5 Description | 5.5 Detector Compatibility
ZEISS
5.5 Detector Compatibility
All the detectors, including the moveable ones, are compatible. BsD, NanoVP and CC should be
mounted on port 66 mm MP1 or MP2.
IMPORTANT:
The EDS detector must be mounted on port EDS1.
Fig. 2: Ports of GeminiSEM 300/500
5.6 Stage Movement Limitiation
With cooling plate in position, untilted stage movement is uncompromised.
A stage tilt of 45° is possible, but the possible range of WD strongly depends on sample/sample
holder.
Fig. 3: Tilted stage with cooling plate and detectors
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Instruction Manual ZEISS Cryo Trap | en-US | Rev. 2 | 346000-8166-000
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