Maintenance
ANT20G Hardware Manual
4.2. Cleaning and Lubrication
D A N G E R : To minimize the possibility of bodily injury or death, disconnect all electrical
power prior to performing any maintenance or making adjustments to the equipment.
W A R N I N G : In applications that have multiple stages bolted together to form multi-axis
systems, the orthogonality may be lost if the stage tables of the support stages are loosened.
Precision aligned stages should not be loosened or disassembled.
W A R N I N G : Further disassembly of the stage is not recommended because proper
assembly and calibration can only be done at the factory. In addition, a laser interferometer is
required for post assembly verification to maintain warranties. Contact Aerotech for more
information.
Cleaning
Before using a cleaning solvent on any part of the ANT20G, blow away small particles and dust with nitrogen
or, less preferably, clean, dry, compressed air.
Any external metal surface of the ANT20G can be cleaned with isopropyl alcohol on a lint-free cloth.
W A R N I N G : Make sure that all solvent has completely evaporated before attempting to
move the stage.
34
Chapter 4
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Содержание ANT20G Series
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