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Revision 2.01

ANT95LZ Series Single-Axis Z Direct-Drive

Nanopositioning Stage

HARDWARE MANUAL

Содержание ANT95LZ Series

Страница 1: ...Revision 2 01 ANT95LZ Series Single Axis Z Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...irements 20 Chapter 2 Installation 21 2 1 Dimensions 21 2 2 Securing the Stage to the Mounting Surface 23 2 2 1 Setting up the Pneumatic Counterbalance 25 2 3 Attaching the Payload to the Stage 27 Cha...

Страница 4: ...umatics Cylinder Clearance 24 Figure 2 4 Counterbalance Pressure vs External Payload 25 Figure 2 5 Load Orientations 28 Figure 2 6 Cantilevered Load Capabilities 29 Figure 3 1 ANT95LZ Motor and Feedba...

Страница 5: ...24 Table 2 3 Payload to Stage Surface Hardware 27 Table 3 1 25 Pin Motor and Feedback Connector Pinout 33 Table 3 2 25 Pin Mating Connector Part Numbers 33 Table 3 3 Hall Effect Sensor Specifications...

Страница 6: ...This page intentionally left blank List of Tables ANT95LZ Hardware Manual 6 www aerotech com...

Страница 7: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 8: ...the product is used in a manner not specified by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and...

Страница 9: ...nt l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or operate equipme...

Страница 10: ...connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of th...

Страница 11: ...ch environmental specifications DANGER Mechanical Hazard Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage l When the system is not electrically...

Страница 12: ...al Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all...

Страница 13: ...magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace makers for...

Страница 14: ...e updates Locate this label and record the information for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All...

Страница 15: ...ent unwanted motion damage that could occur during shipment The brackets must be removed before the ANT95LZ can be operated Retain the brackets and hardware for future use DANGER Mechanical Hazard l T...

Страница 16: ...This page intentionally left blank Handling and Storage ANT95LZ Hardware Manual 16 www aerotech com...

Страница 17: ...ning Stage Travel Required 025 25 mm travel 050 50 mm travel Feedback Required E1 Incremental linear encoders 1 Vpp amplified sine output E2 Incremental linear encoders digital RS422 output 5 nm elect...

Страница 18: ...vibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These stages are not...

Страница 19: ...ty is reported as 3 sigma value requires a 1 Vpp encoder 3 Payload specifications assume that the payload is centered on axis 4 Specifications are for single axis systems measured 25 mm above the tabl...

Страница 20: ...d l If compressed air is used it must be filtered to 0 25 microns dry to 0 F dew point and oil free The maximum allowable input pressure specification is 0 6 MPa 87 psi The low friction air cylinder c...

Страница 21: ...h the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ANT95LZ 0...

Страница 22: ...Figure 2 2 ANT95LZ 025 Dimensions 2 1 Dimensions ANT95LZ Hardware Manual 22 www aerotech com...

Страница 23: ...alcohol and allow the cleaning solvent to completely dry Gently place the stage on the mounting surface IMPORTANT The stage is precision machined and verified for flatness prior to product assembly a...

Страница 24: ...r your mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M4 SHCS mounting bracket 2 0 N m...

Страница 25: ...of the carriage plus the additional mass Any adjustment to the mass that is carried by the counterbalance cylinders either adding or subtracting payload necessitates an adjustment to the counterbalan...

Страница 26: ...balance cylinder 4 Slowly increase pressure to the cylinder clockwise rotation of the regulator knob until the carriage just starts to rise Adjust the pressure with the regulator such that when you mo...

Страница 27: ...id and comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 5 m WARNING General Hazard Warning Be care...

Страница 28: ...rm that all electrical power is disconnected before you make any mechanical adjustments 3 Make sure that the shipping bracket is removed from the stage 4 Adjust the air supply pressure until the table...

Страница 29: ...Figure 2 6 Cantilevered Load Capabilities ANT95LZ Hardware Manual 2 3 Attaching the Payload to the Stage www aerotech com 29...

Страница 30: ...This page intentionally left blank 2 3 Attaching the Payload to the Stage ANT95LZ Hardware Manual 30 www aerotech com...

Страница 31: ...iance requirements when they integrate the ANT95LZ into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Страница 32: ...tion only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for...

Страница 33: ...r Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted stage travel in the...

Страница 34: ...r and Feedback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT95LZ Motor and Feedback Wiring 3 2 Motor and Feedback Wiring ANT95LZ Hardware Manual 34 www aero...

Страница 35: ...ntial Incremental Encoder l Analog SIN SIN COS COS 1V pk pk into 120 terminations l Digital RS422 MRK MRK signals into 120 terminations Digital Output Incremental Encoder RS422 485 compatible Table 3...

Страница 36: ...dependent upon heat sink configuration system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat s...

Страница 37: ...y the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while m...

Страница 38: ...otor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing Diagram 3 5 Motor and Feedback Phasing ANT95LZ Hardware Manual 38 www aerotec...

Страница 39: ...igure 3 4 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 5 Encoder Phasing Reference Diagram Analog Sine Wave ANT95LZ Hardware Manual 3 5 Motor and Feedback Phasing www aerotech com 3...

Страница 40: ...This page intentionally left blank 3 5 Motor and Feedback Phasing ANT95LZ Hardware Manual 40 www aerotech com...

Страница 41: ...longer or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually in...

Страница 42: ...d lubricants will be required When you clean and or lubricate components of the ANT95LZ series stage 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solvent...

Страница 43: ...annels of the linear bearing rails l Use a clean lint free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubrica...

Страница 44: ...compatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Ch...

Страница 45: ...ation RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerote...

Страница 46: ...l rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site...

Страница 47: ...Revision Description 2 01 Safety information updated 2 00 l Product update to Gen 2 version of ANT95LZ l Declaration of Conformity updated 1 00 New manual ANT95LZ Hardware Manual Appendix B Revision...

Страница 48: ...This page intentionally left blank Appendix B Revision History ANT95LZ Hardware Manual 48 www aerotech com...

Страница 49: ...ng 14 Humidity 18 I Inspection Schedule 41 isopropyl alcohol 42 L label 14 15 Limit Switch Specifications 35 Lubrication 43 M Motor Related Warnings 11 mounting surface cleaning 23 27 securing stage 2...

Страница 50: ...Thermistor Specifications 35 Troubleshooting 44 V Vibration 18 W Warnings 8 Warranty and Field Service 45 Index ANT95LZ Hardware Manual 50 www aerotech com...

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