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1. About this manual
This instruction manual is considered to be part of the BSD4 detector.
Read the instructions carefully. Keep the instruction manual nearby the BSD4 detector and hand
it over to future owners of the FESEM.
This instruction manual is designed for users who have been trained by an authorised ZEISS ex-
pert to operate the FESEM, the BSD4 detector is built in.
Operators of the detector must not deviate from the instructions provided in this document.
Reference to
related docu-
ments
For detailed information regarding the operating software refer to the Software Manual
SmartSEM
®
.
Safety
instructions
The safety instructions in this manual are classified as follows:
CAUTION
This symbol and signal word draws your attention to a potentially hazardous
situation.
Disregarding this warning MAY result in minor or moderate injury.
CAUTION
This signal word used without a safety symbol indicates a potentially hazardous
situation.
Disregarding this warning MAY result in property damage.
Moreover you will find the following type of information:
IMPORTANT
This symbol and signal word draws your attention to important and useful information.
