Aerotech ABL1500Z, Руководство по оборудованию

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Mechanical Specifications and Installation ABL1500Z Hardware Manual
2.4. Attaching the Payload to the Stage
To prevent damage to the payload or stage, test the operation of the stage before the payload is attached.
Aerotech recommends that customers use a representative payload during start-up to prevent accidental
damage to the stage and the payload. Proceed with the electrical installation (including setting up the
pneumatic counterbalance) and test the motion control system in accordance with the system
documentation. Document all results for future reference. For information on electrical installation refer to
Chapter 3 and the documentation delivered with the stage.
N O T E : If your ABL1500Z was purchased with Aerotech controls, it might have been tuned with a
representative payload based on the information provided at the time of order. If the ABL1500Z is started
up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and
servo instability can occur. Refer to the controller help file for tuning assistance.
The payload must be flat, rigid, and comparable to the stage in quality to maintain optimum performance.
N O T E : For valid system performance, the mounting interface should be flat within 2.5 µm.
Load Capability
Applied loads should be symmetrically distributed whenever possible (i.e., the payload should be centered
on the stage table and the entire stage should be centered on the support structure).
If cantilevered loads are applied, refer to Figure 1-7 and Figure 1-8 to find the maximum allowable load.
Figure 1-9 shows the orientation of “pitch” and “yaw” loading.
Figure 2-4: Cantilevered Load Capability (Pitch) for Various Peak Accelerations
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