Nikon ECLIPSE L200ND / ECLIPSE L200N Instructions Manual Download

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M513E

09.3.NF.2 (2/4)

IC Inspection Microscope

ECLIPSE L200ND / L200N

Instructions

Summary of Contents for ECLIPSE L200ND / ECLIPSE L200N

Page 1: ...M513E 09 3 NF 2 2 4 IC Inspection Microscope ECLIPSE L200ND L200N Instructions ...

Page 2: ......

Page 3: ...m Nikon The contents of this manual are subject to change without notice Although every effort has been made to ensure the accuracy of this manual errors or inconsistencies may remain If you note any points that are unclear or incorrect please contact your nearest Nikon representative Some of the equipment described in this manual may not be included in the set you have purchased If you intend to ...

Page 4: ...se personal injury or property damage To ensure correct usage read this manual carefully before using the product Do not discard this manual and keep it handy for easy reference Safety instructions in this manual are marked with the following symbols to highlight their importance For your safety always follow the instructions marked with these symbols Table 1 WARNING CAUTION symbol Symbol Meaning ...

Page 5: ...is instruction manual Figure 1 Symbol affixed positions Table 2 Meaning of symbol Symbol Meaning Caution for heat This marking on the rear of the lamphouse and the upper and the lower right of the microscope stand calls your attention on the following Lamphouse becomes extremely hot during and immediately after the illumination Risk of burns Do not touch the lamphouse during and immediately after ...

Page 6: ...off the power switch flip it to the c side before connecting or disconnecting the power cord 5 Heat from the light source The lamp and the lamphouse become extremely hot To avoid burns do not touch the lamphouse while the lamp is lit or for thirty minutes after it has been turned off Further more in order to avoid the risk of fire do not place fabric paper or highly flammable volatile materials su...

Page 7: ...ctor lens into the optical path of the microscope unless the UV excitation light is necessary On the ECLIPSE L200ND L200N microscope the UV filter automatically enters the optical path when turning the dark field bright field fluorescent selection lever to BF bright field or DF dark field The UV filter is removed from the optical path when turning the lever to FL Fluorescent 2 When performing the ...

Page 8: ...t the lamp while the lamphouse cover is open When you dispose of the replaced lamp do not shatter it or dispose of it casually Dispose of the used lamp as the special industrial waste or dispose of them according to the regulations and rules of your local authority 4 Do not let the microscope become wet Do not get this product wet In addition do not use this product in an environment where water w...

Page 9: ...ative humidity 85 at maximum no condensation Operating environmental temperature 5 to 35 C Weight of the microscope 45 kg including stage and eyepiece tube approx 7 Cautions on moving the microscope The microscope is a precision optical instrument Handle it carefully and do not subject it to a strong physical shock When moving the microscope first remove the stage Then have two or more people gras...

Page 10: ... Diagram Gravity point Operator space 234 710 Stage movable range 280 496 810 Stage movable range 645 Stage movable range 100 Gravity point Gravity point Eye point 175 360 266 244 379 493 5 339 200 547 580 704 515 829 Stage movable range 490 Dimensions are in mm Figure 2 Layout diagram ...

Page 11: ... 510 The 5th percentile female Height 1475 mm The front clearance for the knees 405 The height of the seating surface 1253 The height of the eye point 510 1138 The height of the eye point 690 470 The height of the seating surface 760 The 95th percentile male Height 1895 mm 760 690 The height of the workbench The upper clearance for the knees 70 The height of the workbench The front clearance for t...

Page 12: ...ent microscopy for L200ND only 9 2 6 Diascopic bright field microscopy for L200ND only 10 3 Operation of Each Part 11 3 1 Filters 11 3 1 1 The types and usage of the filters 11 3 1 2 Placing the filter in and out of the optical path for episcopic illumination 12 3 1 3 Placing the filter in and out of the optical path for diascopic illumination 12 3 2 Coarse fine focus knobs 13 3 2 1 The relationsh...

Page 13: ...analyzer in from the optical path 24 3 13 DIC slider 25 3 13 1 Attaching removing the DIC slider 25 3 13 2 Placing removing the DIC prism in from the optical path 25 3 13 3 Selecting the DIC prism position 26 3 13 4 Setting the interference color 26 3 14 Pinhole slider 27 3 14 1 Attaching the pinhole slider 27 3 14 2 Placing removing the pinhole in from the optical path 27 3 14 3 Centering the pin...

Page 14: ...cameras 42 4 13 3 Digital cameras 43 4 14 Setting the Dip switch on the L200ND L200N main body 44 4 15 Communications control 45 4 15 1 Connecting external devices 45 4 15 2 Control options and status displays on a PC or the DS L2 46 4 15 3 Registering information on the objective 47 4 15 4 Procedure for turning on the power switch 47 5 Troubleshooting 48 5 1 Viewing and control systems 48 5 2 Ele...

Page 15: ...1 Polarizer slider 1 Attaching part for the pinhole slider 2 Breath shielding plate Revolving nosepiece DIC slider 3 Objective Stage Sample holder The glass plate is used in this figure Microscope base Diascopic lamphouse for L200ND only 1 For DIC microscopy or episcopic bright field simplified polarization microscopy 2 For pinhole microscopy insert the pinhole slider here 3 For DIC microscopy Fig...

Page 16: ...nly The lever is found under the substage Fine focus knob Coarse focus knob Coarse torque adjustment ring Stage fine movement knob for Y axis Stage fine movement knob for X axis Stage coarse movement lever Coarse movement ON switch Coarse movement OFF switch Episcopic Diascopic illumination selection switch Episcopic aperture diaphragm control buttons Nosepiece rotation buttons Brightness control ...

Page 17: ...se focus stopper ring Filter sliders Figure 6 Names of the operational parts 2 Caution for heat symbol CAUTION label Connector for episcopic lamphouse Connector for diascopic lamphouse Power cord AC IN connector Power switch Input voltage indication Screw holes for carrying rods USB connector For connecting a PC or the DS L2 digital camera HGFIE connector For connecting the C HGFIE HG Precentered ...

Page 18: ...ration of Each Part for how to operate each part 1 Episcopic bright field microscopy p 5 2 Episcopic dark field microscopy p 6 3 Episcopic DIC differential interference contrast microscopy p 7 4 Episcopic bright field simplified polarization microscopy p 8 5 Episcopic fluorescent microscopy for L200ND only p 9 6 Diascopic bright field microscopy for L200ND only p 10 ...

Page 19: ... aperture diaphragm Press for EPI For L200ND only Adjust brightness Select 10 objective Lower the stage to the limit Slide out the DIC slider 2 Place the sample on the stage See 3 8 8 8 Stage Í Move the stage to your right or left side 3 Focus on the sample See 3 8 8 8 Stage and 3 9 Focusing target Í Use the focusing target for a sample with a polished surface 4 Adjust diopter See 3 4 Diopter adju...

Page 20: ... dark field microscopy Adjust brightness with the ND filters Slide out for DF dark field For L200ND pull out to the limit for DF Fully open the aperture diaphragm Adjust brightness with the brightness control dial Swing in the BD objective 4 After dark field microscopy return to bright field microscopy if required Adjust the size of the aperture diaphragm Adjust brightness with the ND filters Pres...

Page 21: ... suitable for DIC microscopy Adjust brightness with the ND filters Press in the polarizer and the analyzer Adjust brightness with the brightness control dial Press in the DIC slider Rotate the knob to the position indicated on the objective For the objective shown below turn the knob to match the leter A with the white dot Prism position indication on the objective Rotate to change the background ...

Page 22: ...microscopy See 2 1 Episcopic bright field microscopy 3 Switch to the episcopic bright field simplified polarization microscopy Adjust brightness with the ND filters Press in the polarizer and the analyzer Adjust brightness with the brightness control dial 4 After episcopic bright field simplified polarization microscopy return to bright field microscopy if required Adjust brightness with the ND fi...

Page 23: ... 2 1 Episcopic bright field microscopy 3 Perform the episcopic fluorescent microscopy Adjust brightness with the ND filters Press to the limit to place the filter block in the optical path Fully open the aperture diaphragm Adjust brightness with the brightness control dial 4 After episopic fluorescent microscopy return to bright field microscopy if required Adjust brightness with the ND filters Pu...

Page 24: ...der Press in the NCB and ND filters Insert the NCB filter into the slot nearest to the lamphouse 2 Place the sample on the stage See 3 8 8 8 Stage Í Move the stage to your right or left front side 3 Focus on the sample See 3 8 8 8 Stage Í The focusing target cannot be used for diascopic illumination 4 Adjust diopter See 3 4 Diopter adjustment 5 Adjust interpupillary distance See 3 5 Interpupillary...

Page 25: ...be installed to the front of the lamphouse Note that the diascopic illumination filters can be used only for L200ND Figure 8 Filters 3 1 1 The types and usage of the filters The filters as listed in the table below are available Table 3 Types and usage of the filters Filters Usage NCB neutral color balancing filter Color temperature adjustment for general use and color photomicrography ND4 transmi...

Page 26: ...ic lamphouse Removing the filter from the optical path Slide out the filter slider to the first click stop position to remove the filter from the optical path Keep this state if the filter is not used 3 1 3 Placing the filter in and out of the optical path for diascopic illumination You can insert a filter slider in either of the two slots provided in front of the diascopic lamphouse Slots for fil...

Page 27: ...raduations The stroke range of the stage vertical movement is 29 mm Note When performing observation with the combination of the 8 8 stage 8 inch wafer holder and 0 7 mm thick wafer the stage vertical movement range is 16 2 mm up and 12 8 mm down from the focal plane Reference Never attempt either of the following actions They will damage the microscope Rotating the left and right knobs in opposit...

Page 28: ...ven after it is lowered greatly for sample exchange The coarse focus stopper ring is at the base of the left side coarse focus knob Coarse focus stopper ring The stage position is marked Figure 13 Coarse focus stopper ring Marking the stage position To mark the stage position turn the ring clockwise to the limit When the coarse focus stopper ring is clamped the stage can no longer be raised up bey...

Page 29: ...on 3 3 2 Tilting function The binocular part of the trinocular tilting eyepiece tube can be swung up and down for finding the best viewing position Figure 15 Tilting function 3 3 3 Vertical tube adapters When mounting a digital camera or TV camera to the vertical tube of the trinocular eyepiece tube you must first attach the optional LV TV TV adapter or C mount adapter Insert the adapter into the ...

Page 30: ...sample with the 10 objective following the steps described in 2 1 Episcopic bright field microscopy or 2 6 Diascopic bright field microscopy for L200ND only 3 Bring the 50 objective in the optical path and focus on the sample using the focus knobs Using the focusing target makes the focusing easier on episcopic illumination See 3 9 Focusing target 4 Bring the 5 or 10 objective in the optical path ...

Page 31: ...of the aperture diaphragm for episcopic illumination use the episcopic aperture diaphragm control buttons For diascopic illumination use the aperture diaphragm lever for diascopic illumination 1 Remove one eyepiece and look into the open sleeve Í Inside you can see the exit pupil of the objective as a bright circle 2 Adjust the size of the aperture diaphragm image to the appropriate size Í General...

Page 32: ...perture diaphragm centering screw holes at the back of the filter slider on the left side arm 1 Remove the caps of the centering screw holes and insert the hexagonal screwdrivers in the centering screw holes Í You can look in the holes to find the centering screw heads 2 Remove one eyepiece from the microscope and look inside the open sleeve to find the image of the aperture diaphragm Turn the cen...

Page 33: ...scent selection lever for L200ND only Dark field bright field selection lever provided for the L200N Figure 21 Changing the illumination For fluorescent illumination on the L200ND attach the filter block inside the microscope arm See 4 9 Installing the filter block for fluorescent illumination only Table 4 Changing the illumination Lever position Type of illumination FL Fully push in Fluorescent i...

Page 34: ...e stays in the coarse mode Take hold of the stage coarse movement lever and move the stage the coarse mode is used at low magnification observation and changing samples Moving the stage with the stage coarse movement lever without pressing in the coarse movement ON switch will damage the stage Likewise pushing or pulling the stage plate without pressing in the coarse movement ON switch will damage...

Page 35: ...tion the use of the focusing target will facilitate the focusing 3 9 1 How to use the focusing target Pull out the focusing target lever to put the focusing target in the optical path Pull out the focusing target lever and look into the eyepieces You will find dark shadows at 4 corners of the viewfield When the sample is out of focus the edges of the shadows are also blurred see the figure below T...

Page 36: ...ned off while motorized nosepiece is in motion When the L200ND microscope is connected with the C HGFIE Precentered Fiber Illuminator via the RS232C cross cable the shutter is closed while the motorized nosepiece is in motion 3 11 Polarizer slider Use together with the analyzer slider for episcopic bright field simplified polarization microscopy Use together with the analyzer and the DIC sliders f...

Page 37: ...o remove the polarizer from the optical path The empty hole is now placed in the optical path 3 11 3 Adjusting the orientation of the polarizer Turning the orientation adjustment screw at the bottom of the slider changes the orientation of the polarizer Given below is how to rotate the polarizer for the precise crossed Nicols adjustment Place the polarizer and the analyzer in the optical path Plac...

Page 38: ...icroscope to find two click stop positions on the slider 3 12 2 Placing removing the analyzer in from the optical path Push in The analyzer is in the optical path Analyzer slider Figure 29 Analyzer Placing the analyzer in the optical path Push in the slider to the second click stop position to place the analyzer in the optical path Since the orientation of the analyzer is already adjusted at the f...

Page 39: ...iece Insert the DIC slider into the slot on the revolving nosepiece and screw in the DIC slider limit screw When removing the DIC slider from the revolving nosepiece first fully loosen the DIC slider limit screw using a hexagonal screwdriver and then pull out the slider Figure 31 DIC slider 3 13 2 Placing removing the DIC prism in from the optical path Push in The DIC prism is in the optical path ...

Page 40: ...the barrel indicates that the correct DIC prism position for this objective is A Thus when you use this objective turn the prism selection knob on the DIC slider to match the letter A with the white dot Figure 33 Selecting the DIC prism position objective 3 13 4 Setting the interference color Turn the prism movement knob to change the interference colors Table 5 Selecting the interference color In...

Page 41: ...he slider in and out of the microscope to find two click stop positions on the slider Be sure to center the pinhole before observation 3 14 2 Placing removing the pinhole in from the optical path Placing the pinhole in the optical path Push in the slider to the second click stop position to place the pinhole in the optical path When the pinhole is in the optical path opening or closing down the ap...

Page 42: ...IA simultaneous illumination If you are using the L200ND and wish to turn on the episcopic and diascopic illumination at the same time use the lamp cable and the TI PS 100W Power Supply After connecting the lamp cable to the diascopic lamphouse connect the other end of the cable to the 12VDC outlet on the TI PS 100W Power Supply Connect the power cord to the power supply This connection shuts the ...

Page 43: ...n off the power Rating label The equipment is designed for AC power of 100 to 240V AC and 50 60 Hz Before connecting the power cord check that the power supply to be used conforms to the voltage and frequency described above Brightness control knob This knob adjusts the lamp brightness 12VDC outlet Connect the lamp cable from the compatible lamphouse to this connector AC inlet The AC power supply ...

Page 44: ...rument carefully and do not drop it The equipment can injure the human body or may be damaged when dropped Take care not to pinch your hands or fingers during assembly Scratches and fingerprints on the lenses will adversely affect the image Take care not to get them on the lenses If lenses and the like are contaminated e g with fingerprints clean them according to the description in 6 3 Cleaning t...

Page 45: ...n This equipment is a precision optical instrument Using or storing the microscope under unsuitable conditions may damage it or may have an adverse effect on its accuracy Read the Safety Notes explained in the beginning of this manual and select the location that satisfies the indicated conditions ...

Page 46: ...Pinhole Polarizer Analyzer Ultrawide Trinocular Tilting Eyepiece Tube L2 TT2 L2 TT2A DIC slider Micrometer eyepiece Ultrafine motion unit LV LH50PC 12V50W lamphouse LV HL50W 12V50W LL lamp 12V50W lamp Direct C mount adapter LV TV TV adapter C mount adapter 0 55x L200N L200ND Breath shielding plate C HGFIF15 30 DS L2 DS U2 PC a RS232C USB Setup Tool SDK Setup NIS Elements USB TV camera adapter TV c...

Page 47: ...the lamp with the lamphouse cover removed When you dispose of the replaced lamp do not break it up Instead dispose of the used lamp as special industrial waste or dispose of it according to the local regulations and rules 4 4 1 Attaching the lamphouse Before performing the following procedures turn off the power switch of the microscope flip it to the c side and unplug the power cord from the wall...

Page 48: ...And check that the lamp and lamphouse have cooled down sufficiently 1 Loosen the lamphouse cover clamp screw using the hexagonal wrench 2 Remove the lamphouse cover 3 Push down the lamp clamp lever and remove the old lamp 4 With the lamp clamp lever held down insert the electrodes of a new lamp into the pin holes of the socket Press the lamp to the limit and then release the lamp clamp lever to se...

Page 49: ...icroscope this microscope system will not be considered as a TUV SEMI approved product Carefully read the instruction manual for an external light source to use it and follow their instructions A light source emits very strong light including ultraviolet light that is harmful to the eyes and skin Never turn on the power for the light source before completion of assembling and connecting parts To a...

Page 50: ...ew Compensation filter Dark field bright field fluorescent selection lever Figure 42 Attaching the compensation filter for L200ND 7 Remove the dark field bright field fluorescent selection lever again and retain the lid at its original position 8 Mount the dark field bright field fluorescent selection lever X Attaching the fiber adapter Loosen the clamp screw on the fiber adapter by using the hexa...

Page 51: ...hutter must be controlled in synchronization with the motorized nosepiece Connect the microscope and the C HGFIE by plugging the cable to the HGFIE connector on the rear of the microscope and the RS232C connector on the C HGFIE If this communication is not established a flash of light may be fired at the rotation of the motorized nosepiece Be sure to connect them Microscpe main body rear view C HG...

Page 52: ...ed to the stage with four hex socket head cap screws 4 Place the holder on the stage matching three claws on its bottom with the three claws on the stage Fix the holder with the clamp screw at the left side of the stage taking care not to lift up the holder by tightening the clamp screw too much Screw holes for fixing the stage Figure 45 4 6 Attaching the eyepiece tube Fully loosen the eyepiece tu...

Page 53: ...switched turn the revolving nosepiece several times After these several turns the objectives will be set correctly on the optical path This trouble may happen when there are only a few objectives on the revolving nosepiece and all the objectives are set on one side of the revolving nosepiece 4 8 Attaching the eyepieces Attach eyepieces with the same magnifications for the left and the right eyes T...

Page 54: ...t field fluorescent selection lever Knob 2 3 1 Block installation guide Figure 46 Installing the filter block 4 10 Attaching breath shielding plate ultraviolet light shield There are three screw holes for mounting the breath shielding plate under the front bottom side of the arm near the revolving nosepiece Set the breath shielding plate to the microscope by screwing in the screws on the breath sh...

Page 55: ...ial of the angle must be aluminum alloy and the gauge must be over 5 mm 2 Fix the angles on the installation surface using screws 3 Turn the bolt through the elongated hole on the angle into the screw hole for carrying rod on the microscope to connect the angle and the microscope Use appropriate two screw holes for carrying rod out of four Provide a gap of a few millimeters between the microscope ...

Page 56: ...wer switch of the microscope flip it to the c side First connect the socket of the power cord to the AC IN connector on the rear of microscope Then plug in the plug of the power cord to the AC outlet 4 13 Attaching a camera Please refer to the instruction manual supplied with the equipment for its operation and assembly 4 13 1 LV TV TV adapter C mount adapter Remove the cap on the vertical tube of...

Page 57: ...of the camera and secure the camera using the set screw of the vertical tube of the trinocular eyepiece tube 4 13 3 Digital cameras 1 When using a 0 38 lens for DN 1 After attaching the LV TV TV adapter to the vertical tube of the trinocular eyepiece tube attach the V T photo adapter to the LV TV TV adapter and secure it with the set screw 2 Attach the 0 38 lens to the camera 3 Insert the lower tu...

Page 58: ...etting 1 Operation mode ON Continuous operation mode OFF Normal operation mode 2 Not used Set to OFF 3 Dark field brightness of halogen lamp under fluorescent observation ON Maximizes function regardless of level of brightness control dial setting OFF Follows brightness control dial setting 4 Controls rotation of motorized nosepiece from 1 to 6 ON Rotation available OFF Rotation unavailable 5 Dark...

Page 59: ...200N L200ND via the USB cable Note 1 When the DS L2 is connected status of the L200N L200ND is not displayed Power cord Power cord PC DS L2 AC adapter L200N L200ND main body L3N FIAD Fiber Guide adapter HG fiber C HGFIE HG Precentered Fiber Illuminator AC adapter power cord exclusive for your PC RS232C cross cable Power cord Power cord AC adapter DS U2 DS L2 Note 1 Camera cable USB cable Camera ca...

Page 60: ...ensity 2 Shutter open close ND Neutral Density RS232C cross cable must be used for the connection of the C HGFIE and the L200ND microscope to control the shutter according to the rotation of the motorized nosepiece If you fail to make this connection a fire of light may enter in the view field at the rotation of the motorized nosepiece Revolving nosepiece Rotation of the revolving nosepiece Nosepi...

Page 61: ...to turn on the system when L200ND L200N microscope and an external control device are connected For using the fiber illuminator for L200ND only 1 Set the power switch on the fiber illuminator to the side and wait until it starts up 2 Set the power switch on the L200ND main body to the side to turn it on Before using the fiber illuminator read the instructions and the safety precautions in the inst...

Page 62: ... the intermediate position Press in or pull out to the click stop position See from 3 11 Polarizer slider to 3 13 DIC slider Optical path selection lever is not positioned correctly Optical path selection lever is set for 100 vertical tube Press in the lever for 100 binocular part See 3 3 1 Optical path selection Filter sliders are not positioned correctly Slide in or out the sliders correctly See...

Page 63: ...usting the size of the aperture diaphragm Sample not securely fit on the stage Fit the sample securely on the sample holder of the stage Image is partially dim Image moves while being focused Stage tilted Mount the stage correctly See 4 5 Attaching the stage and the holder NCB11 filter not used Place the NCB11 filter in the optical path See 3 1 Filters Image tinged yellow Lamp voltage too low Adju...

Page 64: ...he stage and the holder Interpupillary adjustment not correctly adjusted Adjust the interpupillary distance See 3 5 Interpupillary distance adjustment Viewfields do not merge into one when observed with both eyes Eyepiece diopter not adjusted Adjust the diopter See 3 4 Diopter adjustment Interpupillary adjustment not correctly adjusted Adjust the interpupillary distance See 3 5 Interpupillary dist...

Page 65: ...the optical path See 3 13 DIC slider No interference colors seen on DIC microscopy Analyzer or polarizer slider inserted in the wrong direction Insert them into the microscope in correct direction See 3 11 Polarizer slider and 3 12 Analyzer slider Wrong type of objective is used Use the objectives marked LU Plan or LU Plan Apo Uneven interference colors on DIC microscopy Low contrasted colors Wron...

Page 66: ...g the lamp Episcopic Diascopic illumination selection switch not set correctly Switch it correctly Lamp does not light when switched on Specified lamp not used Use the specified lamp See 7 Technical Specifications Lamp about to blow Replace the lamp See 4 4 Attaching the lamphouse and replacing the lamp Power cord or lamphouse not connected securely Connect them securely See 4 4 Attaching the lamp...

Page 67: ... hands such as eyepieces and glass plate according to the procedure described in 6 2 Cleaning the lens without removing them from the microscope Nikon recommends cleaning them frequently Clean the bottom ends of objectives condenser lens filter and the like to maintain the optical performance When cleaning the objectives remove them from the microscope following the steps described in 4 7 1 When r...

Page 68: ...low the instructions provided by the manufacturer when using absolute alcohol 6 3 Cleaning this equipment Do not use organic solvents such as alcohol ether or paint thinner on painted plastic or printed parts Doing so could result in discoloration or in the peeling of printed characters For severely dirty portions lightly wiping the surface using a piece of gauze moistened with small amount of dil...

Page 69: ...ted at 250 VAC minimum When used inside Japan PSE approved detachable power cord set 3 conductor grounding 3 conductor grounding Type VCTF 3 x 0 75 mm 2 3 m long maximum rated at 125 VAC minimum Lamp and lamphouse Lamphouse 12V 50W precentered lamphouse manufactured by Nikon Model LV LH50PC Halogen lamp 12V 50W LONGLIFE halogen lamp Model LV HL50W Average service life of the lamp 1100h Operating e...

Page 70: ...gainst harmful interference when the equipment is operated in a commercial environment This equipment generates uses and can radiate radio frequency energy and if not installed and used in accordance with the instruction manual may cause harmful interference to radio communications Operation of this equipment in a residential area is likely to cause harmful interference in which case the user will...

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