Pfeiffer Vacuum TM 700 DN Operating Instructions Manual Download | Manualshive

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Operating Instructions

EN

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TM 700 DN
PM C01 853

D-35614 Asslar

B

A

DeviceNet

remote

accessory

PV
.can

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TE

P

1

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5

MSD P

LSD

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6

6

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ADDRESS

TM 700 DN

Electronic Drive Unit

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Summary of Contents for TM 700 DN

Page 1: ...original instructions Operating Instructions EN PT 0356 BEN C 1203 TM 700 DN PM C01 853 D 35614Asslar B A DeviceNet remote accessory PV can RATE P 1 2 5 MSD P LSD 0 0 2 2 4 4 6 6 8 ADDRESS TM 700 DN Electronic Drive Unit ...

Page 2: ...ion 10 6 Connection DeviceNet 13 6 1 Connections 13 6 2 Configuring the connection 13 6 3 Configuring the data exchange 14 6 4 LED operation 16 6 5 DeviceNet objects 16 7 The Pfeiffer Vacuum parameter set 25 7 1 General 25 7 2 Parameter overview 25 7 3 Configuring the connections 30 7 4 Operation with the Pfeiffer Vacuum parameter set 31 7 5 Switching on off the pump 37 8 Pfeiffer Vacuum Protocol ...

Page 3: ...stan dards as specified by UL CSA ANSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered Pictograph definitions Instructions in the text Work instruction here you have to do something Abbreviations used DCU Display and control unit HPU Handheld programming unit TC Electronic drive unit for turbopump TPS Mains pack DI DO Digital input di...

Page 4: ...ry measures when installing into ambient conditions which afford other protection classes Keep leads and cables well away from hot surfaces 70 C Only separate the pump and the electronic drive unit from each other after disconnect ing the supply voltage and the complete standstill of the pump NOTE Duty to inform Each person involved in the installation or operation of the unit must read and observ...

Page 5: ...lly radioactive areas NOTE CE conformity The manufacturer s declaration of conformity becomes invalid if the operator modifies the original product or installs additional components Following installation into a plant and before commissioning the operator must check the entire system for compliance with the valid EU directives and reassess it accord ingly warranty seal NOTE Closure seal The produc...

Page 6: ...To correctly identify the product when communicating with Pfeiffer Vacuum always have the information from the rating plate available Scope of delivery CD ROM for DeviceNet connection with EDS files 3 2 Range of application Pfeiffer Vacuum electronic drive units TM 700 DN must be installed and operated in the following ambient conditions Characteristics TM 700 DN Connection voltage TC 48 V DC 5 Co...

Page 7: ...e supply between Pfeiffer Vacuum mains packs and the electronic drive unit TC 1 DC in and accessory are already described in the operating instructions of the tur bopump Accessory M12 socket with screw coupling for the connection of Pfeiffer Vacuum accessories The use of a Y connector enables double assignment of one connection PV can2 M12 casing socket with screw coupling and LED for Pfeiffer Vac...

Page 8: ... V Potential free contacts n c 24VDC Accessory B1 FE Accessory B2 UB 24 48VDC 5 FE GND n c 24VDC Accessory A1 FE Accessory A2 24 VDC out DI Motor pump DI Pumping station DI Standby DI1 DI2 DO1 DO2 DI3 AI 0 10VDC AI GND DI Error acknowledgement DI Remote priority Relay 1 Relay 1 Relay 1 Relay 2 Relay 2 Relay 2 Relay 3 Relay 3 AO1 0 10V DO Remote priority active RS485 D RS485 D GND All inputs and ou...

Page 9: ...x 50 mA 24 V 10 DI3 Sealing gas open off V on 11 AI Rotation speed setting mode GND Set value in rotation speed setting mode GND 12 AO1 Actual rotation speed 0 10 V DC is equivalent to 0 100 RL 10 kΩ 13 DI Error acknowledgement Error acknowledgement V pulse min 500 ms 14 DI Remote priority Control via interface remote open off V set and priority over other digital inputs 15 Relais 1 Connection to ...

Page 10: ...ation remains switched on The turbopump is not vented thereby V Turbopump motor on open Turbopump motor off DI Pumping station Pin 4 Connected pumping station components e g backing pump venting valve air cooling unit are triggered and with Pin 3 motor simultaneously activated the turbopump is placed in operation Any ongoing error messages are reset when their cause has been eliminated V Malfuncti...

Page 11: ...h a maximum of 24 V 50 mA per output All outputs listed below are configurable by the Pfeiffer Vacuum pa rameter set via interface RS 485 description related to factory settings DO1 Rotation speed switch point attained Pin 8 Active high after the rotation speed switch point is attained Rotation speed switch point 1 is factory set to 80 of the nominal rotation speed It can for example be used for a...

Page 12: ...uum display and control panel DCU or HPU or an external PC can be connected respectively to the electronic drive unit via Pin 24 and Pin 25 of the connec tion remote on the electronic drive unit The group address of the electronic drive unit is 964 All units connected to the bus must have differing RS 485 device addresses P 797 Establish the connections according to the specification of the interf...

Page 13: ...address Select desired baud rate Fit rubber plugs at the address selector switches evenly and as deep as possible to achieve the stated protection class Device address The DeviceNet device address is set manually using the ADDRESS selector switches or via DeviceNet Setting the address manually Set the selector switches to the desired value Once the setting has been made the device accesses the bus...

Page 14: ...Specify system behaviour following termination of the cyclical DeviceNet communica tion Use object Idle Action 9 1 7 to specify which action is to be carried out if there is a failure of the cyclical exchange of process data poll I O connection Specify the remote priority Use object Permission locked 101 0 17 to specify whether the electronic drive unit is to be controlled exclusively via DeviceNe...

Page 15: ...6 s Exception Detail Warning 48 1 14 1 1 1 1 BYTE Speed Status 42 1 39 Bit 0 Pump is on rotation speed 0 Bit 1 Motor is off Bit 2 Standby rotation speed attained Bit 4 Stopped Bit 5 Accelerates Bit 6 Set rotation speed attained Bit 7 Decelerates 2 2 2 2 BOOL Pump On Status 8 1 3 0 Pump is off 1 Pump is on rotation speed 0 3 4 3 4 3 4 INT Pump Speed 42 1 7 Actual rotation speed in rpm 4 e g value 1...

Page 16: ...omment 1 0 1 Revision UINT get 1 0 2 Max Instance UINT get 1 0 3 Number of Instances UINT get Instance 1 1 1 0 Instance USINT res gaa 1 1 1 Vendor ID UINT get 527 Pfeiffer Vacuum 1 1 2 Device Type UINT get 33 Turbomolecular Vacuum Pump Device 1 1 3 Product Code UINT get 5377 1 1 4 Revision STRUCT of get Major Revision USINT Minor Revision USINT 1 1 5 Status WORD get 1 1 6 Serial Number UDINT get 1...

Page 17: ...t Pump On BYTE 9 1 3 Instance 6 output pump control 4 6 3 Data ARRAY of get set Pump on BYTE 9 1 3 Speed control BYTE 42 1 38 Instance 7 output pump speed control set speed 4 7 3 Data ARRAY of get set Pump On BYTE 9 1 3 Speed Control BYTE 42 1 38 Speed Target 2 x BYTE INT 42 1 8 Instance 100 input pump status speed current 4 100 3 Data ARRAY of get Exception Status BYTE 48 1 12 Speed Status BYTE 4...

Page 18: ...get 5 1 15 Consumed Connection Path Length Packed EPATH get 5 1 16 Consumed Connection Path UINT get 5 1 17 Production Inhibit Time Packed EPATH get 5 1 18 Connection Timeout Multiplier USINT get Instance 2 Poll I O connection 5 2 1 State USINT get 5 2 2 Instance Type USINT get 5 2 3 Transport Class Trigger BYTE get 5 2 4 DeviceNet Produced Connection ID UINT get 5 2 5 DeviceNet Consumed Connectio...

Page 19: ...9 0 2 Max Instance UINT get 9 0 3 Number of Instances UINT get Instance 1 Pump On Off 9 1 3 Value BOOL get set 0 Pumping station off 1 Pumping station on 9 1 5 Fault Action BOOL get set 0 Pumping station off 1 Hold last state 9 1 6 Fault Action BOOL get set 0 9 1 7 Idle Action BOOL get set 0 Pumping station off 1 Hold last state 9 1 8 Idle Action BOOL get set 0 Instance 2 TMS Heating 9 2 3 Value B...

Page 20: ...1 18 Accel Time UINT get set Run up time ms 2 time Scale e g 2813 read 6 min 42 1 22 Speed Scale SINT get set 2 42 1 27 Voltage Scale SINT get set 3 42 1 28 Time Scale SINT get set 7 42 1 38 Speed Control BYTE get set Bit 0 Pumping station on Bit 1 Motor off Bit 2 Standby on 42 1 39 Speed Status BYTE get Bit 0 Pump on and f 0 Bit 1 Motor is off Bit 2 Standby rotation speed at tained Bit 4 stopped ...

Page 21: ...1 13 Exception Detail Alarm STRUCT of get Common Exception De tail Size USINT 2 Common Exception De tail 0 BYTE see below Common Exception De tail 1 BYTE see below Device Exception Detail USINT 2 Device Exception 0 BYTE see below Device Exception 1 BYTE see below Manufacturer Excep tion Detail Size USINT 2 Manufacturer Excep tion Detail 0 BYTE see below Manufacturer Excep tion Detail 1 BYTE see be...

Page 22: ... BOOL get 0 invalid 1 valid 49 1 6 Value INT get Motor temperature C 10 49 1 7 Status BYTE get see below Instance 3 Bearing temperature 49 3 5 Reading Valid BOOL get 0 invalid 1 valid 49 3 6 Value INT get Bearing temperature C 10 49 3 7 Status BYTE get see below Instance 4 Electronic temperature 49 4 5 Reading Valid BOOL get 0 invalid 1 valid 49 4 6 Value INT get Electronic temperature C 10 49 4 7...

Page 23: ...ap 7 3 Instance 15 Relay 3 101 15 17 Configuration USINT get set 0 15 see p 30 chap 7 3 Instance 16 Accessory A1 101 16 17 Configuration USINT get set 0 10 see p 30 chap 7 3 Instance 17 Accessory B1 101 17 17 Configuration USINT get set 0 10 see p 30 chap 7 3 Instance 18 Accessory A2 101 18 17 Configuration USINT get set 0 10 see p 30 chap 7 3 Instance 19 Accessory B2 101 19 17 Configuration USINT...

Page 24: ... length byte Bilbo 05h 42h 69h 6Ch 62h 6Fh SINT 1 signed integer 42 D6h UINT 2 unsigned integer 2468h 68h 24h UDINT 4 unsigned integer 10203040h 40h 30h 20h 10h USINT 1 unsigned integer 101 65h WORD 2 16 single bits 55AAh AAh 55h Service DeviceNet Service Code abo abort 4Bh all allocate_master slave_connection_set 4Bh gaa get_attributes_all 01h get get_attribute_single 0Eh per perform_diagnostics ...

Page 25: ...n Short description of the parameter Functions Functional description of the parameter Data type Type of formatting of the parameter for the use within the Pfeiffer Vacuum pro tocol Access method R read access W write access Unit Physical unit of the described characteristic min max permissible limits for value input default factory settings partially specific of the pump type Parameter can be sto...

Page 26: ...umping station 16 Pump rotates 17 Pump does not rotate 7 RW 0 17 1 x 023 MotorPump Motor pump 0 off 1 on 0 RW 0 1 1 x 024 Cfg DO1 Configuration output DO1 0 Rot speed switch point attained 1 No error 2 Error 3 Warning 4 Error and or warning 5 Set speed attained 6 Pump on 7 Pump accelerates 8 Pump decelerates 9 always 0 10 always 1 11 Remote priority active 12 Heating 13 Backing pump 14 Sealing gas...

Page 27: ...ture controlled 5 Sealing gas 6 always 0 7 always 1 8 Power failure venting unit 7 RW 0 8 2 x 045 Cfg Rel R1 Configuration Relay 1 0 Rot speed switch point attained 1 No error 2 Error 3 Warning 4 Error and or warning 5 Set speed attained 6 Pump on 7 Pump accelerates 8 Pump decelerates 9 always 0 10 always 1 11 Remote priority active 12 Heating 13 Backing pump 14 Sealing gas 15 Pumping station 16 P...

Page 28: ...e selection locked 0 off 1 on 0 RW 0 1 0 x 062 Cfg DI1 Configuration input DI1 0 Deactivated 1 Enable venting 2 Heating 3 Sealing gas 4 Run up time control 5 Rotation speed setting mode Setting P 063 064 7 RW 0 5 1 x 063 Cfg DI2 Configuration input DI2 0 Deactivated 1 Enable venting 2 Heating 3 Sealing gas 4 Run up time control 5 Rotation speed setting mode Setting P 062 064 7 RW 0 5 2 x 064 Cfg D...

Page 29: ...tory pos 3 4 R x 363 ErrHist4 Error code history pos 4 4 R x 364 ErrHist5 Error code history pos 5 4 R x 365 ErrHist6 Error code history pos 6 4 R x 366 ErrHist7 Error code history pos 7 4 R x 367 ErrHist8 Error code history pos 8 4 R x 368 ErrHist9 Error code history pos 9 4 R x 369 ErrHist10 Error code history pos 10 4 R x 397 SetRotSpd Set rotation speed rpm 1 R rpm 0 999999 398 ActualSpd Actua...

Page 30: ...meters Pumping station and Sealing gas 6 always 0 GND for the control of an external device 7 always 1 24 V DC for the control of an external device 8 Power failure venting unit Control via parameter Enable venting when using a power failure venting unit 9 TMS heating unit TMS switching box control 10 TMS cooling unit TMS control of cooling water supply Option Description 0 deactivated Connection ...

Page 31: ... depends on the gas type Three characteristics are available in order to completely ex haust the pump s capacity for each gas type 12 Heating Control is equal to parameter P 001 13 Backing pump Control is equal to parameter P 010 and P 025 14 Sealing gas Control is equal to parameter P 050 15 Pumping station Control is equal to parameter P 010 16 Pump rotates active if rotation speed 1 Hz 17 Pump ...

Page 32: ...m between permissible power and gas friction is attained To avoid rotation speed fluctuations Pfeiffer Vacuum recommends setting a some what lower frequency in rotation speed setting mode Set value power con sumption Adjust the parameter P 708 to the desired value in If adjusting the set value power consumption below 100 the run up time prolongs To avoid error messages the parameter P 700 RUTimeSV...

Page 33: ...speed switch point 1 P 701 Fig 4 Example for the configuration rotation speed switch point 1 active Rotation speed switchpoint 1 2 Adjust the parameter P 701 to the desired value in Adjust the parameter P 719 to the desired value in Parameter P 017 1 When the pumping station P 010 is switched on the rotation speed switch point 1 is the signal generator When the pumping station is switched off sign...

Page 34: ...urbopump Standby mode is ineffective during rotation speed setting mode The factory setting for the set value in standby mode is 66 7 of the nominal rotation speed Underrunning or overrunning the set speed in standby mode activates or deacti vates the status signal P 306 SetSpdAtt Adjust the parameter P 717 to the desired value in Parameter P 026 0 Parameter P 002 1 Read the parameters P 308 P 397...

Page 35: ...Switch on the vacuum system via the function pumping station and await the run up Generate a fore vacuum pressure of 10 mbar by gas inlet via dosing valve Read and note the parameter P 316 Adjust the switch on threshold backing pump via parameter P 711 to the determined drive power for a fore vacuum pressure of 10 mbar Reduce the fore vacuum pressure to 5 mbar Read and note the parameter P 316 Adj...

Page 36: ... delay of 6 s after pump ing station off When the function pumping station is switched on renewed the venting valve closes automatically In the event of a power failure venting will occur if an an chored type specific rotation speed is underrun When power is restored the venting process is interrupted Parameter P 030 2 Safety bearing stress The level of stress on the safety bearings is linked to t...

Page 37: ...turbopump operation with control of all con nected accessories e g backing pump Switch on the supply voltage with switch S1 on the power supply Parameter P 023 1 Parameter P 010 1 Ongoing and removed error messages are reset After a successfully completed self test the electronic drive unit sets the turbopump motor and all connected accessories into operation depending on their configuration When ...

Page 38: ... Individual address of the unit 001 255 Group address 9xx for all identical units no response global address 000 for all units on the bus no response Action see p 38 chap 8 2 n2 n0 Pfeiffer Vacuum parameter numbers l1 l0 Data length dn d0 dn d0 Data in data type concerned see p 39 chap 8 3 c2 c0 Checksum sum of ASCII values of cells a2 to d0 modulo 256 CR carriage return ASCII 13 a2 a1 a0 0 0 n2 n...

Page 39: ... 1 1 1 1 1 1 0 2 0 C R ASCII 48 52 50 49 48 48 49 48 48 54 49 49 49 49 49 49 48 50 48 13 0 4 2 1 0 0 1 0 0 6 1 1 1 1 1 1 0 2 0 C R ASCII 48 52 50 49 48 48 49 48 48 54 49 49 49 49 49 49 48 50 48 13 Data type Description Size l1 l0 Example 0 False true 06 000000 111111 1 Positive integer number 06 000000 to 999999 2 Positive fixed comma number 06 001571 equal to 15 71 4 Symbol chain 06 TC_400 7 Posi...

Page 40: ... 1 2 s active Steady ON Green insufficient power supply Pumping station OFF Rotation speed 1Hz Pumping station OFF Rotation speed 1 Hz Pumping station ON Yellow no warning Warning Red no malfunction Malfunction Error code Problem Possible cause Remedy Err001 Excess rotation speed Contact Pfeiffer Vacuum Service Reset at rotation speed f 0 only Err002 Overvoltage Wrong mains pack used Check type of...

Page 41: ...fety bearing stress 100 Contact Pfeiffer Vacuum Service Err891 Rotor unbalance 100 Contact Pfeiffer Vacuum Service Wrn007 Low voltage mains power failure Mains failure Check mains supply Wrn018 Remote priority conflict Pumping station is switched on via P 010 whereas the E74 input start stop is off opened Switch on the pumping station via E74 Switch off P 010 Wrn045 High temperature motor Cooling ...

Page 42: ...ity Directive 2004 108 EEC and EU Low Voltage Di rective 2006 95 EEC TM 700 DN Guidelines harmonised standards and national standards and specifications which have been applied DIN EN 61000 3 2 2008 DIN EN 61000 3 3 2006 DIN EN 61010 1 2002 DIN EN 61326 1 2006 DIN EN 62061 2005 Semi F47 0200 Semi S2 0706 Signatures Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germany M Bender Managing Dire...

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Page 44: ...3 99 05 1 contact pfeiffer vacuum it Korea Pfeiffer Vacuum Korea Ltd Tel 82 31 266 0741 sales pfeiffer vacuum co kr Austria Pfeiffer Vacuum Austria GmbH Tel 43 1 894 17 04 office pfeiffer vacuum at Sweden Pfeiffer Vacuum Scandinavia AB Tel 46 8 590 748 10 sales pfeiffer vacuum se Switzerland Pfeiffer Vacuum Schweiz AG Tel 41 44 444 22 55 info pfeiffer vacuum ch United States Pfeiffer Vacuum Inc Te...

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