44
Xtr
a Va
c
10
A 25
0VA
C
10
A 25
0VA
C
DC 24
V
DC 24V
DC 24
V
Iu
:
3
2
A
69
0VA
C
DC 24
V
DV 24
V
3O
220
V
DC 24
V
A
C
22
0V
1O
20A
0,
220
/ 0
,5
0
v
10
0-24
0 VA
C 1
A
TZ
71
44
TZ
71
44
SV
DA-
8
SVDA0
W-
8
SVDA0
W-
8
P1-
32/V/
S
V
B
-SW
VX
Z23
60
VX
Z23
60
R 5 002
5
0
AH
3-
3
PD-
4
5
B
ASU
N
ASU
N
ASU
N
MOE
LLE
R
SM
C
SM
C
SHI
NN JI
A
MEAN
W
E
LL
Q1
1
2
NO
COM
NO
COM
Y3
Y2
.2
Y2
.1
Y4
Y1
M
3 ~
2
1
5
8
2
1
3
4
5
6
7
8
PE
0V
5 0V
0V
~
-
1
1
1
1
1
1
1
1
1
1
1
1
1
1
APR-
3
TE
ND
TE
ND
BUS
CH
ANL
Y
ANL
Y
Sea
ling l
ine
Li
m
it sw
itc
h
Li
m
it sw
itc
h
Sea
ling v
a
lv
e
B ga
s v
a
lv
e
A gas v
al
v
e
PCB
P
o
w
e
r sw
itch
Air
in
le
t valv
e
Vac
uum va
lv
e
motor
S
e
al
in
gT
IME
R
Phase r
eve
rs
al
Sea
ling tr
an
sf
o
rme
r
P
o
w
e
r su
pply
R1
LS
2
LS
1
Y3
Y2
.2
Y2
.1
PCB
Q1
Y4
Y1
M1
K1
TI
MER
PR
T1
PW
Ill
u
s
tra
tio
n
Rema
rk
s
Supp
lie
r
Q'ty
Tec
hni
cal
d
at
e
Item desi
g
na
tio
n
D
e
s
cr
ip
tio
n &
fu
nction
ST
AND
AR
D
CHE
CKE
D
PROCES
SE
D
NAME
DATE
PAGE
E
D
C
B
A
E
D
C
B
A
MC
1
MC1
M
agn
eti
c
St
a
rte
rs
AC 220
V
1
DC
2
4V
1
TEN
D
MOE
LLE
R
D
IL00
AM
Xt
ra V
a
c
Xt
ra V
a
c
Electric part list
6
2A
Fu
se
s
FU
Jenn
F
e
n
g
MMG
52
Sea
ling m
a
gnet
ic
c
o
nt
a
c
to
r
S
J-
1
-300
TC
11
Summary of Contents for 860A8
Page 3: ...2 5 3 Storage condition 5 4 Operation environment V1 02 ...
Page 5: ...4 ...
Page 19: ...18 ...
Page 21: ...20 ...
Page 23: ...22 ...
Page 26: ......
Page 28: ...27 ...
Page 30: ...29 ...
Page 32: ...31 ...
Page 34: ...33 ...
Page 47: ...46 A B C D E A B C D E PAGE DATE NAME PROCESSED CHECKED STANDARD Vacuum system ...
Page 48: ...47 C C1 STANDARD CHECKED PROCESSED NAME DATE PAGE E D C B A E D C B A Gas system ...