントが推奨するものとは異なるフランジで真空チェ
ンバー上に締め付けられた場合、ローターが突然停止した際に

TwisTorr 305-ICQ & 305-IC SF

がねじ曲がるまたは引き裂かれる可能性があ

ります。異なるフランジタイプの組み合わせは禁止されています。アジレ
ントは不適切な締め付けにより生じた全ての損害・損傷にいかなる責任も
負いません。

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Содержание TwisTorr 305-IC SF

Страница 1: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual...

Страница 2: ...ny information contained herein Should Agilent and the user have a separate written agreement with warranty terms covering the material in this document that conflict with these terms the warranty ter...

Страница 3: ...20 Linee guida di sicurezza per pompe turbomolecolari 21 Trasporto Immagazzinamento 22 Descrizione del prodotto 23 Installazione 24 Preparazione per l installazione 24 Apertura 26 Fissaggio della Twis...

Страница 4: ...ologie 42 Definition von Vorsicht Warnung und Hinweis 42 Warnsymbole 43 Sicherheit 45 Sachgem e Verwendung 45 Unsachgem e Anwendung 46 Schutzausr stung 47 Sicherheitsrichtlinie f r Turbomolekularpumpe...

Страница 5: ...Service 66 3 Mode d emploi 67 propos de ce manuel 68 Validit 68 D finitions et terminologie 69 Signification des messages d attention d avertissement et des notes 69 Symboles d avertissement 70 S curi...

Страница 6: ...ICQ 305 IC SF 86 Arr t de la TwisTorr 305 ICQ 305 IC SF 89 Arr t d urgence 89 Entretien 90 Dur e de vie du rotor 90 D marrage progressif 91 Nettoyage 91 limination 92 Service 93 4 Instrucciones de uso...

Страница 7: ...e la brida de alto vaciado 109 Instalaci n de la brida ISO K 110 Instalaci n de la brida ConFlat 111 Conexi n de la bomba pre vaciado 112 Puesta en marcha y funcionamiento de la TwisTorr 305 ICQ 305 I...

Страница 8: ...wisTorr 305 ICQ 305 IC SF User Manual 126 126 127 128 129 130 131 132 132 134 TwisTorr 305 ICQ 305 IC SF 135 136 ISO K 137 ConFlat 138 139 TwisTorr 305 ICQ 305 IC SF 140 TwisTorr 305 ICQ 305 IC SF 143...

Страница 9: ...lent TwisTorr 305 ICQ 305 IC SF User Manual 9 146 147 6 148 149 149 150 150 151 153 153 154 155 156 157 158 159 159 161 TwisTorr 305 ICQ 305 IC SF 162 163 ISO K 164 ConFlat 165 166 TwisTorr 305 ICQ 30...

Страница 10: ...alidity 176 Definitions and terminology 177 Definition of Caution Warning and Note 177 Warning Symbols 178 Safety 180 Proper use 180 Improper use 181 Protective equipment 182 Safety guideline for Turb...

Страница 11: ...8 Rotor life 198 Soft Start 199 Cleaning 199 Disposal 200 Service 201 8 Technical Information 202 Description of the TwisTorr 305 ICQ 305 IC SF 203 Technical specification 210 TwisTorr 305 ICQ 305 IC...

Страница 12: ...T and Power Supply 244 Signal Description 246 How to Connect the Open Collector Inputs of the Controller 250 How to Connect the Controller Outputs 251 RS485 Communication Description 252 Windows Proto...

Страница 13: ...ari 21 Trasporto Immagazzinamento 22 Descrizione del prodotto 23 Installazione 24 Preparazione per l installazione 24 Apertura 26 Fissaggio della TwisTorr 305 ICQ 305 IC SF 27 Collegamento della flang...

Страница 14: ...l livello pi elevato di manutenzione personale appositamente addestrato per le operazioni di manutenzione non devono essere eseguite dall utente Per una corretta installazione e avvio arresto consulta...

Страница 15: ...tanti AVVERTENZA I messaggi di avvertenza attirano l attenzione dell operatore su una procedura o una pratica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali...

Страница 16: ...r 305 ICQ 305 IC SF Viene mostrato anche il pericolo che descrivono Un simbolo triangolare indica un avvertenza I significati dei simboli che possono apparire accanto alle avvertenze nella documentazi...

Страница 17: ...rimento tale etichetta di avvertenza I seguenti simboli appaiono sullo strumento per vostra informazione I Accensione principale Se rosso significa malfunzionamento Se giallo significa avvertenza Port...

Страница 18: ...ioni in sicurezza Il prodotto descritto in questo manuale destinato esclusivamente all ambito specificato nelle istruzioni Il manuale fornisce inoltre indicazioni relative ai requisiti essenziali per...

Страница 19: ...i pompaggio di vapori di condensazione pompaggio di liquidi pompaggio di polvere funzionamento con flusso di gas elevato improprio funzionamento con pressioni inadeguate per l alto vuoto funzionamento...

Страница 20: ...a di sostanze pericolose durante la manutenzione o l installazione A seconda della peculiarit del processo le pompe per vuoto i componenti o i fluidi di funzionamento possono essere contaminati da sos...

Страница 21: ...di sicurezza per pompe turbomolecolari Le pompe turbomolecolari descritte nel seguente manuale contengono una grande quantit di energia cinetica dovuta all elevata velocit di rotazione in combinazion...

Страница 22: ...C intervallo di umidit relativa da 0 a 90 senza condensa la durata di conservazione di una pompa turbomolecolare di 12 mesi dalla data di spedizione le pompe turbomolecolari devono essere sempre avvi...

Страница 23: ...re per applicazioni con vuoto elevato e altissimo che in grado di pompare qualsiasi tipo di gas o composto di gas non corrosivo e ossidante L azione di pompaggio si ottiene attraverso una turbina ad a...

Страница 24: ...la in caso di conservazione per un lungo periodo di tempo o in caso di spedizione Non gettare i materiali di imballaggio in modo non autorizzato Il materiale riciclabile al 100 ed conforme alla Dirett...

Страница 25: ...Istruzioni per l uso Agilent TwisTorr 305 ICQ 305 IC SF User Manual 25 Figura 1 Imballo della TwisTorr 305 ICQ 305 IC SF...

Страница 26: ...r ATTENZIONE Non rimuovere l adesivo e il cappuccio protettivo fino a quando non si pronti per installare la turbopompa sul sistema Figura 2 Installare questo dispositivo solo in ambienti chiusi e non...

Страница 27: ...asi posizione Fissare la TwisTorr 305 ICQ 305 IC SF in una posizione stabile montando la flangia di ingresso della turbopompa sulla controflangia del sistema con una connessione in grado di resistere...

Страница 28: ...STRUZIONI PER L USO In particolare prestare attenzione al design dei morsetti al materiale dei morsetti e ai bulloni e alla coppia di fissaggio dei bulloni Utilizzare solo morsetti o bulloni di classe...

Страница 29: ...ngia ISO K fissare le due flange con i morsetti modello IC63250DCMZ o equivalenti come mostrato nella figura seguente possibile utilizzare facoltativamente uno schermo protettivo Figura 3 Utilizzare i...

Страница 30: ...il serraggio sequenziale fino a quando le facce della flangia si incontrano Stringere le viti con una coppia di 20 Nm Per la flangia ConFlat consigliamo solo l uso di bulloni in acciaio ad alta resist...

Страница 31: ...o un tubo classificati come vuoto Se viene utilizzato un tubo rigido qualsiasi vibrazione generata dalla pompa meccanica deve essere attenuata attraverso l uso del soffietto NOTA La TwisTorr 305 ICQ...

Страница 32: ...nsione valida solo in caso di arresto di emergenza NOTA 1 Per trovare la posizione dei pin di ingresso della tensione di alimentazione su IN OUT e connettore di alimentazione nonch i valori ammessi pe...

Страница 33: ...to On lampeggiante 305 ICQ OFF stato STOP WAITING INTERLOCK FAIL On lampeggiante invers 305 ICQ ON velocit target non ancora raggiunta stato STARTING RAMP AUTO TUNING ON Luce fissa 305 ICQ ON velocit...

Страница 34: ...attuali RAMP NORMAL ecc 2 Nel caso in cui venga rilevato un avviso LED giallo ON luce fissa la pompa pu girare correttamente al ricevimento del comando di avvio L utente pu risolvere il motivo dell a...

Страница 35: ...305 ICQ 305 IC SF configurata in REMOTE MODE e INTERLOCK impostato su IMPULSE MODE agire sul segnale START c se la TwisTorr 305 ICQ 305 IC SF configurata in SERIAL Mode inviare quindi un comando di S...

Страница 36: ...stema guasto Il pezzo di ricambio della TwisTorr 305 ICQ 305 IC SF viene spedito al momento dell ordine Quindi si restituisce la TwisTorr 305 ICQ 305 IC SF non funzionante nella scatola in cui vi era...

Страница 37: ...rodotto sempre in modalit soft start agendo su un comando seriale appropriato come specificato di seguito La modalit Soft Start consente la corretta ridistribuzione del grasso presente nei cuscinetti...

Страница 38: ...sul quale applicato NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali ma deve essere avviato ad un sistema di raccolta differenziata Si invita pertanto l utente finale a cont...

Страница 39: ...iti di un servizio di sostituzione o riparazione avanzato si prega di contattare il distributore locale o spedire direttamente a vpt customercare agilent com vpl customercare agilent com necessario co...

Страница 40: ...itsrichtlinie f r Turbomolekularpumpen 48 Transport und Lagerung 49 Produktbeschreibung 50 Installation 51 Vorbereitung zum Einbau 51 Einrichten 53 Montage von TwisTorr 305 ICQ 305 IC SF 54 Anschluss...

Страница 41: ...ntsprechend geschultes Personal f r die Wartungsarbeiten d rfen nicht durch den Benutzer ausgef hrt werden F r eine korrekte Installation und Start Stopp das Kapitel Installation konsultieren F r eine...

Страница 42: ...Die Warnhinweise lenken die Aufmerksamkeit des Bedieners auf ein Verfahren oder einen spezifischen Vorgang der schwere Verletzungen von Personen zur Folge haben k nnte wenn er nicht korrekt ausgef hr...

Страница 43: ...zeigt werden Die von ihnen beschriebene Gefahr wird ebenfalls angezeigt Ein dreieckiges Symbol weist auf eine Warnung hin Die Bedeutung der Symbole die neben Warnhinweisen in der Dokumentation oder au...

Страница 44: ...n auf das sich dieses Warnschild bezieht Die folgenden Symbole werden zu Ihrer Information auf dem Instrument angezeigt I Netz einschalten Wenn rot bedeutet dies eine Fehlfunktion Wenn gelb bedeutet d...

Страница 45: ...er t sicher funktioniert Das in dieser Anleitung beschriebene Produkt ist ausschlie lich f r den in der Anleitung angegebenen Anwendungsbereich bestimmt Das Handbuch enth lt auch Angaben zu den grundl...

Страница 46: ...und oxidierende Gase Pumpen von explosiven Gasen Pumpen von kondensierenden D mpfen Pumpen von Fl ssigkeiten Pumpen von Pulver Betrieb mit unzul ssig hohem Gasdurchsatz Betrieb mit ungeeignetem Hochv...

Страница 47: ...eitsgefahr durch gef hrliche Stoffe bei Wartung oder Installation Vakuumpumpen Komponenten oder Betriebsfl ssigkeiten k nnen je nach Prozessbesonderheit mit giftigen reaktiven oder radioaktiven Stoffe...

Страница 48: ...inie f r Turbomolekularpumpen Turbomolekularpumpen wie sie in der folgenden Betriebsanleitung beschrieben sind enthalten aufgrund der hohen Drehzahl in Kombination mit der spezifischen Masse ihrer Rot...

Страница 49: ...Luftfeuchtigkeitsbereich von 0 bis 90 nicht kondensierend Die Haltbarkeit einer Turbomolekularpumpe betr gt 12 Monate ab Versanddatum Die Turbomolekularpumpen m ssen immer sanft gestartet werden wenn...

Страница 50: ...nd Ultrahochvakuumanwendungen die alle Arten von nicht korrosiven und oxidierenden Gasen oder Gasverbindungen f rdern kann Die Pumpwirkung wird durch eine Hochgeschwindigkeitsturbine max 60600 U min e...

Страница 51: ...auf um ihn bei l ngerer Lagerung oder beim Versand wieder verwenden zu k nnen Entsorgen Sie das Verpackungsmaterial nicht auf unbefugte Weise Das Material ist zu 100 recycelbar und entspricht der EG R...

Страница 52: ...Betriebsanleitung 52 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Abbildung 6 TwisTorr 305 ICQ 305 IC SF Verpackung...

Страница 53: ...n VORSICHT Entfernen Sie den Klebstoff und die Schutzkappe erst wenn Sie bereit sind die Turbopumpe am System zu installieren Abbildung 7 Stellen Sie das Ger t nur in Innenr umen auf und verwenden Sie...

Страница 54: ...n Befestigen Sie den TwisTorr 305 ICQ 305 IC SF in einer stabilen Position und montieren Sie den Einlassflansch der Turbopumpe am Gegenflansch des Systems wobei die Verbindung ein Drehmoment von 1000...

Страница 55: ...n Drehmoment standh lt Achten Sie insbesondere auf die Ausf hrung der Klemmen das Material der Klemmen und Schrauben und den Anzugmoment der Schrauben Verwenden Sie nur Klemmen oder Schrauben mit hohe...

Страница 56: ...beiden Flansche mit den Klemmen Modell IC63250DCMZ oder einem gleichwertigen Element wie in der folgenden Abbildung dargestellt optional kann ein Schutzgitter verwendet werden Abbildung 8 Verwenden S...

Страница 57: ...rholen Sie das sequenzielle Anziehen bis die Flanschfl chen einander anschlagen Ziehen Sie die Schrauben mit einem Drehmoment von 20 Nm an F r ConFlat Flansche empfehlen wir nur die Verwendung von hoc...

Страница 58: ...r hergestellt werden Wenn ein starres Rohr verwendet wird m ssen Vibrationen die von der mechanischen Pumpe erzeugt werden mit einem Faltenbalg ged mpft werden HINWEIS TwisTorr 305 ICQ 305 IC SF zeich...

Страница 59: ...nt werden HINWEIS 1 Die Position der Versorgungsspannungseingangsstifte an IN OUT und Netzteilanschluss sowie die zul ssigen Eingangsspannungswerte entnehmen Sie dem Abschnitt Technische Daten und unt...

Страница 60: ...nd 305 ICQ OFF Status STOPP WARTEN VERRIEGELUNG FEHLER Ein invers blinkt 305 ICQ ON Zielgeschwindigkeit noch nicht erreicht Status STARTEN RAMP AUTO TUNING Ein Dauerhaftes Licht 305 ICQ ON Zielgeschwi...

Страница 61: ...entspricht 2 Nel caso in cui venga rilevato un avviso LED giallo ON luce fissa la pompa pu girare correttamente al ricevimento del comando di avvio L utente pu risolvere il motivo dell avviso controll...

Страница 62: ...ie TwisTorr 305 ICQ 305 IC SF als REMOTE MODE eingerichtet und die VERRIEGELUNG auf IMPULSE MODE eingestellt dann bet tigen Sie das Signal START c ist die TwisTorr 305 ICQ 305 IC SF im SERIAL Modus ko...

Страница 63: ...en Das Ersatzteil der 305 FSQ SF wird zum Zeitpunkt der Bestellung versandt Schicken Sie daraufhin die nicht funktionierende TwisTorr 305 ICQ 305 IC SF in dem Karton zur ck in dem das Ersatzteil der T...

Страница 64: ...rten indem er auf einen entsprechenden seriellen Befehl reagiert wie unten angegeben Der Softanlauf Modus erm glicht die korrekte Umverteilung des in den Lagern vorhandenen Fetts nach einer langen Zei...

Страница 65: ...tig zeigt an dass das betreffende Produkt NICHT zusammen mit Haushalts oder Industriem ll entsorgt werden darf sondern einem speziellen Sammelsystem zugef hrt werden muss Der Endabnehmer sollte daher...

Страница 66: ...oder Reparaturservice ben tigen wenden Sie sich bitte an den rtlichen H ndler oder direkt and die Email Adresse vpt customercare agilent com vpl customercare agilent com Das Ausf llen des Request for...

Страница 67: ...r les pompes turbomol culaire 75 Transport et entreposage 76 Description du produit 77 Installation 78 Pr paration pour l installation 78 Configuration 80 Montage de la TwisTorr 305 ICQ 305 IC SF 81 R...

Страница 68: ...e maintenance plus lev personnel sp cialement form aux op rations de maintenance ne doivent pas tre effectu es par l utilisateur Pour une installation et une mise en marche arr t correctes consultez l...

Страница 69: ...MENT Les messages d avertissement attirent l attention de l op rateur sur une proc dure ou une pratique particuli re qui si elle n est pas effectu e correctement peut entra ner de graves blessures ATT...

Страница 70: ...ger qu ils d crivent est galement illustr Le symbole triangulaire indique un avertissement Les significations des symboles qui peuvent appara tre c t des avertissements dans la documentation ou sur l...

Страница 71: ...ette d avertissement Les symboles suivants apparaissent sur l appareil pour votre information I Alimentation secteur activ e Si rouge cela signifie un dysfonctionnement Si jaune cela signifie une aler...

Страница 72: ...s curit Le produit d crit dans le pr sent manuel est destin exclusivement au domaine d application sp cifi dans les instructions Le manuel fournit galement des indications concernant les exigences es...

Страница 73: ...ifs pompage des vapeurs de condensation pompage des liquides pompage de la poussi re fonctionnement avec d bit de gaz lev fonctionnement avec des pressions de vide lev es fonctionnement avec la modali...

Страница 74: ...de la pr sence de substances dangereuses pendant la maintenance ou l installation En fonction des caract ristiques du processus les pompes vide les composants ou les fluides de fonctionnement peuvent...

Страница 75: ...tive de s curit pour les pompes turbomol culaire Les pompes turbomol culaires d crites dans le manuel d utilisation suivant contiennent une grande quantit d nergie cin tique en raison de la vitesse de...

Страница 76: ...C C plage d humidit relative 0 90 sans condensation la dur e de conservation d une pompe turbomol culaire est de 12 mois compter de la date d exp dition les pompes turbomol culaires doivent toujours...

Страница 77: ...r les applications vide lev et ultra lev capable de pomper tout type de compos gazeux ou gazeux non corrosif et oxydant L action de pompage est obtenue par une turbine grande vitesse max 60 600 tr m e...

Страница 78: ...e stockage de longue dur e ou d exp dition Ne pas jeter les mat riaux d emballage sans autorisation Le mat riel est recyclable 100 et est conforme la directive 94 62 de la CEE et aux modifications ult...

Страница 79: ...Mode d emploi Agilent TwisTorr 305 ICQ 305 IC SF User Manual 79 Figure 11 Emballage de la TwisTorr 305 ICQ 305 IC SF...

Страница 80: ...er l adh sif et le capuchon de protection avant d tre pr t installer la turbopompe sur le syst me Figure 12 Installer ce dispositif l int rieur seulement et ne pas utiliser la pompe dans un environnem...

Страница 81: ...dans n importe quelle position Fixer la TwisTorr 305 ICQ 305 IC SF dans une position stable en montant la bride d entr e de la turbopompe sur la contre bride du syst me avec un raccord capable de r s...

Страница 82: ...DE D EMPLOI Porter une attention particuli re la conception des colliers au mat riau des colliers et des boulons et au couple de fixation des boulons Utiliser uniquement des colliers ou boulons de cla...

Страница 83: ...brides ISO K fixer les deux brides avec les attaches mod le IC63250DCMZ ou quivalent comme indiqu dans la figure suivante un cran de protection peut tre utilis en option Figure 13 Utiliser le nombre r...

Страница 84: ...que les faces de la bride se rencontrent Serrer les vis un couple de 20 Nm Pour la bride ConFlat nous recommandons l utilisation de boulons en acier haute r sistance uniquement Pour faciliter l assem...

Страница 85: ...conduit de vide Si un tuyau rigide est utilis toute vibration g n r e par la pompe m canique doit tre amortie par l utilisation de soufflets NOTE La TwisTorr 305 ICQ 305 IC SF se caract rise galement...

Страница 86: ...lable qu en cas d arr t d urgence NOTES 1 Pour trouver l emplacement des broches d entr e de tension d alimentation sur le connecteur d entr e sortie et d alimentation ainsi que les valeurs de tension...

Страница 87: ...atut ARR T EN ATTENTE D ENCLENCHEMENT CHEC Allum invers clignotant 305 ICQ Allum vitesse cible pas encore atteinte statut D MARRAGE RAMPE R GLAGE AUTO ALLUM voyant constant 305 ICQ Allum vitesse cible...

Страница 88: ...tc 2 En cas de d tection d une alerte LED jaune voyant allum en continu la pompe peut tourner correctement la r ception de la commande de d marrage L utilisateur peut d panner la cause de l alerte en...

Страница 89: ...CK b si la TwisTorr 305 ICQ 305 IC SF est configur e en REMOTE MODE et qu INTERLOCK est param tr sur IMPULSE MODE intervenir sur le signal START c si la TwisTorr 305 ICQ 305 IC SF est configur e en mo...

Страница 90: ...ce de rechange de la TwisTorr 305 ICQ 305 IC SF est exp di e au moment de la commande Il faut donc renvoyer la TwisTorr 305 ICQ 305 IC SF d faillante dans la bo te qui contenait la pi ce de rechange...

Страница 91: ...s en mode d marrage progressif en agissant sur une commande en s rie adapt e comme indiqu ci dessous Le mode Soft Start D marrage progressif permet la redistribution correcte de la graisse pr sente da...

Страница 92: ...roduit sur lequel il est appos NE DOIT PAS tre limin avec des d chets m nagers o industriels communs mais qu il doit tre confi un centre de collecte s lective L utilisateur est donc invit contacter le...

Страница 93: ...service d change ou de r paration avanc veuillez contacter le distributeur local ou directement par courrier vpt customercare agilent com vpl customercare agilent com Vous devez remplir le formulaire...

Страница 94: ...te y almacenamiento 103 Descripci n del producto 104 Instalaci n 105 Preparaci n para instalaci n 105 Puesta en marcha 107 Montaje de la TwisTorr 305 ICQ 305 IC SF 108 Conexi n de la brida de alto vac...

Страница 95: ...culares con disposiciones espec ficas relacionadas con el nivel m s elevado de mantenimiento personal espec ficamente capacitado para las operaciones de mantenimiento no deben ser realizadas por el us...

Страница 96: ...os mensajes de advertencia llaman la atenci n del operador sobre un procedimiento o pr ctica espec fica que si no se realiza correctamente puede causar lesiones personales graves PRECAUCI N Los mensaj...

Страница 97: ...bomba TwisTorr 305 ICQ 305 IC SF Tambi n se muestra el peligro que describen Un s mbolo triangular indica una advertencia Los significados de los s mbolos que pueden aparecer junto a las advertencias...

Страница 98: ...ido por dicha etiqueta de advertencia Los siguientes s mbolos aparecen en el instrumento para su informaci n I Red el ctrica encendida Si est roja indica fallo Si est amarilla indica advertencia Puert...

Страница 99: ...dad funcione de manera segura El producto descrito en el presente manual est destinado exclusivamente al rea de aplicaci n especificado en las instrucciones El manual tambi n proporciona indicaciones...

Страница 100: ...osivos bombear vapores condensantes bombear l quidos bombear polvo funcionamiento con capacidad de gas alta incorrecta funcionamiento con presiones de pre vaciado altas incorrectas Funcionamiento con...

Страница 101: ...durante el mantenimiento o la instalaci n Dependiendo de la peculiaridad del proceso las bombas de vac o los componentes o los fluidos de funcionamiento pueden estar contaminados con sustancias t xica...

Страница 102: ...n con la norma EN 420 Pautas de seguridad para bombas turbomoleculares Las bombas turbomoleculares como se describen en el siguiente manual de funcionamiento contienen una gran cantidad de energ a kin...

Страница 103: ...70 C rango de humedad relativo 0 a 90 no condensante la vida til de una bomba turbomolecular es de 12 meses desde la fecha de env o las bombas turbomoleculares deben iniciadas con arranque suave cuan...

Страница 104: ...ra aplicaciones de vac o ultra alto que puede bombear cualquier tipo de gas o compuesto de gas no corrosivo y oxidante La acci n de bombeado se obtiene a trav s de una turbina de alta velocidad max 60...

Страница 105: ...rla en caso de almacenamiento durante largos per odos de tiempo o en caso de env o No tire los materiales de embalaje de manera no autorizada El material es 100 reciclable y cumple con la Directive EE...

Страница 106: ...Instrucciones de uso 106 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figura 16 Embalaje de la TwisTorr 305 ICQ 305 IC SF...

Страница 107: ...or PRECAUCI N No extraiga la tapa adhesiva y protectora hasta que est preparado para instalar la turbobomba en el sistema Figura 17 Instale este dispositivo solo en interiores y no utilice la bomba en...

Страница 108: ...lada en cualquier posici n Fije la TwisTorr 305 ICQ 305 IC SF en una posici n estable montando la brida de entrada de la turbobomba en el sistema de la contrabrida con una conexi n capaz de soportar u...

Страница 109: ...ificada en la secci n INSTRUCCIONES DE USO Preste especial atenci n al dise o de la pinza los materiales de las pinzas y tornillos y la torsi n de fijaci n del tornillo Utilice solo pinzas o tornillos...

Страница 110: ...brida ISO K sujete las dos bridas con el modelo de pinzas IC63250DCMZ o equivalente como se muestra en la figura siguiente se puede utilizar una pantalla de protecci n opcionalmente Figura 18 Utilice...

Страница 111: ...a su vez Vuelva a apretar en secuencia hasta que las caras de la brida se encuentren Apriete los tornillos con una torsi n de 20 Nm Para la brida ConFlat le recomendamos que use solo tornillos de acer...

Страница 112: ...a o tubo apropiada para vac o Si se utiliza un tubo r gido cualquier vibraci n generada por la bomba mec nica debe ser amortiguada a trav s del uso de fuelles NOTA La TwisTorr 305 ICQ 305 IC SF est ca...

Страница 113: ...de usuario bajo tensi n es v lida solo en caso de una parada de emergencia NOTAS 1 Para encontrar la ubicaci n de las clavijas de entrada de tensi n de alimentaci n en el Conector IN OUT y Suministro...

Страница 114: ...o Encendido parpadeando 305 ICQ OFF estado STOP WAITING INTERLOCK FAIL Encendido inverso parpadeando 305 ICQ ON velocidad meta no alcanzada estado STARTING RAMP AUTO TUNING ON luz continua 305 ICQ ON...

Страница 115: ...e detectarse advertencia LED amarilla luz continua ON la bomba no puede girar correctamente cuando recibe el comando de inicio El usuario puede resolver problemas por motivo de la advertencia al compr...

Страница 116: ...la se al INTERLOCK b si la TwisTorr 305 ICQ 305 IC SF est configurada en REMOTE MODE y el INTERLOCK est en IMPULSE MODE act e en el START c si la TwisTorr 305 ICQ 305 IC SF est configurada en modo SER...

Страница 117: ...n sistema refabricado para sustituir el sistema averiado La pieza de repuesto del 305 FSQ SF se enviar al momento del pedido Por lo tanto ser necesario devolver el 305 FSQ SF que no funciona en la cor...

Страница 118: ...iempre en soft start mode actuando en un comando serial adecuado como se especifica a continuaci n El modo Soft Start permite la correcta redistribuci n de la grasa presente en los cojinetes despu s d...

Страница 119: ...unidad Europea indica que el producto en el que se aplica NO debe desecharse con la basura dom stica o industrial com n sino que debe enviarse a un sistema de recolecci n diferenciada Se invita al usu...

Страница 120: ...servicio de intercambio avanzado o reparaci n contacte con un distribuidor local o contacte por correo a vpt customercare agilent com vpl customercare agilent com Es obligatorio completar la Request...

Страница 121: ...SF User Manual 121 5 122 122 123 123 124 126 126 127 128 129 130 131 132 132 134 TwisTorr 305 ICQ 305 IC SF 135 136 ISO K 137 ConFlat 138 139 TwisTorr 305 ICQ 305 IC SF 140 TwisTorr 305 ICQ 305 IC SF...

Страница 122: ...122 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF Technical Information 1 TwisTorr 305 ICQ 305 IC SF 2...

Страница 123: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 123...

Страница 124: ...124 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF...

Страница 125: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 125 I USB J1 NFC CE CSA RoHS...

Страница 126: ...126 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 2006 42 EC Agilent Technologies Agilent Technologies Agilent Technologies Agilent...

Страница 127: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 127 TwisTorr 305 ICQ 305 IC SF Agilent Technologies...

Страница 128: ...128 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF 20 kg EN 347...

Страница 129: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 129 EN 420...

Страница 130: ...130 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 40 C 70 C 0 90 12 60...

Страница 131: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 131 TwisTorr 305 ICQ 305 IC SF 60600 rpm...

Страница 132: ...132 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF 305 FSQ SF 305 FSQ SF 100 EEC 94 62 TwisTorr 305 ICQ 305 IC SF...

Страница 133: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 133 21 TwisTorr 305 ICQ 305 IC SF...

Страница 134: ...134 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF USB DB15 22 2 bar 5 C 35 C 0 90...

Страница 135: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 135 TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF 1000 Nm ConFlat ISO K ConFlat ISO K TwisTorr 305 ICQ 305 IC SF...

Страница 136: ...136 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 8 8 TwisTorr 305 ICQ 305 IC SF...

Страница 137: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 137 ISO K ISO K IC63250DCMZ 23 4 ISO 100 4 ISO 160 22 Nm...

Страница 138: ...138 Agilent TwisTorr 305 ICQ 305 IC SF User Manual ConFlat ConFlat 24 16 CFF 6 20 CFF 8 20 Nm ConFlat Felpro C 100...

Страница 139: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 139 TwisTorr 305 ICQ 305 IC SF KF 16 NW TwisTorr 305 ICQ 305 IC SF...

Страница 140: ...wisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF START INTERLOCK IC DB15 IC DB15 IC LED IC IC 1 2 3 4 TwisTorr 305 ICQ 305 IC SF DB15 DB15 DB15 TwisTorr 305...

Страница 141: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 141 3 LED LED LED TON TOFF 305 ICQ RAMP 305 ICQ RAMP 305 ICQ ON 305 ICQ ON...

Страница 142: ...142 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 1 LED FAIL FAIL TwisTorr 305 ICQ 305 IC SF RAMP NORMAL LED 2 LED RAMP NORMAL LED LED TwisTorr 305 ICQ 305 IC SF 145...

Страница 143: ...wisTorr 305 ICQ 305 IC SF User Manual 143 TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF a TwisTorr 305 ICQ 305 IC SF b TwisTorr 305 ICQ 305 IC SF c TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ...

Страница 144: ...144 Agilent TwisTorr 305 ICQ 305 IC SF User Manual LED DB15 50 C TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF 405000 17...

Страница 145: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 145 1 2 60 WIN100 WIN 100 60 Windows TwisTorr 305 ICQ 305 IC SF...

Страница 146: ...146 Agilent TwisTorr 305 ICQ 305 IC SF User Manual WEEE EC WEEE 25 WEEE http www agilent com environment product index shtml...

Страница 147: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 147 vpt customercare agilent com vpl customercare agilent com Request for Return Agilent...

Страница 148: ...5 IC SF User Manual 6 149 149 150 150 151 153 153 154 155 156 157 158 159 159 161 TwisTorr 305 ICQ 305 IC SF 162 163 ISO K 164 ConFlat 165 166 TwisTorr 305 ICQ 305 IC SF 167 TwisTorr 305 ICQ 305 IC SF...

Страница 149: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 149 TwisTorr 305 ICQ 305 IC SF Technical Information 1 TwisTorr 305 ICQ 305 IC SF 2...

Страница 150: ...150 Agilent TwisTorr 305 ICQ 305 IC SF User Manual...

Страница 151: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 151 TwisTorr 305 ICQ 305 IC SF CE...

Страница 152: ...152 Agilent TwisTorr 305 ICQ 305 IC SF User Manual I USB J1 NFC CE CSA EU RoHS RoHS EU WEEE...

Страница 153: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 153 Machinery Directive 2006 42 EC...

Страница 154: ...154 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF...

Страница 155: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 155 TwisTorr 305 ICQ 305 IC SF 20 kg EN 347...

Страница 156: ...156 Agilent TwisTorr 305 ICQ 305 IC SF User Manual EN 420 t...

Страница 157: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 157 40 C 70 C 0 90 12 60...

Страница 158: ...158 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF 60600 rpm...

Страница 159: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 159 TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF 100 EEC 94 62 TwisTorr 305 ICQ 305 IC SF...

Страница 160: ...160 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 26 TwisTorr 305 ICQ 305 IC SF...

Страница 161: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 161 TwisTorr 305 ICQ 305 IC SF USB DB15 27 2 5 C 35 C 0 90...

Страница 162: ...162 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF 1000 Nm ConFlat ISO K ConFlat ISO K TwisTorr 305 ICQ 305 IC SF...

Страница 163: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 163 8 8 TwisTorr 305 ICQ 305 IC SF...

Страница 164: ...164 Agilent TwisTorr 305 ICQ 305 IC SF User Manual ISO K ISO K IC63250DCMZ 2 28 ISO 100 4 ISO 160 4 22 Nm...

Страница 165: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 165 ConFlat ConFlat 2 29 CFF 6 16 CFF 8 20 20 Nm ConFlat Felpro C 100...

Страница 166: ...166 Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF KF 16 NW TwisTorr 305 ICQ 305 IC SF...

Страница 167: ...ilent TwisTorr 305 ICQ 305 IC SF User Manual 167 TwisTorr 305 ICQ 305 IC SF TwisTorr 305 IC IC DB15 DB15 IC DB15 IC LED IC IC 1 2 3 4 TwisTorr 305 ICQ 305 IC SF DB15 DB15 DB15 TwisTorr 305 ICQ 305 IC...

Страница 168: ...168 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 3 LED Led LED TON TOFF 305 ICQ 305 ICQ 305 ICQ OP 305 ICQ...

Страница 169: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 169 1 3 LED LED 2 LED LED LED TwisTorr 305 ICQ 305 IC SF Errore Il segnalibro non definito...

Страница 170: ...nt TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF a TwisTorr 305 ICQ 305 IC SF b TwisTorr 305 ICQ 305 IC SF c TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ...

Страница 171: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 171 LED DB15 50 C TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF TwisTorr 305 ICQ 305 IC SF 405000 17...

Страница 172: ...172 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 1 2 60 WIN100 WIN 100 60 TwisTorr 305 ICQ 305 IC SF...

Страница 173: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual 173 WEEE EC WEEE EC 30 WEEE http www agilent com environment product index shtml...

Страница 174: ...174 Agilent TwisTorr 305 ICQ 305 IC SF User Manual vpt customercare agilent com vpl customercare agilent com Request for Return Agilent...

Страница 175: ...bomolecular Pumps 183 Transport Storage 184 Product description 185 Installation 186 Preparation for installation 186 Set up 188 TwisTorr 305 ICQ 305 IC SF Mounting 189 Connection of the High Vacuum F...

Страница 176: ...the specific sections with specific provisions relating to the higher level of maintenance personnel specifically trained for maintenance operations must not be carried out by the user For a correct...

Страница 177: ...ontrasting color WARNING Warning messages draw the operator s attention to a specific procedure or practice which if not performed correctly could result in serious personal injury CAUTION Caution mes...

Страница 178: ...ngs on the TwisTorr 305 ICQ 305 IC SF The hazard they describe is also shown A triangular symbol indicates a warning The meanings of the symbols that may appear alongside warnings in the documentation...

Страница 179: ...ure referred to by that warning label The following symbols appear on the instrument for your information I Mains power on If red it means malfunction If yellow it means warning USB port Protective Gr...

Страница 180: ...erved in order for the unit to work safely The product described in this manual is intended exclusively for the area of application specified in the instructions The manual also provides indications r...

Страница 181: ...oxidizing gases pumping of explosive gases pumping of condensing vapors pumping of liquids pumping dust operation with improper high gas throughput operation with improper high fore vacuum pressures o...

Страница 182: ...SF and during installation WARNING Danger to health by hazardous substances during maintenance or installation Depending on the process peculiarity vacuum pumps components or operating fluids can be...

Страница 183: ...ording to EN 420 Safety guideline for Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high Rotation Speed i...

Страница 184: ...emperature range 40 C to 70 C relative humidity range 0 to 90 non condensing the shelf life of a turbomolecular pump is 12 months from the shipping date the turbomolecular pumps must be always soft st...

Страница 185: ...pump for high and ultrahigh vacuum applications which is able to pump any type of non corrosive and oxidizing gas or gas compound The pumping action is obtained through a high speed turbine max 60600...

Страница 186: ...se it in case of storage for a long period of time or in case of shipping Do not dispose of the packing materials in an unauthorized manner The material is 100 recyclable and complies with EEC Directi...

Страница 187: ...Instructions for Use Agilent TwisTorr 305 ICQ 305 IC SF User Manual 187 Figure 31 TwisTorr 305 ICQ 305 IC SF packaging...

Страница 188: ...ntroller CAUTION Do not remove the adhesive and protective cap until you are ready to install the turbopump to the system Figure 32 Install this device indoors only and do not use the pump in an envir...

Страница 189: ...installed in any position Fix the TwisTorr 305 ICQ 305 IC SF in a stable position mounting the inlet flange of the turbopump to the system counter flange with a connection capable of withstanding a to...

Страница 190: ...specified in the INSTRUCTION FOR USE section Specifically pay attention to clamp design material of clamps and bolts and bolt fixing torque Use only high resistance class clamps or bolts 8 8 WARNING...

Страница 191: ...r ISO K flange connections fix the two flanges with the clamps model IC63250DCMZ or equivalent as shown in the following figure a protective screen can optionally be used Figure 33 Use the required nu...

Страница 192: ...screw in turn Repeat the sequential tightening until the flange faces meet Tighten the screws with a torque of 20 Nm For ConFlat flange we recommend the usage of high strength steel bolts only To fac...

Страница 193: ...be made by a vacuum rated hose or pipe If a rigid pipe is used any vibration generated by the mechanical pump must be damped through the use of bellows NOTE The TwisTorr 305 ICQ 305 IC SF is characte...

Страница 194: ...clusively in the case of an emergency stop NOTE 1 In order to find the location of the supply voltage input pins on the IN OUT and Power Supply Connector as well as the input voltage admitted values p...

Страница 195: ...powered but not spinning status pump start not active or system stop on error condition On invers flashing 305 ICQ system is running but target speed not yet achieved status ramp up ON Solid light 30...

Страница 196: ...condition RAMP NORMAL etc 2 In case a Warning Yellow LED ON Solid light is detected the pump can spin properly upon receiving the start command The user can troubleshoot the reason for the warning by...

Страница 197: ...RLOCK signals b if the TwisTorr 305 ICQ 305 IC SF is configured in REMOTE MODE and the INTERLOCK is set to IMPULSE MODE then open the START signal c if the TwisTorr 305 ICQ 305 IC SF is configured in...

Страница 198: ...o replace the failed system The exchange 305 IC is shipped when the order is placed You then return the failed TwisTorr 305 ICQ 305 IC SF in the box that the exchange TwisTorr 305 ICQ 305 IC SF comes...

Страница 199: ...t always in soft start mode acting on an appropriate serial command as specified below The Soft Start mode allows the correct redistribution of the grease present in the bearings after a long period o...

Страница 200: ...ndicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system The end user is therefo...

Страница 201: ...tomer need an advanced exchange or repair service please contact local distributor or directly mail to vpt customercare agilent com vpl customercare agilent com Completion of the Request for Return fo...

Страница 202: ...Used with Corrosive and Oxidizing Gases 239 Purge Valve Installation 241 Pump Used in Presence of Magnetic Fields 242 Vibration Isolator Installation 242 Controller Operations 243 Interconnections 24...

Страница 203: ...s and an opening restricted by the corresponding rotor discs These are made of an aluminum alloy During normal operation the motor is driven at 1010 Hz WARNING Always ensure the pump is receiving prop...

Страница 204: ...The TwisTorr 305 ICQ 305 IC SF models are Code Model X3513 64060 TwisTorr 305 ICQ WATER ISO100 485A X3513 64061 TwisTorr 305 ICQ AIR ISO100 485A X3513 64062 TwisTorr 305 ICQ WATER CFF6 485A X3513 640...

Страница 205: ...formation Agilent TwisTorr 305 ICQ 305 IC SF User Manual 205 The following figures shows the 7 models The optional air cooling fan is shown in the drawings Figure 36 Model X3513 64060 Figure 37 Model...

Страница 206: ...Technical Information 206 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 38 Model X3513 64061 with air cooling Figure 39 Model X3513 64062...

Страница 207: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 207 Figure 40 Model X3513 64063 Figure 41 Model X3513 64064...

Страница 208: ...Technical Information 208 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 42 Model X3513 64065 Figure 43 Model X3513 64066...

Страница 209: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 209 Figure 44 Model X3513 64066 with air cooling...

Страница 210: ...mbar Note foreline Tolerance defined as the pressure at which the turbopump still produces a compression of 100 For continuous operation water cooling is recommended water temperature between 15 C and...

Страница 211: ...5 bar 75 psi Noise Pressure level 41 dB A at 1 meter Note mean values based on a significative sample Ar and N2 compression ratio estimated standard deviation per test pumping speed below 7 noise pres...

Страница 212: ...ximum current 7 5A the voltage lost is 1 5V USB communication as per USB 1 0 Table 2 TwisTorr 305 IC SF X3513 64066 Technical Specification TwisTorr 305 IC SF Technical data Pumping speed N2 He H2 Mai...

Страница 213: ...305 ICQ 305 IC SF has been stored at a temperature less than 5 C wait until the system has reached the above mentioned temperature before switch the TwisTorr 305 ICQ 305 IC SF on Figure 45 Maximum al...

Страница 214: ...Agilent TwisTorr 305 ICQ 305 IC SF User Manual TwisTorr 305 ICQ 305 IC SF Outline The following figures show the TwisTorr 305 ICQ 305 IC SF dimensions are in mm inches Figure 46 TwisTorr 305 ICQ WATER...

Страница 215: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 215 Figure 47 TwisTorr 305 ICQ AIR ISO 100 485A X3513 64061...

Страница 216: ...Technical Information 216 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 48 TwisTorr 305 ICQ AIR ISO 100 485A X3513 64061 with air cooling...

Страница 217: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 217 Figure 49 TwisTorr 305 ICQ WATER CFF 6 485A X3513 64062...

Страница 218: ...Technical Information 218 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 50 TwisTorr 305 ICQ AIR CFF 6 485A X3513 64063...

Страница 219: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 219 Figure 51 TwisTorr 305 ICQ WATER ISO 160 485A X3513 64064...

Страница 220: ...Technical Information 220 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 52 TwisTorr 305 ICQ WATER CFF 8 485A X3513 64065...

Страница 221: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 221 Figure 53 TwisTorr 305 IC SF AIR ISO 100 485A X3513 64066...

Страница 222: ...Technical Information 222 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 54 TwisTorr 305 IC SF AIR ISO 100 485A X3513 64066 with air cooling...

Страница 223: ...nt TwisTorr 305 ICQ 305 IC SF User Manual 223 Figure 55 Graph of Pumping Speed vs Inlet Pressure for TwisTorr 305 ICQ 305 IC SF pump Figure 56 Graph of Compression ratio vs Foreline Pressure for TwisT...

Страница 224: ...Manual Figure 57 Graph of Pumping Speed vs Side port for TwisTorr 305 ICQ 305 IC SF pump Figure 58 Graph of Iso Flow Iso Power for TwisTorr 305 ICQ 305 IC SF with Nitrogen gas water cooling version w...

Страница 225: ...n Figure 59 Model 9699302 and 9699304 Figure 60 Model X3500 68000 and X3500 68001 Inlet screens help prevent damage to the blades by preventing foreign objects from entering the pump The following par...

Страница 226: ...the pumping speed by the following amount Table 3 Reduction in pumping speed Ar N2 He H2 X3500 68000 X3500 68001 20 18 7 5 The inlet screen is fitted in the upper part of the pump as shown in the fig...

Страница 227: ...rmation Agilent TwisTorr 305 ICQ 305 IC SF User Manual 227 Figure 62 The overall flange dimensions with the protection screen fitted on pump do not change as the inlet screen remains integrated into t...

Страница 228: ...igure 63 The fan bracket is shaped so that it can be mounted close to the pump To fix the fan to the TwisTorr 305 ICQ 305 IC SF case execute the following procedure see the following figure 1 Mount th...

Страница 229: ...User Manual 229 Assembling procedure Air Cooling Kit X3500 68010 To mount the air cooling Kit on the TwisTorr 305 ICQ 305 IC SF pump proceed as follows 3 Fix the fan 1 to the bracket 2 using the furn...

Страница 230: ...chnical Information 230 Agilent TwisTorr 305 ICQ 305 IC SF User Manual 4 Now fix the air cooling bracket fan assembly to the pump body Figure 65 A On board CNTR B Foreline flange KF16 C VENT screw D F...

Страница 231: ...t mount the adapter 4 on the connector DB15 5 see figure on the next page of the pump and then connect the air cooling kit connector to the adapter connector 6 by the way of the extension cable which...

Страница 232: ...Technical Information 232 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 67 Connector DB15 item 5 on pump edge The picture shows the pump with the optional cooling fan...

Страница 233: ...only for water cooling pumps Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient The two model part number...

Страница 234: ...The items of the plastic model kit must be assembled as shown in the following figure Figure 70 The assembled kit must be screwed into the suitable holes of the pump body with a recommended torque of...

Страница 235: ...oose or disconnected during operation Cooling may be carried out either through an open circuit with eventual discharge of the water or using a closed circuit cooling system The water temperature must...

Страница 236: ...and vent device enable an automatic vent operation TwisTorr 305 ICQ 305 IC SF compatible Vent Valve mod 9699834 9699834M006 Figure 72 This vent valve waits before opening a minimum time of about 5 sec...

Страница 237: ...rr 305 ICQ 305 IC SF User Manual 237 To install the vent valve unscrew the threaded plug see figure below Figure 73 Then screw the vent valve into the pump and tighten it using a 16 mm hexagonal spann...

Страница 238: ...of the kit on the mating connector 1 on the 305 ICQ Fan Vent Adapter kit P N X3514 68001 when the assembly is completeted Figure 75 CAUTION Do not overtighten the valve as this may damage the thread...

Страница 239: ...m pressure in the 10 8 mbar range can be achieved The recommended gas flow maintains a pressure into the pump body higher than the fore vacuum pressure The recommended procedure to vent the system and...

Страница 240: ...cal Information 240 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Figure 76 Purge layout 1 Purge gas line 2 Pressure regulator 3 Gas purge valve 4 Gas purge port 5 Forevacuum pump 6 Turbopump 7 Vent...

Страница 241: ...t the pump bearings against particulate and corrosive gases that could move into the pump To install the gas purge valve it is necessary to switch off the pump and unscrew the purge port cover as show...

Страница 242: ...Installation Four vibration isolators for ISO and CFF inlet flange version pumps are available as accessories The four model part numbers are the following model 9699344 for ISO 100 flange model 96993...

Страница 243: ...he following figure shows the TwisTorr 305 ICQ 305 IC SF on board interconnections Figure 79 In the picture it is shown the adapter P N X3514 68001 connected to the pump 1 Vent valve connector 2 Cooli...

Страница 244: ...ernal fan This is a dedicated 24 Vdc connector to supply the optional external fan 3 IN OUT and Power Supply Figure 82 IN OUT and Power Supply This connector carries all the input and output signals t...

Страница 245: ...eed Setting 7 24VDC OUTPUT V Supply Voltage Output for digital input Nominal voltage 24 VDC Max current 30 mA 8 NORMAL SETPOINT Digital Output DO1 Normal Setpoint Logic Output active voltage Nominal v...

Страница 246: ...ll speed is not reached after that time an error condition sets in Speed setting PWM input signal to set the pump speed The PWM signal characteristics must be the following frequency 100 Hz 20 amplitu...

Страница 247: ...ence size Frequency or Power or Temperature set by the user The default factory setting is the rotational frequency see the following example diagram The user can set the reference size by acting via...

Страница 248: ...is enabled when the reference quantity chosen frequency current or time is higher than the set threshold The signal can be high level active that is the output is normally at 0 Vdc and becomes 24 Vdc...

Страница 249: ...1 of 500 Hz then the output goes at 24 Vdc and stays at 24 Vdc until the frequency be comes lower than 495 Hz that is 500 Hz 1 of 500 Hz It is possible to delay the set point checking for a programma...

Страница 250: ...Here below there are the typical connections of the open collector input of the integrated controller to an external system Figure 86 Reference connection circuit for digital input WARNING If the pow...

Страница 251: ...TwisTorr 305 ICQ 305 IC SF User Manual 251 How to Connect the Controller Outputs The following figure shows a typical logic output connection for pin 8 9 10 or 11 Figure 87 Reference connection circu...

Страница 252: ...5 IC SF User Manual RS485 Communication Description The communication protocol RS485 has the same structure of the RS232 but it manages the address field Communication Format 8 data bit no parity 1 st...

Страница 253: ...esponding ASCII character STX Start of transmission 0x02 ADDR Unit address 0x80 device number 0 to 31 WIN Window a string of 3 numeric character indicating the window number from 000 to 999 for the me...

Страница 254: ...ith the following response types Table 6 Controllers response types Type Length Value Description Logic 1 byte after a read instruction of a logic window Numeric 6 bytes after a read instruction of a...

Страница 255: ...d START Source PC Destination Pump 02 83 30 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Pump Destination PC 02 83 06 03 38 35 STX ADDR ACK ETX CRC Command STOP Source PC Destination Pump...

Страница 256: ...6 Agilent TwisTorr 305 ICQ 305 IC SF User Manual Command SOFT START ON Source PC Destination Pump 02 83 31 30 30 31 31 03 42 33 STX ADDR WINDOW WR ON ETX CRC Source Pump Destination PC 02 83 06 03 38...

Страница 257: ...the signal is above the threshold and Low level active is the opposite Direct 105 Always Always N Setpoint histeresis It defines the percentage value of Set Point Hysteresis 2 108 Always Always N Bau...

Страница 258: ...Stop speed reading It reads the pump speed while in stop mode On 200 Always N Bus current It reads the actual value of the bus current supplied by controller to electric motor 201 Always N 3phase volt...

Страница 259: ...cle from the last start to now if the pump is running 301 Always N Cycle number It indicates the number of cycles start stop during all the pump life 302 Always N Pump life It indicates the total hour...

Страница 260: ...average supply power 399 Always N Controller life It indicates the total hours of controller life 400 Always A Program Listing CRC It is the CRC of the actual embedded program listing 401 Always A Bo...

Страница 261: ...mpulse Continuous 111 0 2 117 Hz 120 Hz 121 Hz 122 Off On 125 0 2 126 0 65535 0 2s 143 0 1 144 Off On 147 0 65535 0 2s 157 0 2 167 Off On 200 mA 201 1 10V 202 W 203 Hz 204 C 205 206 211 C 216 C 221 Of...

Страница 262: ...losed 2 On command means that the vent valve is opened or closed by means of window n 122 3 These commands remove the pump motor supply for a short time If they are used continuously they can cause th...

Страница 263: ...nication between the controller and external device smartphone or tablet the VacuumLink app must be installed first from Google Play or Apple Store The app is available for both Android and iOS Once i...

Страница 264: ...after opening the VacuumLink App make sure to align the NFC antenna of the smartphone with the NFC icon on the controller and take the smartphone at a distance less than 2 cm 1 in Figure 90 NFC conne...

Страница 265: ...Technical Information Agilent TwisTorr 305 ICQ 305 IC SF User Manual 265 Screenshot APP Figure 91...

Страница 266: ...2 USB Port 1 Connect the Micro USB B cable to the TwisTorr 305 ICQ 305 IC SF 2 The USB port is recognized by PC as Virtual COM 3 All windows and related features of the Windows protocol are available...

Страница 267: ...erature condition is deteted by an hardware circuitry This overtemperature condition is deteted by an hardware circuitry which is independent from the microprocessor The maximum allowed value is 62 C...

Страница 268: ...ower supply and the electronic controller Restart the pump ON Solid OFF ON Inv Flash Controller Over Temp The temperature of the electronic control unit has exceeded the maximum allowed value 68 C Thi...

Страница 269: ...shut down due to its overtemperature protection intervention DO2 THERMALFAIL DO2 Digital Output shut down due to its overtemperature protection intervention V24VDC WARNING UNDERVOLTAGE 24VDC OUTPUT V...

Страница 270: ...nnected to the output OFF ON Solid ON Solid Blinking Flashing Inv Flashing Solid A1 UNDERLOAD A1 Accessory Output is ACTIVE but the no load is connected to the output These warnings don t cause the ye...

Страница 271: ...X3500 68001 Inlet Screen CFF 8 9699304 KF25 Foreline Flange Assy X3513 68000 Vibration Isolator ISO 100 9699344 Vibration Isolator CFF 6 9699334 Vibration Isolator ISO 160 9699345 Vibration Isolator C...

Страница 272: ...Technical Information 272 Agilent TwisTorr 305 ICQ 305 IC SF User Manual...

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Страница 278: ...bes the following Istruzioni per l uso Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Instruction for Use Technical information www agilent com Agilent Technologies Inc 2020 Edition...

Страница 279: ...bes the following Istruzioni per l uso Bedienungshandbuch Notice de mode d emploi Manual de istrucciones Instruction for Use Technical information www agilent com Agilent Technologies Inc 2020 Edition...

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