Aerotech ANT130V-5, Руководство по оборудованию

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ANT95V-3 Hardware Manual Mechanical Specifications and Installation
2.5. Attaching the Payload to the Stage
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Clean the mounting
surface with a lint free cloth and acetone or isopropyl alcohol and allow the cleaning solvent to completely
dry.
To prevent damage to the payload or stage, test the operation of the stage before the payload is attached.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation and test the motion control
system in accordance with the system documentation. Document all results for future reference. For
information on electrical installation refer to
Chapter 3 and the documentation delivered with the stage.
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
N O T E : If your ANT95V-3 was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ANT95V-3 is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
If Aerotech specifically adjusted the servo loop gains to the payload weight prior to shipment, the payload
might be required to ensure proper servo operation. The ANT95V-3 is designed to carry no more than 1 kg.
N O T E : For valid system performance, the mounting interface should be flat within 10 µm.
W A R N I N G : Refer to the dimensions in Section 2.3. for maximum allowable thread
engagement. A screw extending through the stage table can affect travel and damage the
stage. Do not let mounting screws project more than 7 mm (.276") into the stage table top.
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