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Agilent Technologies IMG-500, Руководство пользователя

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Agilent Technologies IMG-500 Скачать руководство пользователя страница 24

Compact Cold Cathode Gauge IMG-500

 

                                                             24

 

 

5 

Deinstallation 

 

 

DANGER

 

DANGER: contaminated parts 

Contaminated parts can be detrimental to health 
and environment. 

Before beginning to work, find out whether any 
parts are contaminated. Adhere to the relevant 
regulations and take the necessary precautions 
when handling contaminated parts. 

 

 

 

 

Caution

 

Caution: vacuum component 

Dirt and damages impair the function of the vac-
uum component. 

When handling vacuum components, take appro-
priate measures to ensure cleanliness and prevent 
damages. 

 

 

 

 

Caution

 

Caution: dirt sensitive area 

Touching the product or parts thereof with bare 
hands increases the desorption rate. 

Always wear clean, lint-free gloves and use clean 
tools when working in this area. 

 

 

 

  Vent the vacuum system. 

  Put the gauge out of operation and unplug the sensor 

cable. 

Содержание IMG-500

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Страница 4: ... Liability and Warranty 10 2 Technical Data 11 3 Installation 166 3 1 Vacuum Connection 16 3 2 Power Connection 21 4 Operation 22 5 Deinstallation 244 6 Maintenance Troubleshooting 25 7 Returning the Product 26 8 Disposal 27 9 Literature 28 For cross references within this document the symbol XY is used for cross references to further documents listed under literature the symbol Z ...

Страница 5: ......

Страница 6: ...enstein Agilent Technologies Validity This document applies to products with the following part num bers IMG500KF25 DN 25 ISO KF IMG500CF35 DN 40 CF F The part number PN can be taken from the product nameplate If not indicated otherwise in the legends the illustrations in this document correspond to the product with part number IMG500KF25 They apply to the other product by analogy We reserve the r...

Страница 7: ...The gauges can be operated in connection with an Agilent Vacuum Gauge Controller AGC 100 an Agilent Turbo AG Rack Controller or with another controller Functional Principle The gauge functions with a cold cathode ionization measure ment circuit according to the inverted magnetron principle Over the whole measurement range the measuring signal is output as a logarithm of the pressure ...

Страница 8: ...d environ mental damage Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Notice 1 2 Personnel Qualifications Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the neces sary experience or who have been instructed by the end user of the product ...

Страница 9: ... work you are going to do and consider the safety instructions in this document Before beginning to work find out whether any vacuum com ponents are contaminated Adhere to the relevant regulations and take the necessary precautions when handling contamin ated parts DANGER DANGER magnetic fields Strong magnetic fields can disturb electronic devices like heart pacemakers or impair their function Mai...

Страница 10: ...cument use the product in a non conforming manner make any kind of interventions modifications alterations etc on the product use the product with accessories not listed in the product documentation The end user assumes the responsibility in conjunction with the process media used Gauge failures due to contamination or wear and tear as well as expendable parts e g seals are not covered by the warr...

Страница 11: ...pply Output impedance 2 10 Minimum loaded impedance 10 k short circuit proof Response time p 10 6 mbar pressure dependent 10 ms p 10 8 mbar 1000 ms Identification gauge 100 k referenced to supply common Supply DANGER The gauge may only be connected to power sup plies instruments or control devices that conform to the requirements of a grounded protective extra low voltage SELV The connection to th...

Страница 12: ... Vacuum connection measuring common connected via 10 k max voltage differential with respect to safety 50 V accuracy 10 V Supply common signal common conducted separately differential measurement recommended for cable lengths 10 m Materials on the vacuum side Vacuum connection Measurement chamber Feedthrough isolation Internal seal Anode Ignition aid stainless steel stainless steel ceramic Al2O3 F...

Страница 13: ...C without electronics and magnetic shielding 40 65 C Relative humidity 80 at temperatures 31 C decreasing to 50 at 40 C Mounting orientation any Use indoors only altitude up to 2000 m Degree of protection IP 40 Dimensions mm DN 40 CF F 24 92 ø 63 5 28 55 60 75 18 DN 25 ISO KF Weight 950 g ...

Страница 14: ...t signal U V 0 0 0 5 1 0 1 5 2 5 3 5 4 5 5 5 6 5 7 5 8 5 9 5 10 5 2 0 3 0 4 0 5 0 6 0 7 0 8 0 9 0 10 0 1E 06 1E 07 1E 08 1E 09 1E 10 sensor error underrange Pressure p Pa mbar torr p 10 U c U c log10 p mbar Pa Torr c 10 5 8 5 10 625 valid in the range 2 10 9 mbar p 1 10 2 mbar 1 5 10 9 Torr p 7 5 10 3 Torr 2 10 7 Pa p 1 Pa ...

Страница 15: ...6 10 6 2 4 6 10 5 2 4 6 10 4 2 4 6 10 3 2 4 6 10 2 Xe Kr Luft Air O2 CO N2 H2Ne He peff mbar p mbar Ar In the range below 10 5 mbar the pressure indication is linear For gases other than air the pressure can be determined by means of a simple conversion formula peff K pressure reading Where Gas type K mean values Air O2 CO N2 Xe Kr Ar H2 Ne He 1 0 0 4 0 5 0 8 2 4 4 1 5 9 ...

Страница 16: ...mps are opened while the vacuum system is pressurized Do not open any clamps while the vacuum system is pressurized Use the type clamps which are suited to overpressure DANGER DANGER overpressure in the vacuum system 2 5 bar KF flange connections with elastomer seals e g O rings cannot withstand such pressures Process media can thus leak and possibly damage your health Use O rings provided with an...

Страница 17: ...rding to EN 61010 CF flanges fulfill this requirement For gauges with a KF flange use a conductive metallic clamping ring Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bar...

Страница 18: ...s of the product Before performing any tightness tests put the pro duct out of operation and remove the electronics unit The gauge may be mounted in any orientation To keep condensates and particles from getting into the measur ing chamber preferably choose a horizontal to upright position and possibly use a seal with a centering ring and filter ...

Страница 19: ... Cold Cathode Gauge IMG 500 19 When making a CF flange connection it can be ad vantageous to temporarily remove the electronics and the magnet unit Hex socket AF 1 5 AF 7 Protective lid Keep the protective lid ...

Страница 20: ...Cold Cathode Gauge IMG 500 20 Remove the protective lid and connect the product to the vacuum system or Protective lid Clamp Seal with centering ring Seal with centering ring and filter Keep the protective lid ...

Страница 21: ...able is available make one according to the following diagram Electrical connection Pin 1 Supply 15 30 VDC Pin 2 Supply common Pin 3 Signal output measuring signal Pin 4 Identification Pin 5 Signal common Pin 6 Status Pin 7 8 n c 8 pin FCC 68 1 8 10 10 Ident 3 5 4 1 2 6 10 k Signal Connect the gauge to the controller using the sensor cable ...

Страница 22: ...ge only at pressures 10 2 mbar to prevent excessive contamination If you are using an Agilent measurement unit for Compact Gauges with at least two gauge connec tions the cold cathode gauge can be controlled for example by a Pirani gauge Gas Type Dependence The measurement value depends on the type of gas being measured The value displayed is accurate for dry air O2 CO and N2 It can be mathematica...

Страница 23: ...erated for more than one year without cleaning cleaning the gauge 1 In general contamination of the gauge leads to deviations of the measured values In the low pressure range p 1 10 3 mbar the pressure in dication is usually too low as a consequence of the contami nation of the cold cathode system In case of severe contami nation instabilities can occur layers of the measuring cham ber peel off Co...

Страница 24: ...ling contaminated parts Caution Caution vacuum component Dirt and damages impair the function of the vac uum component When handling vacuum components take appro priate measures to ensure cleanliness and prevent damages Caution Caution dirt sensitive area Touching the product or parts thereof with bare hands increases the desorption rate Always wear clean lint free gloves and use clean tools when ...

Страница 25: ...nnection it can be ad vantageous to temporarily remove the electronics and the magnet unit 19 6 Maintenance Troubleshooting 1 If operated at high pressures or under dirty conditions the gauge must be regularly cleaned Gauge failures due to contamination or wear and tear as well as expendable parts e g seals are not covered by the warranty ...

Страница 26: ...ned to Agilent should preferably be free of harmful substances Adhere to the for warding regulations of all involved countries and forwarding companies and enclose a duly com pleted declaration of contamination Products that are not clearly declared as free of harmful sub stances are decontaminated at the expense of the customer Products not accompanied by a duly completed declaration of contamina...

Страница 27: ...nical and electric components operating fluids etc can be detrimen tal to the environment Dispose of such substances in accordance with the relevant local regulations Separating the components After disassembling the product separate its components ac cording to the following criteria Contaminated components Contaminated components radioactive toxic caustic or bio logical hazard etc must be decont...

Страница 28: ...1 www agilent com Instruction Manual Compact Cold Cathode Pirani Gauge IMG 500 tqna75e1 Agilent Technologies Lexington MA 02421 USA 2 www agilent com Instruction Manual Vacuum Gauge Controller AGC 100 tqnb15e1 Agilent Technologies Lexington MA 02421 USA ...

Страница 29: ...Compact Cold Cathode Gauge IMG 500 29 Notes ...

Страница 30: ...Compact Cold Cathode Gauge IMG 500 30 Notes ...

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