Aerotech ANT130LZS Series, Руководство по оборудованию

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1.3. Basic Specifications
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZS Series Specifications
ANT130LZS-
035
ANT130LZS-
060
ANT130LZS-
110
ANT130LZS-
160
Travel 35 mm 60 mm 110 mm 160 mm
Accuracy
(1)
-PL1 ±2.5 µm ±2.5 µm ±3 µm ±4 µm
-PL2 (-E1, -E2) ±275 nm ±275 nm ±300 nm ±300 nm
-PL2 (-E4) ±175 nm ±175 nm ±200 nm ±200 nm
Bidirectional Repeatability
(1)
±75 nm
Resolution (Minimum
Incremental Motion)
-E1 2 nm
-E4 1 nm
Straightness
(1)
±1.5 µm ±1.5 µm ±1.5 µm ±2 µm
Flatness
(1)
±1.5 µm ±1.5 µm ±1.5 µm ±2 µm
Pitch 10 arc sec
Roll 10 arc sec
Yaw 5 arc sec
Maximum Speed
(2)
-E1, -E4 200 mm/s
-E2 145 mm/s
Maximum Acceleration (No Load)
(2)
1 g
In-Position Stability
(3)
-E1 <2 nm
-E4 <1 nm
Load Capacity (Vertical)
(4)
14.0 kg
Moving Mass 1.5 kg 1.6 kg 2.1 kg 2.5 kg
Stage Mass 3.2 kg 3.6 kg 4.5 kg 5.3 kg
Material Anodized Aluminum
Mean Time Between Failure 30,000 Hours
1. Certified with each stage.
2. Requires the selection of an applicable amplifier with sufficient voltage and current.
3. In-position stability is reported as 3-sigma value (requires a 1 Vpp encoder).
4. Payload specifications assume that the payload is centered on-axis.
5. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system depend
upon the payload and workpoint. Consult the Aerotech factory for multi-axis or non-standard applications.
6. -PL2 performance requires the use of an Aerotech controller.
7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental
temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information.
8. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better.
Use nitrogen at 99.9% purity for best results. Supply pressure is determined by the amount of payload carried by the stage.
ANT130LZS Hardware Manual 1.3. Basic Specifications
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