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Aerotech ANT130LZS Series, Руководство по оборудованию

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Index

2

2006/42/EC

6

2011/65/EU

6

A

Acceleration

17

Accuracy

17

Accuracy and Temperature Effects

16

Accuracy of the Ballscrew

16

air

nitrogen

18

Altitude

16

Ambient Temperature

16

Attaching the Payload

25

C

cleaning

mounting surface

21,25

Cleaning

42

cleaning solvent

42

compressed air

18

D

Dimensions

19

Directive 2006/42/EC

6

E

Electrical Installation

29

Electrical Warnings

9

EN 60204-1 2010

6

EN ISO 12100 2010

6

Encoder Specifications

36

EU 2015/863

6

F

Flatness

17

H

Hall-Effect Sensors Specifications

36

Handling

13

Humidity

16

I

In-Position Stability

17

Inspection Schedule

41

isopropyl alcohol

42

L

label

13-14

Limit Switch Specifications

36

Load Capacity

17

Lubrication

43

M

Motor-Related Warnings

10

mounting surface

cleaning

21,25

securing stage

21

Moving Mass

17

multiaxis combinations

42

N

nitrogen

18

P

packing list

13

part number

13-14

Pitch

17

Possible Cause

45

Protection Rating

16

protective ground connection

30

R

Repeatability

17

Resolution

17

Roll

17

S

serial number

13-14

shimming

21

Solution

45

solvents

42

ANT130LZS Hardware Manual

Index

www.aerotech.com

51

Содержание ANT130LZS Series

Страница 1: ...Revision 2 00 ANT130LZS Series Single Axis Z Low Profile Direct Drive Nanopositioning Stage HARDWARE MANUAL...

Страница 2: ...spare or replacement parts To get help immediately contact a service office or your sales representative Include your customer order number in your email or have it available before you call This man...

Страница 3: ...Chapter 2 Installation 19 2 1 Dimensions 19 2 2 Securing the Stage to the Mounting Surface 21 2 2 1 Setting up the Pneumatic Counterbalance 23 2 3 Attaching the Payload to the Stage 25 Chapter 3 Elect...

Страница 4: ...ce Pressure vs External Payload 23 Figure 2 5 Load Orientations 26 Figure 2 6 Cantilevered Load Capabilities 27 Figure 3 1 ANT130LZS Motor and Feedback Wiring CN1 Option 34 Figure 3 2 ANT130LZS Motor...

Страница 5: ...2 25 Pin Mating Connector Part Numbers 31 Table 3 3 4 Pin Motor Connector Pinout CN2 Option 32 Table 3 4 4 Pin Motor Mating Connector Part Numbers 32 Table 3 5 25 Pin Feedback Connector Pinout CN2 Op...

Страница 6: ...the machinery into which it is to be incorporated or of which it is to be a component has been found and declared to be in conformity with the provisions of the Directive 2006 42 EC and with national...

Страница 7: ...he product is used in a manner not specified by the manufacturer l The protection provided by the equipment could be impaired l The life expectancy of the product could be decreased Safety notes and s...

Страница 8: ...l All service and maintenance must be done by approved personnel l Use this product only in environments and operating conditions that are approved in this manual l Never install or operate equipment...

Страница 9: ...connect or disconnect stage motor interconnections while connected to a live electrical power source l Before you set up or do maintenance disconnect electrical power l It is the responsibility of th...

Страница 10: ...h environmental specifications DANGER Mechanical Hazard Personnel must be made aware of the mechanical hazards during set up or when you do service to the stage l When the system is not electrically e...

Страница 11: ...l Hazard l System travel can cause crush shear or pinch injuries l Only trained operators should operate this equipment l Do not put yourself in the travel path of machinery l Restrict access to all m...

Страница 12: ...magnet track components If you do so you will expose your self to mechanical crush pinch or impact hazards l Magnetic fields could interfere with external or internal medical devices pace makers for e...

Страница 13: ...mation for later reference Unpacking and Handling It is the responsibility of the customer to safely and carefully lift and move the stage IMPORTANT All electronic equipment and instrumentation is wra...

Страница 14: ...can be operated Retain the brackets and hardware for future use DANGER Mechanical Hazard l The product can move manually without electrical power connected l When the shipping brackets are removed the...

Страница 15: ...ed sine output E2 Incremental linear encoders digital RS422 output 5 nm electrical resolution E4 Incremental linear encoders 1 Vpp amplified sine output high performance Connectors Required CN1 Integr...

Страница 16: ...ibration environment Excessive floor or acoustical vibration can affect system performance Contact Aerotech for information regarding your specific application Protection Rating These stages are not s...

Страница 17: ...each stage 2 Requires the selection of an applicable amplifier with sufficient voltage and current 3 In position stability is reported as 3 sigma value requires a 1 Vpp encoder 4 Payload specification...

Страница 18: ...l If compressed air is used it must be filtered to 0 25 microns dry to 0 F dew point and oil free The maximum allowable input pressure specification is 0 6 MPa 87 psi The low friction air cylinder co...

Страница 19: ...h the instructions provided by this manual and any accompanying documentation Failure to follow these instructions could result in injury or damage to the equipment 2 1 Dimensions Figure 2 1 ANT130LZS...

Страница 20: ...Figure 2 2 Mounting Plate MP Dimensions 2 1 Dimensions ANT130LZS Hardware Manual 20 www aerotech com...

Страница 21: ...atness it should be performed on the mounting surface rather than the stage Shimming should be avoided if possible If shimming is required it should be minimized to retain maximum rigidity of the syst...

Страница 22: ...typical values and may not be accurate for your mounting surface Refer to Section 2 1 for mounting locations and dimensions Table 2 2 Stage to Mounting Surface Hardware Mounting Hardware Typical Scre...

Страница 23: ...arriage plus the additional mass Any adjustment to the mass that is carried by the counterbalance cylinders either adding or subtracting payload necessitates an adjustment to the counterbalance pressu...

Страница 24: ...alance cylinder 4 Slowly increase pressure to the cylinder clockwise rotation of the regulator knob until the carriage just starts to rise Adjust the pressure with the regulator such that when you mov...

Страница 25: ...id and comparable to the stage in quality to maintain optimum performance IMPORTANT For valid system performance the mounting interface should be flat within 7 5 m WARNING General Hazard Warning Be ca...

Страница 26: ...irm that all electrical power is disconnected before you make any mechanical adjustments 3 Make sure that the shipping bracket is removed from the stage 4 Adjust the air supply pressure until the tabl...

Страница 27: ...Figure 2 6 Cantilevered Load Capabilities ANT130LZS Hardware Manual 2 3 Attaching the Payload to the Stage www aerotech com 27...

Страница 28: ...This page intentionally left blank 2 3 Attaching the Payload to the Stage ANT130LZS Hardware Manual 28 www aerotech com...

Страница 29: ...nce requirements when they integrate the ANT130LZS into a completed system Electrical installation requirements will depend on the ordered product options Installation instructions in this section are...

Страница 30: ...tion only Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized The System Integrator or qualified installer is responsible for...

Страница 31: ...or Phase C 14 COS Encoder Cosine 15 SIN Encoder Sine 16 MRK Encoder Marker 17 5V Power Supply Input 18 Reserved 19 CW LMT End of travel limit signal that indicates maximum permitted stage travel in th...

Страница 32: ...Reserved 4 Reserved 5 Reserved A4 Frame Ground motor protective ground Table 3 4 4 Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P N Third Party P N Backshell ECK00656 Amphenol 17E...

Страница 33: ...r machine clockwise direction 13 Reserved 14 COS Encoder Cosine 15 COS Encoder Cosine 16 5V Power Supply Input 17 SIN Encoder Sine 18 SIN Encoder Sine 19 Reserved 20 Common ground 21 Common ground 22...

Страница 34: ...edback Wiring Shielded cables are required for the motor and feedback connections Figure 3 1 ANT130LZS Motor and Feedback Wiring CN1 Option 3 2 Motor and Feedback Wiring ANT130LZS Hardware Manual 34 w...

Страница 35: ...Figure 3 2 ANT130LZS Motor and Feedback Wiring CN2 Option ANT130LZS Hardware Manual 3 2 Motor and Feedback Wiring www aerotech com 35...

Страница 36: ...al Incremental Encoder l Analog SIN SIN COS COS 1V pk pk into 120 terminations l Digital RS422 MRK MRK signals into 120 terminations Digital Output Incremental Encoder RS422 485 compatible Table 3 10...

Страница 37: ...n system cooling conditions and ambient temperature 2 Values shown 100 C rise above a 25 C ambient temperature with motor mounted to the specified aluminum heat sink 3 Peak force assumes correct rms c...

Страница 38: ...the stage wiring refer to Section 3 2 Programming direction of a stage is set by the controller that is used to move the stage Programming direction is typically selectable in the controller while mac...

Страница 39: ...tor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point Figure 3 4 Hall Phasing Diagram ANT130LZS Hardware Manual 3 5 Motor and Feedback Phasing www aerotech...

Страница 40: ...gure 3 5 Encoder Phasing Reference Diagram Standard Square Wave Figure 3 6 Encoder Phasing Reference Diagram Analog Sine Wave 3 5 Motor and Feedback Phasing ANT130LZS Hardware Manual 40 www aerotech c...

Страница 41: ...onger or shorter inspection interval will depend on the application and conditions such as the duty cycle speed and environment Monthly inspections should include but not be limited to l Visually insp...

Страница 42: ...ubricants will be required When you clean and or lubricate components of the ANT130LZS series stage 1 Be sure to use a clean dry soft lint free cloth for cleaning 2 Before you use a cleaning solvent o...

Страница 43: ...annels of the linear bearing rails l Use a clean lint free cloth with a side to side motion l Use a swab soaked in Isopropyl Alcohol to remove stubborn debris 4 Apply a thin continuous film of lubrica...

Страница 44: ...ystem is balanced per the instructions in Section 2 2 1 Setting up the Pneumatic Counterbalance The mechanical components are aligned at the factory during assembly and are not intended to be user adj...

Страница 45: ...ompatibility requirements Example voltage requirements Controller trap or fault refer to the Controller documentation Stage moves uncontrollably Encoder sine and cosine signal connections refer to Cha...

Страница 46: ...This page intentionally left blank 4 4 Troubleshooting ANT130LZS Hardware Manual 46 www aerotech com...

Страница 47: ...tion RMA number must accompany any returned product s The RMA number may be obtained by calling an Aerotech service center or by submitting the appropriate request available on our website www aerotec...

Страница 48: ...rates apply If during the on site repair it is determined the problem is not warranty related then the terms and conditions stated in the following On Site Non Warranty Repair section apply On site N...

Страница 49: ...n Description 2 00 l Declaration of Conformity updated l Product update to Gen 2 version l Safety information updated 1 01 General product update 1 00 New Manual ANT130LZS Hardware Manual Appendix B R...

Страница 50: ...This page intentionally left blank Appendix B Revision History ANT130LZS Hardware Manual 50 www aerotech com...

Страница 51: ...6 EU 2015 863 6 F Flatness 17 H Hall Effect Sensors Specifications 36 Handling 13 Humidity 16 I In Position Stability 17 Inspection Schedule 41 isopropyl alcohol 42 L label 13 14 Limit Switch Specific...

Страница 52: ...stage 13 stage distortion 21 stabilizing 13 Stage Mass 17 Storage 13 Straightness 17 Symptom 45 T Table of Contents 3 Temperature Effects 16 Thermistor Specifications 36 Travel 17 Troubleshooting 45 V...

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