Agilent Technologies TV 551 Navigator, Руководство пользователя

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17 Technical Information
Technical Specification
268/328 TV 551/701 Navigator User Manual / 87-900-934-01 (P)
Technical Specification
Tab. 3 Technical Specification
CHARACTERISTIC TV 551 TV 701
Pumping speed (with inlet screen)
N
2
:
He:
H
2:
CFF 6":
350 l/s
450 l/s
450 l/s
CFF 8"/ISO160:
550 l/s
600 l/s
510 l/s
CFF 10"/ ISO200:
690 l/s
620 l/s
510 l/s
Compression ratio
N
2
:
He:
H
2
:
1 x 10
9
1 x 10
7
1 x 10
6
1 x 10
9
1 x 10
7
1 x 10
6
Base pressure
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test
dome bake-out, with a Turbopump fitted
with a ConFlat flange and using the
recommended pre-vacuum pump)
with minimum recommended mechanical pump:
< 1 x 10
-10
mbar
( < 1 x 10
-10
Torr)
with minimum recommended diaphragm pump:
2 x 10
-9
mbar
(1.5 x 10
-9
torr)
Inlet flange ISO 160, CF 6", CF 8”, ISO 160F ISO 200, CF 10",
ISO 200F
Foreline flange KF 25 NW
Rotational speed 42000 rpm
Start-up time < 5 minutes
Recommended forepump
Mechanical
Dry
Agilent DS 302
Agilent Triscroll PTS 300 / IDP-15
Operating position Any
Operating ambient temperature +5 °C to +35 °C
Cooling requirements Natural air convection
Water optional (use water with electrical conductivity
≤
500
µ
S/cm)
Cooling water flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)