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ANT20G Hardware Manual

Index

Index

2010

Altitude

Ambient Temperature

Braycote® 602EF

Cleaning

cleaning solvent

EN 60204-1

EN ISO 12100

Encoder Specifications

Global Technical Support

grease

13,35

Hall-Effect Sensors Specifications

Humidity

inspect

inspection schedule

isopropyl alcohol

Kluberplex BEM 34-132

label

Limit Switch Specifications

lubricants

vacuum operation

Lubrication

lubrication schedule

mounting surface

multiaxis combinations

orthogonality

part number

Protection Rating

protective ground connection

serial number

service schedule

Shimming

Shipping Clamps

solvents

stabilize

stage distortion

Support

Technical Support

vacuum

vacuum guidelines

Vibration

Warranty and Field Service

www.aerotech.com

Index

Содержание ANT20G Series

Страница 1: ...Revision 1 01 00 ANT20G Hardware Manual...

Страница 2: ...vice aerotech com 101 Zeta Drive Pittsburgh PA 15238 2811 www aerotech com United Kingdom Japan Phone 44 0 1256 855055 Fax 44 0 1256 855649 Email service aerotech co uk Phone 81 0 50 5830 6814 Fax 81...

Страница 3: ...1 Unpacking and Handling the Stage 15 2 2 Dimensions 16 2 3 Securing the Stage to the Mounting Surface 20 2 4 Attaching the Payload to the Stage 21 Chapter 3 Electrical Specifications and Installatio...

Страница 4: ...NT20G 050 Dimensions 16 Figure 2 3 ANT20G 090 Dimensions 17 Figure 2 4 ANT20G 110 Dimensions 18 Figure 2 5 ANT20G 160 Dimensions 19 Figure 2 6 Mounting Hole Pattern 20 Figure 3 1 Motor and Feedback Wi...

Страница 5: ...tions 10 Table 1 3 ANT20G Series Specifications 050 and 090 11 Table 1 4 ANT20G Series Specifications 110 and 160 12 Table 2 1 Stage to Mounting Surface Hardware 20 Table 3 1 Motor and Feedback Pinout...

Страница 6: ...ety requirements 5 Operator safeguarding requirements must be addressed during final integration of the product W A R N I N G To minimize the possibility of electrical shock bodily injury or death the...

Страница 7: ...more declares that it is not allowed to put the equipment into service until the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in...

Страница 8: ...Table of Contents ANT20G Hardware Manual 8 www aerotech com This page intentionally left blank...

Страница 9: ...r the most up to date information Table 1 1 ANT20G Model Numbering System ANT Series Vertical Travel Stage Radius of Rotation Required 050 50 mm radius of rotation 090 90 mm radius of rotation 110 110...

Страница 10: ...ironment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating The ANT20G stages are not suited f...

Страница 11: ...idirectional Repeatability 5 rad 1 arc sec 5 rad 1 arc sec Tilt Error Motion 90 rad 18 arc sec 50 rad 10 arc sec Maximum Speed 150 degrees per second Maximum Acceleration 1200 rad s2 500 rad s2 Settli...

Страница 12: ...to Figure Figure 1 1 In Position Stability 2 0 2 rad 0 04 arc sec 0 15 rad 0 03 arc sec Nominal Radius of Rotation 110 mm 160 mm Height from Tabletop to Rotation Point 76 2 mm 120 4 mm Maximum Torque...

Страница 13: ...s to prevent any contaminants from adhering to the surface of the ANT20G 3 During installation use cleaned vented stainless steel fasteners when securing the ANT20G 4 Reduced air pressure eliminates s...

Страница 14: ...Overview ANT20G Hardware Manual 14 Chapter 1 www aerotech com This page intentionally left blank...

Страница 15: ...hipping container Gently set the ANT20G on a smooth flat and clean surface Before operating the ANT20G it is important to let it stabilize at room temperature for at least 12 hours Allowing it to stab...

Страница 16: ...Mechanical Specifications and Installation ANT20G Hardware Manual 2 2 Dimensions Figure 2 2 ANT20G 050 Dimensions 16 Chapter 2 www aerotech com...

Страница 17: ...ANT20G Hardware Manual Mechanical Specifications and Installation Figure 2 3 ANT20G 090 Dimensions www aerotech com Chapter 2 17...

Страница 18: ...Mechanical Specifications and Installation ANT20G Hardware Manual Figure 2 4 ANT20G 110 Dimensions 18 Chapter 2 www aerotech com...

Страница 19: ...ANT20G Hardware Manual Mechanical Specifications and Installation Figure 2 5 ANT20G 160 Dimensions www aerotech com Chapter 2 19...

Страница 20: ...surface N OTE To maintain accuracy the mounting surface must be flat to within 5 m N OTE The ANT20G is precision machined and verified for flatness prior to product assembly at the factory If machinin...

Страница 21: ...motion control system in accordance with the system documentation Document all results for future reference For information on electrical installation refer to Chapter 3 and the documentation deliver...

Страница 22: ...Mechanical Specifications and Installation ANT20G Hardware Manual 22 Chapter 2 www aerotech com This page intentionally left blank...

Страница 23: ...stem level integration was purchased an electrical drawing showing system interconnects has been supplied with the system separate from this documentation The electrical wiring from the motor and enco...

Страница 24: ...Integrator or qualified installer is responsible for determining and meeting all safety and compliance requirements necessary for the integration of this stage into the final application D A N G E R...

Страница 25: ...mit 8 Hall Effect sensor phase A 9 Hall Effect sensor phase C 10 Frame ground 11 Motor A 12 Motor B 13 Motor C 14 Cosine 15 Sine 16 Marker 17 5 V supply input for feedback devices 18 Reserved 19 Posit...

Страница 26: ...Electrical Specifications and Installation ANT20G Hardware Manual 3 2 Motor and Feedback Wiring Figure 3 1 Motor and Feedback Wiring 26 Chapter 3 www aerotech com...

Страница 27: ...Vpk pk into 120 Load differential signals SIN SIN COS COS are 5 V pk pk relative to ground Limit Switch Specifications Supply Voltage 5 V Supply Current 25 mA Output Type Open Collector Output Voltag...

Страница 28: ...Bus Voltage VDC 80 80 80 80 Mechanical Specifications 5 Motor Radius mm in 50 00 1 97 90 00 3 54 110 00 4 33 160 00 6 30 Magnetic Pole Pitch degree 22 4 11 3 9 6 1 Performance is dependent upon heat s...

Страница 29: ...ack and motor signals and is dictated by the stage wiring refer to Section 3 5 for Motor and Feedback phasing information Programming direction of a stage is set by the controller that is used to move...

Страница 30: ...pecifications and Installation ANT20G Hardware Manual 3 5 Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 3 Hall Phasing 30 Chapter 3 www a...

Страница 31: ...ANT20G Hardware Manual Electrical Specifications and Installation Figure 3 4 Analog Encoder Phasing Reference Diagram www aerotech com Chapter 3 31...

Страница 32: ...Electrical Specifications and Installation ANT20G Hardware Manual 32 Chapter 3 www aerotech com This page intentionally left blank...

Страница 33: ...e speed and environment In general stages operating in a clean environment should be cleaned and lubricated annually or every 500 km whichever comes first For stages operating under conditions involvi...

Страница 34: ...sembled W A R N I N G Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory In addition a laser interferometer is required for pos...

Страница 35: ...d lubricant from the v channels of the bearing rails Use a clean lint free cloth with a side to side motion Use a swab soaked in isopropyl alcohol to remove stubborn debris 4 Using a grease syringe ap...

Страница 36: ...larity and compatibility requirements Example voltage requirements l Controller trap or fault refer to controller documentation Stage moves uncontrollably l Encoder sine and cosine signal connections...

Страница 37: ...uch approval A Return Materials Authorization RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate req...

Страница 38: ...and conditions stated in the following On Site Non Warranty Repair section apply On site Non Warranty Repair If any Aerotech product cannot be made functional by telephone assistance or purchased rep...

Страница 39: ...Hardware Manual Revision History Appendix B Revision History Revision General Information 1 01 00 l Product update l Updated dimension drawings Section 2 2 1 00 00 New manual www aerotech com Appendi...

Страница 40: ...Revision History ANT20G Hardware Manual 40 Appendix B www aerotech com This page intentionally left blank...

Страница 41: ...ohol 34 K Kluberplex BEM 34 132 35 L label 15 Limit Switch Specifications 27 lubricants vacuum operation 13 Lubrication 35 lubrication schedule 33 M mounting surface 20 multiaxis combinations 34 O ort...

Страница 42: ...Index ANT20G Hardware Manual 42 Index www aerotech com This page intentionally left blank...

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