ZEISS
7 Troubleshooting | 7.2 Column
Procedure
1. In the right part of the
Status Bar
, click
or
.
à
The pop-up menu for Vacuum, Gun and EHT activation is displayed.
2. Click
Shutdown Gun
.
3. Wait until the gun has ramped down.
à
This may take up to 5 minutes.
7.2.1.2 Starting the Bakeout
Info
You cannot work with the microscope while the bakeout procedure runs.
NOTICE
Hot surfaces during bakeout
Parts of the enclosure in the upper range of the column may become hot during bakeout, par-
ticularly after a long bakeout cycle.
4
Do not place any combustible objects on the grids of the electron optical column during
bakeout.
4
After the bakeout procedure, let surfaces cool down before working around the column.
4
Only advanced operators are allowed to perform the bakeout procedure.
Prerequisite
ü
Requires the
Supervisor
privilege and the user level
Service
ü
Only advanced operators are allowed to perform the bakeout procedure
Procedure
1. In the
Panel Configuration Bar
, double-click
Bakeout
.
à
The
Bakeout
dialog is displayed.
2. If the
Full service bakeout
checkbox is available, deactivate the
Full service bakeout
checkbox.
INFO:
Full service bakeout includes column heating that may lead to column misalignment.
3. From the
Bakeout
drop-down list, select a bakeout cycle.
For 2 hours heating / 1 hours cooling, select
Quick
.
For 8 hours heating / 2 hours cooling, select
Overnight
.
For 40 hours heating / 3 hours cooling, select
Weekend
.
For a cycle defined by the operator, select
User
.
INFO:
You can switch to Standby mode while the bake-out procedure is running. Before
you switch to Standby mode, ensure that the
Partial Vent on Standby
checkbox is deacti-
vated in the
SEM Controls
panel.
4. To start the bakeout procedure, click
Bakeout
Start
.
Instruction Manual ZEISS SIGMA series | en-US | Rev. 7 | 352102-9344-006
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