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The
Airlock
panel opens.
4
Click on
Close Column Chamber Valve
.
The column chamber valve is closed to separate
gun head area and specimen chamber.
CAUTION
Risk of damaging FESEM or specimen if specimen stage is at a short working distance.
Ensure there is enough space between objective lens and specimen before moving the
specimen stage.
5
Move the specimen stage to the transfer position ($Exchange):
a
Select
Stage Points List
from the
Panel Configuration Bar
.
b
Double-click on
$Exchange
.
The specimen stage is driven to the transfer position.
