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10 Retract the airlock rod.
11 Click on
Resume Exchange
.
Clicking on
Resume Exchange
starts a pre-de-
fined macro that includes the following steps:
- The gate valve is closed.
- The column chamber valve opens.
IMPORTANT
The airlock macros can be modified according to your indivdual requirements.
Contact your local Carl Zeiss Microscopy service engineer for assistance.
12 Switch on the EHT.
13 Continue working with the FESEM.
5.2 Changing the specimen without using airlock macros
The following procedure describes how to manually perform the steps that are included in the air-
lock macros.
It is assumed that a specimen is located in the specimen chamber. It is to be exchanged for an-
other specimen.
Locking in the
specimen
1
Switch off the EHT.
2
Select
Tools/Goto Panel
from the menu.
3
Double-click on
Airlock
.
