F2-463099-A
INSTRUCTION MANUAL
RAPIFLOW® microflow type
FSM-H-A series
Please read this instruction manual carefully before using this product,
particularly the section describing safety.
Retain this instruction manual with the product for further consultation
whenever necessary.
1.CAUTION
①
The product can not be used as a business mater. Not conformed to
the Measurement Law, do not use the product for the commercial
purpose. Use the product as an industrial sensor.
②
In installation, please be sure to hold the product’s main body to
prevent any impact to body and stress to the flying lead.
③
Do not use the product with other than applicable working fluids, or the
accuracy can not be guaranteed.
④
Install a filter, an air dryer and an oil mist filter (micro alescer) onto the
primary side(upstream) of the sensor since the compressed air from
the compressor contains drain(water, oil oxide and foreign material,
etc.) Mesh(wire net) in a sensor is used to rectify the flow in the pipe.
Always install a filter since this mesh is not a filter to remove foreign
materials, etc.
⑤
Even if twice as much as overflow as each series measuring range is
applied to the sensor, it is no problem, however, if dynamic pressure is
applied near to the maximum working pressure, (when the pressure
applied to the primary side with the secondary side released.), the
sensor may fail. When feeding workpieces during leakage inspection, if
dynamic pressure is applied, always provide a by-pass circuit or a
needle valve to avoid dynamic pressure applying to the sensor.
2. Specifications
Analog output type
Indicator type
Descriptions
FSM-H-A-
□
※１
ML-
□
※２
005
0.25 to 5
010
0.5 to 10
050
2.5 to 50
Flow rate range
(m
/min)
Note
１
※１
100
5 to 100
6A
Stainless steel, Rc1/8
Body material
Port size
※２
6G
Stainless steel, G1/8
Working fluid
Note
２
Clean air (JIS B 8392-1.1.1 to5.6.2),
compressed air(JIS B 8392-1.1.1 to1.6.2), and nitrogen gas
Maximum working pressure
1.0MPa
Minimum working pressure
-0.09MPa
Withstanding pressure
1.5MPa
Ambient temperature/humidity
0 to 50
℃
, 90%RH or less
W
o
rk
in
g
co
nd
iti
on
s
Working fluid temperature
0 to 50
℃
Linearity (display/analog output)
±
3%F.S. or less (0.1Mpa, 25
℃
, flow rate range 5 to 100%F.S.)
Pressure characteristics
±
3%F.S. or less(-0.09 to 1.0 Mpa, 0.1Mpa criteria)
Temperature characteristics
±０．２％
F.S.
／℃以下
(15 to 35
℃
, 25
℃
criteria)
A
cc
ur
ac
y
Repeatability (F.S.)
±
0.5% F.S. or less
Response time
Note
３
50mS or less
Display
Power display (green
）
Analog output
1 to 5V (connected load impedance 50k
Ω
and over)
Power supply voltage
DC12/24V(10.8 to 26.4V)
Current consumption
50mA or less
Lead wire
φ
3.7 0.2mm
3
×
3-conductor 1
ｍ
Functions
Analog output
Installation attitude
Both vertical and horizontal
Strait piping section
Not required
Protective structure
IP40
Protective circuit
Note
４
Power supply reverse protections
EMC directive
EN55011, EN61000-6-2,EN61000-4-2/3/4/6/8
Mass
140g
Note1: Converted to volumetric flow at 20
℃
and 1 atmospheric pressure (101kPa)
Note2: Consult with CKD for usage with a gas other than air and N2.
Note3: The response time may change depended with piping condition.
Note4: The protective circuit of this product is effective for the special incorrect wiring and load short
circuits, but can not protect the product from all wrong connections.
Separate indicator
Separate indicator
Descriptions
*1
*2
FSM-H-D
NP
-
R0005
ML
005
0
〜
5
010
0
〜
10
050
0
〜
50
Flow rate range
: mL/min
*2
100
0
〜
100
Display
Flow rate display (7 segments 3 digits, orange),
operation and switch output (orange)
N
2 points
(NPN open collector output, load current 50mA or less,
voltage drop 2.4V)
Switch output
*1
P
2 points
(PNP open collector output, load current 50mA or less,
voltage drop 2.4V)
Switch output
response time
Appx. 5ms
Analog output
Output 1 point
(1 to 5 V voltage output, and connected load impedance 50 k
Ω
and over)
Power supply voltage
DC12
／
24V
（
10.8
〜
26.4V
）
Current consumption
50mA or less (indicator only)
Lead wire
φ
3.7 0.2mm
2
×
5-conductor (1m)
Functions
Flow rate display, flow rate-peak hold, switch output, analog output
Ambient
temperature/humidity
0 to 50
℃
, 85%RH or less (to be no dew condition)
Protective structure
IEC standards IP 40
Mass
Approximate 70g (including lead wire 1m)
3. Wiring
Analog output type (FSM-H-A)
Line color
Content
Brown
Power supply DC12 to
24V
Blue
0V(GND)
Black
Analog output
(1 to 5V)
Brown
Black
Blue
Load
＋
−
M
ai
n
ci
rcu
it
Separate indicator (FSM-H-D
Ｎ
/
Ｐ
）
<Connection of display unit and sensor>
11mm
Electrical connection of sensor controller is made with terminal
stand.
Insert the wire while yellow jaw is pushed.
Refer to the spec. below if other wires than those for the products
are used.
Single-wire
0.14 to 0.5mm
２
Twisted-wire
0.14 to 0.5mm
２
AWG
26 to 20
<Separate indicator>
FSM-H-DN (separate indicator: NPN output
）
Black (out1)
White (out2)
Gray (analog output)
Blue (power supply -)
Brown (power )
←
MAX 50mA
←
MAX 50mA
Load2
Load1
M
ai
n
ci
rc
ui
t
+
-
DC12 to
24V
FSM-H-DP(separate indicator: PNP output)
Black (out1)
White (out2)
Gray (analog output)
Blue (power supply-)
Brown (power )
MAX50mA
→
MAX50mA
→
M
ai
n
ci
rc
ui
t
DC12 to
24V
Load1
Load2
+
-
(Precautions for wiring)
Wiring
For wiring, turn off the power supply. Discharge static electricity built
in body, tool and equipment before and during work. Use a wire
elasticity as wire for robot connection in the movable part.
Wiring installation
This product and wiring must be installed as far away as possible
from noise source such as strong electric line, etc. Take other
countermeasures for a surge on the power supply line.
Power voltage
Do not use the product put of power supply voltage range. If voltage
more than usage range is applied, or if alternating current
power(AC100V) applied, causing damage or burn.
Short-circuiting
Do not short-circuit a load, otherwise, or causing damage or burn.
Incorrect wiring
Connect wires to the correct poles or terminals, otherwise, wires may
be damaged or burned.
Separate indicator ;
By connecting display unit (FSM-A-D*) and flow sensor (analog output
type: FSM-A), digital display and switch setting of flow rate is possible.
The controller has been designed exclusively for FSM. Be sure to
combine the controller and the sensor for the same flow rate. Never
combine the other flow sensor, FSM for other flow rate or pressure
sensor.
FG connection
Use DC safety power supply thoroughly insulated from the AC
primary side for a power supply for the metal body type, while
connecting either + or – side on the power supply to F.G. High
potential and insulation resistance tests between the inside power
circuit of metal body type and the metal body must not be done.
4.Analog output voltage – flow rate characteristics
FSM-
□
-
□
-
□
0
F.S.
1
2
3
4
5
Analog
output
(V)
Flow rate
(
/min)
(Precautions)
Output accuracy is affected by
self exoergics caused by
energizing other than
temperature characteristics.
When using, stand-by time
(5 minutes and over after
energizing) must be provided.
If out of flow rate range, the
output will reach up to max 8V.
5.Piping
(Precautions for piping)
This product must be piped, while matching the flow direction and
direction specified on the body.
When a valve is used in the primary side of the sensor, an oil-prohibited
valve must be used. The sensor may malfunction or be destroyed by
splash of grease and oil, etc.
When piping in a resin tube, fix the piping as much as possible. When
the piping moves during the flow control, abnormality of the flow output
is caused as internal gas moves.
When piping, apply a spanner on the metal section not to apply forces
onto the resin section.
・
Never hold the plastic case for tightening.
・
When piping, care must be taken that
sealing tape and adhesive must not enter
into the inside.
・
During the piping work, be sure that
any excessive screw-in torque and/or
load torque will be applied to the piping port.
Set screw
Tightening torque
Ｎ・ｍ
Rc1/8
3 to 5
G1/8
3 to 5
6.Installation
The length of
stripping-wire
Recommend
length
：
11mm
・
Analog type
・
Separate indicator
S
ep
a
ra
te
in
dic
a
to
r
Analog
output
type
Blue (power supply-)
Brown (power )
Black (signal conductor)
How to connect analog output type
to separate indicator
V
S
G
・
This product is designed for air and compressed dry air and N
2
. Do
not use it with combustible gases.
・
Do not touch electric wiring connections (exposed live parts): this
will cause an electric shock. During wiring, keep the power off. Also,
do not touch these live parts with wet hands.
Precaution
!
Horizontal
(through hole)
Vertical
(female thread on the bottom)
Bracket installation
(* bracket use)
* Bracket(separate sales)
is provided.
(model no.: FSM-LB1)
<Separate indicator>
Bracket/kit (optional) are provided to install a separate indicator.
Bracket model no.
：
PPD3-KL-D
：
single foot bracket (radical installation)
Bracket model no.
：
PPD3-KD-D
：
both sides foot brackets(parallel)
Bracket model no.
：
PPD3-KHS-D
：
panel mount bracket set with panel cover
Bracket model no.
：
PPD3-KC
：
operation protective cover
7.External dimensions
<Analog output type>
55
15.5
1
7
27
9
.5
3
2
Rc1/8 or G1/8
2-
φ
3.4
2-M3 depth 5
4
.6
<Separate indicator type>
22
32
□
30
Sensor grand
2-
φ
2.7 depth 7
8. How to order
<Analog output type>
FSM – H – A - 005 ML- 6A - K
Symbol
Content
Flow r ate rang e
005
0.25
〜
5 m
Ｌ
/min
010
0.5
〜
10 m
Ｌ
/min
050
2.5
〜
50 m
Ｌ
/min
100
5
〜
100 m
Ｌ
/min
Port size
6A
Rc1/8 (stainless steel)
6G
G1/8 (stainless steel)
Option
Blank
None
K
Company Certification attached
T
Traceability attestation attached.
3 pieces; traceability attestation,
company certification and traceability
system configuration are attached.
<Separate indicator>
FSM – H –D N - 050 ML
Symbol
Content
Ou tput type
N
NPN output
P
PNP output
Flow r ate range
005
0.25 to 5 mL/min
010
0.5 to 10 mL/min
050
2.5 to 50 mL/min
100
5 to 100 mL/min
<Bracket for separate indicator>
PPD3 - KL - D
Symbol
Content
Brack et k it
KL-D
Single foot bracket (radial)
KD-D
Both sides foot brackets (parallel)
KHS-D
Panel mount bracket set with cover
KC
Operation protective cover
Mounting hole
machining dimensions
2-nominal 3
P tight
2-M3
18
4-M3
18
50
□33.5±0.3
Protective cover
Protective cover holder
FSM-H-A- ML-6A/6G
FSM-H-D
０５０
Mounting hole
machining dimensions
2-nominal 3
P tight
Mounting panel cutout
2-250, Ouji
，
2-Chome
，
Komaki
，
Aichi
，
485-8551, Japan
http://www.ckd.co.jp/
2006.12.13
