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MPS50SV Hardware Manual

Overview

Chapter 1: Overview

N O T E :

Aerotech continually improves its product offerings; listed options may be superseded at any

time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual’s release. Refer to www.aerotech.com for the most up-to-date information.

Table 1-1:

Model Numbers and Ordering Options

MPS-SV Miniature Mechanical-Bearing Screw-Driven Stage

MPS50SV-5

5 mm travel

Drive Screw (Required)

-BS

Precision-ground ball screw, 1 mm/rev

-LS

Precision-ground lead screw, 0.5 mm/rev

Vacuum Preparation (Optional)

-HV

High-vacuum preparation to 10

-6

torr

Motor (Required)

-M1

DC servomotor

-M2

Stepper motor

Mounting Plate (Optional)

-MP

Optical table mounting plate

Metrology

-PL0

No metrology performance plots

-PL1

Metrology, uncalibrated with performance plots

-PL2

Metrology, calibrated (HALAR) with performance plots

www.aerotech.com

Chapter 1

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Содержание MPS50SV

Страница 1: ...Revision 1 00 00 MPS50SV Hardware Manual ...

Страница 2: ...12 967 6870 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Email Support aerotech com Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email Support aerotech com Phone 81 0 50 5830 6814 Fax 81 0 43 306 3773 Germany China Email Support aerotech com Phone 49 0 911 967 9370 Fax 49 0 911 967 93720 Email Support aerotech com Phone 86 21 5508 6731 France Taiwan Email Support ae...

Страница 3: ...age 15 2 2 Dimensions 16 2 3 Securing the Stage to the Mounting Surface 18 2 4 Attaching the Payload to the Stage 19 Chapter 3 Electrical Specifications and Installation 21 3 1 Motor and Feedback Connectors 22 3 2 Motor and Feedback Wiring 27 3 3 Motor and Feedback Specifications 29 3 4 Limits Marker and Machine Direction 31 3 5 Motor and Feedback Phasing 32 Chapter 4 Maintenance 33 4 1 Service an...

Страница 4: ... Locations 18 Figure 2 4 Load Capability of MPS50SV Series Stages 19 Figure 2 5 Stage Orientations 20 Figure 3 1 Motor and Feedback Wiring M1 Option 27 Figure 3 2 Motor and Feedback Wiring M2 Option 28 Figure 3 3 Machine Direction 31 Figure 3 4 Analog Encoder Phasing Reference Diagram 32 Figure 3 5 Encoder Phasing Reference Diagram Standard 32 4 www aerotech com ...

Страница 5: ... Mating Connector M1 23 Table 3 3 25 Pin D Motor and Feedback Connector Pinouts M1 with HV Option 24 Table 3 4 25 Pin D Motor and Feedback Connector Pinouts M2 25 Table 3 5 25 Pin D Motor Mating Connector M2 25 Table 3 6 25 Pin D Motor and Feedback Connector Pinouts M2 with HV Option 26 Table 3 7 Feedback Specifications 29 Table 3 8 DC Motor Specifications 30 Table 3 9 Stepper Motor Specifications...

Страница 6: ...Table of Contents MPS50SV Hardware Manual 6 www aerotech com This page intentionally left blank ...

Страница 7: ...nent parts must be restricted while connected to a power source 2 Do not connect or disconnect any electrical components or connecting cables while connected to a power source 3 Disconnect electrical power before servicing equipment 4 All components must be properly grounded in accordance with local electrical safety requirements 5 Operator safeguarding requirements must be addressed during final ...

Страница 8: ...Electrical Safety MPS50SV Hardware Manual 8 www aerotech com This page intentionally left blank ...

Страница 9: ...er more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national implementing legislation i e as a whole including the equipment referred to in this Declaration This is to certify that ...

Страница 10: ...Declaration of Conformity MPS50SV Hardware Manual 10 www aerotech com This page intentionally left blank ...

Страница 11: ...s and Ordering Options MPS SV Miniature Mechanical Bearing Screw Driven Stage MPS50SV 5 5 mm travel Drive Screw Required BS Precision ground ball screw 1 mm rev LS Precision ground lead screw 0 5 mm rev Vacuum Preparation Optional HV High vacuum preparation to 10 6 torr Motor Required M1 DC servomotor M2 Stepper motor Mounting Plate Optional MP Optical table mounting plate Metrology PL0 No metrolo...

Страница 12: ... shipping packaging Humidity Operating 20 to 60 RH Storage 10 to 70 RH non condensing in original packaging The stage should be packaged with desiccant if it is to be stored for an extended time Altitude Operating 0 m to 2 000 m 0 ft to 6 562 ft above sea level Contact Aerotech if your specific application involves use above 2 000 m or below sea level Vibration Use the system in a low vibration en...

Страница 13: ... Straightness 3 0 µm Wedge Ratio 6 82 1 Maximum Speed 1 0 mm rev Ball Screw DC Motor M1 0 8 mm s Stepper Motor M2 0 15 mm s 0 5 mm rev Lead Screw DC Motor M1 0 4 mm s Stepper Motor M2 0 1 mm s Load Capacity 3 6 kg Stage Mass 1 4 kg Material Stainless Steel Carriage Anodized Aluminum Body 1 Specifications are for single axis systems measured 25 mm above the tabletop performance of multi axis system...

Страница 14: ...s ready for use 2 Always handle the MPS50SV in a clean environment and use powder free polyethylene gloves to prevent any contaminants from adhering to the surface of the MPS50SV 3 During installation use cleaned vented stainless steel fasteners when securing the MPS50SV 4 Reduced air pressure eliminates significant convective heat transfer This coupled with the viscous vacuum compatible lubricant...

Страница 15: ...ces are the same as they were when tested at Aerotech Use compressed nitrogen or clean dry oil less air to remove any dust or debris that has collected during shipping Set the MPS50SV on a smooth flat and clean surface Each MPS50SV has a label listing the system part number and serial number These numbers contain information necessary for maintaining or updating system hardware and software Locate...

Страница 16: ...otech continually improves its product offerings listed options may be superseded at any time Refer to the most recent edition of the Aerotech Motion Control Product Guide for the most current product information at www aerotech com Figure 2 1 MPS50SV Dimensions 16 Chapter 2 www aerotech com ...

Страница 17: ...MPS50SV Hardware Manual Mechanical Specifications and Installation Figure 2 2 MPS50SV Mounting Plate Dimensions www aerotech com Chapter 2 17 ...

Страница 18: ...and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry Gently place the stage on the mounting surface N OTE To maintain accuracy the mounting surface must be flat to within 5 µm N OTE The MPS50SV is precision machined and verified for flatness prior to product assembly at the factory If machining is required to achieve the desired flatness it should be performed on the m...

Страница 19: ... by Aerotech with the shipment may not be appropriate and servo instability can occur Refer to the controller help file for tuning assistance The payload must be flat rigid and comparable to the stage in quality to maintain optimum performance N OTE For valid system performance the mounting interface should be flat within 5 µm W A R N I N G Refer to the dimensions in Section 2 2 for maximum allowa...

Страница 20: ...Mechanical Specifications and Installation MPS50SV Hardware Manual Figure 2 5 Stage Orientations 20 Chapter 2 www aerotech com ...

Страница 21: ...h the system separate from this documentation The electrical wiring from the motor and encoder are integrated at the factory Refer to the sections that follow for standard motor wiring and connector pinouts W A R N I N G Applications requiring access to the stage while it is energized will require additional grounding and safeguards The System Integrator or qualified installer is responsible for d...

Страница 22: ...e are any questions on system configuration The System Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application D A N G E R Remove power before connecting or disconnecting electrical components or cables Failure to do so may cause electric shock or damage to the equipme...

Страница 23: ...tive CCW hardware limit 8 Reserved 9 Reserved 10 Motor 11 Motor 12 Reserved 13 Reserved 14 Cosine 15 Sine 16 Marker 17 Encoder 5 V 18 Stage ID 19 Positive CW hardware limit 20 Reserved 21 Reserved 22 Motor 23 Motor 24 Reserved 25 Reserved Case Signal shield connection to case Table 3 2 25 Pin D Motor Mating Connector M1 Mating Connector Aerotech P N Third Party P N Backshell ECK01057 TE 5745173 4 ...

Страница 24: ...ve CCW hardware limit 8 Limit Common 9 Encoder Common 10 Marker N 11 Sine N 12 Cosine N 13 Reserved 14 Reserved 15 Reserved 16 Motor 17 Motor 18 Reserved 19 Reserved 20 Positive CW hardware limit 21 Reserved 22 Encoder 5 V 23 Marker 24 Sine 25 Cosine Case Signal shield connection to case 1 Vacuum stages require a double male bulkhead adapter through the vacuum chamber wall to mate to our standard ...

Страница 25: ... 8 Reserved 9 Reserved 10 Motor Return 11 Motor Phase A 12 Motor Phase B 13 Reserved 14 Reserved 15 Reserved 16 Reserved 17 Encoder 5 V 18 Stage ID 19 Positive CW hardware limit 20 Reserved 21 Reserved 22 Motor Return 23 Motor Phase A 24 Motor Phase B 25 Reserved Case Signal shield connection to case Table 3 5 25 Pin D Motor Mating Connector M2 Mating Connector Aerotech P N Third Party P N Backshe...

Страница 26: ...W hardware limit 8 Limit Common 9 Encoder Common 10 Reserved 11 Reserved 12 Reserved 13 Reserved 14 Reserved 15 Motor Phase B 16 Motor Phase A 17 Motor Return 18 Reserved 19 Reserved 20 Positive CW hardware limit 21 Reserved 22 Encoder 5 V 23 Reserved 24 Reserved 25 Reserved Case Signal shield connection to case 1 Vacuum stages require a double male bulkhead adapter through the vacuum chamber wall...

Страница 27: ...ual Electrical Specifications and Installation 3 2 Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 Motor and Feedback Wiring M1 Option www aerotech com Chapter 3 27 ...

Страница 28: ...Electrical Specifications and Installation MPS50SV Hardware Manual Figure 3 2 Motor and Feedback Wiring M2 Option 28 Chapter 3 www aerotech com ...

Страница 29: ...rent 25 mA Output Type Open Collector Output Voltage 5 V Output Current 10 mA sinking Output Polarity Normally Closed NC l Sinks current to ground Logic 0 when not in limit l High impedance Logic 1 when in limit l Requires external pull up to 5 V 10 kΩ recommended Notes l If the MPS50SV is driven beyond the electrical limit it will encounter a mechanical stop Impacting the mechanical stop could ca...

Страница 30: ... 0036 N m Gear Ratio 676 49 Table 3 9 Stepper Motor Specifications Stepper Motor M2 Stall Torque 0 0036 N m Rated Phase Current 0 15 A Recommended Bus Voltage 24 V Rotor Inertia 4 50E 08 kg m2 Full Step Angle 15 Phase Resistance 35 Ohm Phase Inductance 0 0165 H Maximum Speed 2600 rpm Gear Ratio 2704 63 W A R N I N G The motor case temperature may exceed 75 C Table 3 10 Encoder Specifications DC Mo...

Страница 31: ...back and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while machine direction is hardwired in the stage Figure 3 3 shows the machine direction of MPS50SV stages Figure 3 3 Machin...

Страница 32: ...fications and Installation MPS50SV Hardware Manual 3 5 Motor and Feedback Phasing Figure 3 4 Analog Encoder Phasing Reference Diagram Figure 3 5 Encoder Phasing Reference Diagram Standard 32 Chapter 3 www aerotech com ...

Страница 33: ...ps for the application Longer or shorter intervals may be required to maintain the film of lubricant on the bearing surfaces If the application process uses only a small portion of travel for most of the duty cycle periodically drive the stage through full travel to redistribute the lubrication in the bearings and drive screw The drive screw end bearings and motor bearings are sealed and should no...

Страница 34: ...the factory In addition a laser interferometer is required for post assembly verification to maintain warranties Contact Aerotech for more information Cleaning Before using a cleaning solvent on any part of the MPS50SV blow away small particles and dust with nitrogen or less preferably clean dry compressed air Any external metal surface of the MPS50SV can be cleaned with isopropyl alcohol on a lin...

Страница 35: ...n XY XZ or YZ system will alter a precision alignment Do not remove the upper axis for lubrication and cleaning if possible 1 Drive the carriage to one end of travel and remove power from the stage 2 Blow off the interior of the stage with clean dry compressed air or nitrogen 3 Remove all dirty or dried lubricant from the drive screw and the precision rail guides Use a small application of isoprop...

Страница 36: ...y requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Chapter 3 and Controller documentation Motor Connections refer to Chapter 3 and the Controller documentation Stage oscillates or squeals Gains misadjusted refer to the Controller documentation Encoder signals refer...

Страница 37: ... such approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotech com Products must be returned prepaid to an Aerotech service center no C O D or Collect Freight accepted The status of any product returned later than thir...

Страница 38: ...ms and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased replacement parts and cannot be returned to the Aerotech service center for repair then the following field service policy applies Aerotech will provide an on site Field Service Representative in a rea...

Страница 39: ...MPS50SV Hardware Manual Revision History Appendix B Revision History Revision General Information 1 00 00 New Manual www aerotech com Appendix B 39 ...

Страница 40: ...Revision History MPS50SV Hardware Manual 40 Appendix B www aerotech com This page intentionally left blank ...

Страница 41: ...opyl alcohol 34 L Limit Switch Specifications 29 lubricants vacuum operation 14 Lubrication 35 M Mechanical Specifications 13 model numbers 15 mounting surface cleaning 18 securing stage 18 multiaxis combinations 34 N NSK LG2 grease 35 O orthogonality 34 P Payload 19 Protection Rating 12 S Securing the Stage to the Mounting Surface 18 Service Schedule 33 shimming 18 solvents 34 Specifications 13 s...

Страница 42: ...Index MPS50SV Hardware Manual 42 Index www aerotech com This page intentionally left blank ...

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