Agilent Technologies IMG-500, Руководство пользователя

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Compact Cold Cathode Gauge IMG-500
11
2 Technical Data
Measuring range (air, N
2
) 2×10
-9
… 1×10
-2
mbar
Accuracy

±30% (in the range
1×10
-8
… 1×10
-3
mbar)
Reproducibility

±5% (in the range
1×10
-8
… 1×10
-3
mbar)
Output signal (measuring signal)
Voltage range 0
… +10.5 V
Voltage vs. pressure logarithmic , 1.0 V/decade
Error signal <0.5 V no supply
Output impedance 2×10

Minimum loaded impedance 10 k

, short-circuit proof
Response time
p > 10
-6
mbar
(pressure dependent)
<10 ms
p = 10
-8
mbar

1000 ms
Identification gauge 100 k

, referenced to
supply common
Supply
DANGER
The gauge may only be connected to power sup-
plies, instruments or control devices that conform
to the requirements of a grounded protective extra-
low voltage (SELV). The connection to the gauge
has to be fused
1)
.
Voltage at the gauge 15
… 30 VDC
(ripple

1 V
pp
)
1)
Agilent controllers fulfill this requirement.