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8.3. Column
8.3.1. Baking ot the gun head
The pumping capacity of the ion getter pump decreases in the course of time, thus deteriorating
the ’Gun vacuum’. This can be remedied by an ion getter pump bakeout as a regular maintenance
procedure.
Prerequisite
•
Only advanced operators are allowed to perform the bakeout procedure.
•
Baking out requires
Supervisor
privilege and user access level
Service
.
Procedure
1
Select
All/Shutdown Gun
from the status bar
in order to switch off EHT and Gun.
2
Wait until the Gun has ramped down.
3
Use a 3 mm Allen key to remove the four
screws at the gun head.
CAUTION
Danger of misaligning the gun head
Ensure not to apply any lateral force when removing the high voltage plug.
Shown on AURIGA
®
Summary of Contents for AURIGA Compact Crossbeam
Page 1: ...AURIGA Compact Crossbeam workstation Instruction Manual ...
Page 50: ...RM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP PK aÉëÅêáéíáçå ìëíçãÉê ëÉêîáÅÉ ...
Page 54: ...RQ çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP RK fåëí ää íáçå ...
Page 150: ...NRM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP UK qêçìÄäÉëÜççíáåÖ mçïÉê ÅáêÅìáí ...
Page 156: ...NRS çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NNK ÄÄêÉîá íáçåë ...
Page 160: ...NSM çÑ NSQ fåëíêìÅíáçå j åì ä ìêáÖ çãé Åí ÉåMP NPK aÉÅä ê íáçå çÑ ÅçåÑçêãáíó ...