Zeiss 200-mm airlock User Manual Download

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200-mm airlock

Optional airlock for field emission

scanning electron microscopes

Instruction Manual

Carl Zeiss Microscopy - Electron and Ion Beam Microscopy

Enabling the Nano-Age World®

Summary of Contents for 200-mm airlock

Page 1: ...200 mm airlock Optional airlock for field emission scanning electron microscopes Instruction Manual Carl Zeiss Microscopy Electron and Ion Beam Microscopy Enabling the Nano Age World...

Page 2: ...ieval system Violations will be prosecuted The use of general descriptive names registered names trademarks etc in this document does not imply even in the absence of a specific statement that such na...

Page 3: ...eration 11 3 5 Customer service 13 4 Installation 13 5 Operation 14 5 1 Easily changing the specimen by using airlock macros 14 5 2 Changing the specimen without using airlock macros 20 5 3 Storing sp...

Page 4: ...the instructions provided in this document For details on the FESEM refer to the instruction manual of the FESEM Safety instructions The safety instructions in this manual are classified as follows CA...

Page 5: ...elected are printed in italics Text Meaning Click Press the left mouse button Right click Press the right mouse button Double click Click on the left mouse button twice FESEM Field emission scanning e...

Page 6: ...hange procedure Using the 200 mm airlock for any other purpose is not allowed and could be hazardous 2 2 Prevention of accidents and of improper use CAUTION Risk of injury or property damage due to im...

Page 7: ...amber door or the airlock door is open The gate valve can be operated only when chamber door and airlock door are closed properly when the airlock rod is retracted and when the specimen stage is in tr...

Page 8: ...U PO fj OMMJ MNK PK a 3 Description 3 1 Overview 1 Control panel 5 Viewing window 2 Push button with integrated LED 6 Airlock rod 3 LED 7 Knob 4 Airlock door 8 Airlock handle 1 2 3 4 5 6 7 8...

Page 9: ...specimen that is already located in the airlock under vacuum Moreover this mode is selected to leave the airlock when not in use Vent Closes the gate valve and ventilates the air lock Vent mode is us...

Page 10: ...e Alternatively control via control panel is possi ble Maximum pumping time 45 seconds Ventilated with gaseous nitrogen Suitable for all ZEISS standard sample holders except for wafer holders and mask...

Page 11: ...d into the specimen chamber by using the airlock rod Since the volume to be evacuated during specimen exchange is significantly smaller than that of the whole specimen chamber the pumping time will be...

Page 12: ...Operation Sequence Schematics Locking in a specimen Loading the airlock chamber Transferring the specimen from the airlock chamber into the specimen chamber Locking out a specimen Transferring the spe...

Page 13: ...Microscopy locations and authorised service partners can be found at http www zeiss com microscopy 4 Installation The 200 mm airlock is either factory installed or retrofitted by authorised Carl Zeiss...

Page 14: ...The Airlock panel opens 3 Click on Specimen Change Clicking on the Specimen Change button starts a pre defined macro that includes the following steps The EHT is switched off The column chamber valve...

Page 15: ...ransfer the sample holder from the specimen chamber into the airlock by using the airlock rod a Insert the airlock rod b Turn the knob clockwise in order to attach the sample holder to the airlock rod...

Page 16: ...NS PO fj OMMJ MNK RK l 5 Change to Vent mode On the control panel press Vent Alternatively On the Airlock panel click on Vent The gate valve is closed The airlock chamber is ventilated with nitrogen...

Page 17: ...exchange the whole sample holder a Detach the sample holder from the airlock rod by turning the knob counter clockwise b Remove the sample holder from the dovetail c Mount the exchange sample holder o...

Page 18: ...The gate valve opens The illumination is turned on in the airlock chamber 9 Transfer the sample holder from the airlock into the specimen chamber by using the air lock rod a Insert the airlock rod int...

Page 19: ...ontact your local Carl Zeiss Microscopy service engineer for assistance 12 Switch on the EHT 13 Continue working with the FESEM 5 2 Changing the specimen without using airlock macros The following pro...

Page 20: ...of damaging FESEM or specimen if specimen stage is at a short working distance Ensure there is enough space between objective lens and specimen before moving the specimen stage 5 Move the specimen st...

Page 21: ...er mode On the control panel press Transfer Alternatively Click on Transfer on the Airlock panel The airlock is evacuated The gate valve opens The illumination is turned on in the airlock chamber 7 Co...

Page 22: ...n the control panel press Vent Alternatively On the Airlock panel click on Vent The gate valve is closed The airlock chamber is ventilated with nitrogen 9 Click on Open Column Chamber Valve 10 Switch...

Page 23: ...k 1 Insert the specimen into the airlock 2 Retract the airlock rod 3 Change to Store mode Press Store Alternatively Click on Store in the Airlock panel The gate valve closes while the vacuum in the ai...

Page 24: ...move the airlock rod from the airlock 1 Retract the airlock rod 2 Change to Vent mode 3 Open the airlock 4 Remove the sample holder 5 Remove the airlock rod a Slightly turn the silver plug 1 counter c...

Page 25: ...d 1 Change to Vent mode 2 Remove the blind plug 3 Take the airlock rod and move the white plug to the inner side of the airlock rod 4 Mount the airlock rod to the orifice Note the recesses 1 at the or...

Page 26: ...r and or airlock door is are open Close chamber door and or airlock door No compressed air Check the compressed air supply Problem in the electrical system Contact the Carl Zeiss Microscopy service Tr...

Page 27: ...son s Recommended action s Stage LED is flashing perma nently Stage is not in transfer position Move the specimen stage to the transfer position 1 Select Stage Store Recall from the menu 2 Double clic...

Page 28: ...contaminating the vacuum system when using unsuitable lubricants Only use TEM oil 300 for lubricating the airlock rod Procedure 1 Retract the airlock rod 2 Spread a drop of TEM oil 300 across the rod...

Page 29: ...eclare that the component mentioned above fulfils all the relevant provisions of Directive 2006 42 EC Directive 2004 108 EC Standard EN 60204 1 Standard EN 61000 6 4 Standard EN 61000 6 2 Standard EN...

Page 30: ...ve 11 Control panel 8 9 Customer service 13 D De installation 29 Disposal 29 Door Open 9 Dovetail 18 E Error 9 Error LED 7 G Gate valve 10 11 I Illumination 18 21 Initialise stage 26 Installation 13 I...

Page 31: ...cted 9 S Safety devices 7 Safety instructions 4 Safety symbol 4 Sample holders 10 Service 6 Signal word 4 Specimen chamber 11 Specimen stage 11 Stage Ready 9 Store 9 Storing 23 SUPRA 6 T Technical dat...

Page 32: ...ge Cambridgeshire CB1 3JS UK microscopy zeiss com Carl Zeiss Microscopy LLC One Zeiss Drive Thornwood NY 10594 USA microscopy zeiss com Plus a worldwide network of distributors www zeiss com microscop...

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