9 Technical Data and Conformity | 9.5 Performance Data and Specifications | EVO 25
ZEISS
Parameter
Description
X-ray analysis
8.5 mm AWD and 35° take-off angle
Optibeam modes
Resolution, Depth, Analysis, Field, Fisheye
Image framestore
32768 × 24576 pixel, signal acquisition by pixel, line and frame inte-
gration and averaging, including drift compensated frame averaging
(limitations may apply to averaging mode and maximum scan speed
for large images)
System control
SmartSEM user interface operated by mouse and keyboard
Windows 10 multilingual operating system
Specimen Chamber
and Stage
Parameter
Description
Specimen chamber
dimensions
§
310 mm inner diameter
§
220 mm height
Analytical working
distance
8.5 mm
Specimen stage
Type:
5-axes motorized Cartesian controlled via the SmartSEM user
interface or operated by a dual joystick control box
Mounting:
Drawer-type door
Movements:
§
§
Y = 130 mm
§
Z = 50 mm
80 mm with large stage (option)
§
T = −10° to 90°
§
INFO:
The movements may be reduced by specimen size, operating
conditions, and accessories attached.
Specimen height:
max 210 mm (with the ZTR module removed)
Specimen diameter:
max. 300 mm
Specimen weight:
Standard stage
§
0.5 kg (full motion)
§
2 kg (not tilted)
§
5 kg (only XY motion)
Large Z stage (optional)
§
2 kg (not tilted)
§
5 kg (only XY motion)
Specimen current monitor
with integrated
Touch Alarm
(audible
touch alarm warning with on-screen message)
Specimen mounts:
One 9x specimen holder for 13 mm diameter
stubs included in base tool configuration, various specimen holders
available as option
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Instruction Manual ZEISS EVO | en-US | Rev. 10 | 354706-0780-006
Summary of Contents for EVO
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