Aerotech ANT20G Series, Руководство по оборудованию

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Overview ANT20G Hardware Manual
Table 1-4: ANT20G Series Specifications (-110 and -160)
Model -110 -160
Rotation Angle 20° 20°
Accuracy
(1)
±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Resolution (Minimum Incremental Motion) 0.25 µrad (0.05 arc sec) 0.25 µrad (0.05 arc sec)
Bidirectional Repeatability
(1)
±10 µrad (±2 arc sec) ±10 µrad (±2 arc sec)
Unidirectional Repeatability ±5 µrad (±1 arc sec) ±5 µrad (±1 arc sec)
Tilt Error Motion ±40 µrad (±8 arc sec) ±30 µrad (±6 arc sec)
Maximum Speed 150 degrees per second
Maximum Acceleration
375 rad/s
2
250 rad/s
2
Settling Time Refer to Figure Figure 1-1
In-Position Stability
(2)
±0.2 µrad (±0.04 arc sec) ±0.15 µrad (±0.03 arc sec)
Nominal Radius of Rotation 110 mm 160 mm
Height from Tabletop to Rotation Point 76.2 mm 120.4 mm
Maximum Torque (Continuous) 1.00 N·m 2.40 N·m
Load Capacity
Axial 2.0 kg 3.5 kg
Moment 80 kg·mm 140 kg·mm
Stage Mass 1.2 kg (2.6 lb) 1.6 kg (3.5 lb)
Material Aluminum
MTBF (Mean Time Between Failure) 30,000 Hours
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent.
Consult factory for multi-axis or non-standard applications.
Figure 1-1: Step and Settle Performance
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