background image

3.   Select the 

INTENSITY 

box from the Measurement Options window.  Arrange both 

windows side by side. 

4.   Select 

PSI 

from the measurement type box and set the following settings to your 

desired field of view.  (

The field of view for several optics combinations are in Table 1

)  

Resolution = Full 
Objective = 5X 
FOV = 1.0X 

6.   Using the Intensity window, setup the hardware for coarse focusing by going under 

HARDWARE 

FILTER 

 

PSI LOW MAG.

 

7.   Focus onto the edge of your sample by slowly lowering the objective (You may need 

to translate the stage to locate this edge).  

DO NOT

 allow the objective to contact any 

surface. 

8.   Adjust the intensity as needed to avoid saturation using the slidebar (saturation is 

indicated by red fringes).  After focusing on the edge of the mirror, change the 
objective to 20X and find the best focus on the surface.  Dark fringes should now be 
visible on this surface. 

9.   Hold down the “Tilt” button and use the “Tilt and Tip” knobs to display 3-4 fringes. 
10. Now setup the hardware for the final focusing by going under 

HARDWARE 

FILTER 

 

PSI HIGH MAG, 

then readjust your final focus and 

intensity

.  

The intensity should be set to just below the saturation limit of the CCD 

camera. 

11. Change any 

PSI Options

: at this time.  For multiple measurements, under Averaging 

check the 

ON 

box.  For Modulation Threshold (see definitions). 

11. After setting all options, Select 

OK 

from the Measurement Options window. 

12. Close the intensity window.

 

13. To measure your sample, Select 

NEW

.

 

 

 
Analyzing your data 
 

In order the analyze your measurement data to return particular results about the test part, 
several display analysis options are available.  The following procedures include the 
commands available on the Analysis menu. 
 

2D Display 
 

2D Analysis displays profile slices taken from the surface height data.  You can adjust the 
locations and size of the region from which the slices are taken.  To access the 2D Plot 
choose 

ANALYSIS 

 

PROCESSED 

 

2D PROFILE, 

by choosing 

ANALYSIS 

 

OTHER 

 

OPTIONS 

 

2D PLOT

 

3D Plot 
 

3D Plot will create a 3-dimensional rendering of the surface area.  Choose 

ANALYSIS 

 

PROCESSED 

 

3D

.  Right click on the graphic display to access plot 

and analysis options.  These options will allow you to change the view angle, highlights, 
shading and/or to add perspectives to the plot. 

Summary of Contents for NT3300

Page 1: ...OPERATING INSTRUCTIONS FOR Wyko NT3300 Optical 3D Profiling System UCLA Nanoelectronics Research Facility 420 Westwood Plaza 14 131A Engineering IV Building Los Angeles CA 90095 Rev 01 28 05 ...

Page 2: ...necessary to successfully acquire and interpret your measured data System The automated Wyko NT3300 system consists of two parts an operator control station and a motorized sample station figure on the front cover The sample station houses the optical lenses translation motors and computer The operator control tray shown in Fig 1 has a joystick for controlling the x y motorized stage and the motor...

Page 3: ...ode a piezoelectric transducer PZT within the IOA head precisely shifts the interference pattern six times each shift is captured to produce one frame of data These frames are then reconstructed to form a topographical map of the measured surface II Starting the Wyko 1 Check the logbook to verify that there are no documented problems with the Wyko 2 Make sure to sign the logbook BEFORE every use 3...

Page 4: ...e visible on this surface 9 Hold down the Tilt button and use the Tilt and Tip knobs to orient 3 4 fringes perpendicular to the step 10 Now setup the hardware for the final focusing by going under HARDWARE FILTER VSI then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Select the CALIBRATE box from the Measurement Options ...

Page 5: ...ded to avoid saturation using the slidebar Once you find the best focus at the TOP of the feature step dark fringes should now be visible on this surface 8 Hold down the Tilt button and use the Tilt and Tip knobs to orient 3 4 fringes perpendicular to the step 9 Now setup the hardware for the final focusing by going under HARDWARE FILTER VSI then readjust your final focus and intensity 10 After yo...

Page 6: ...he best focus on the mirrors surface Dark fringes should now be visible on this surface 9 Hold down the Tilt button and use the Tilt and Tip knobs to display 3 4 fringes 10 Now setup the hardware for the final focusing by going under HARDWARE FILTER PSI HIGH MAG then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Select t...

Page 7: ... FILTER PSI HIGH MAG then readjust your final focus and intensity The intensity should be set to just below the saturation limit of the CCD camera 11 Change any PSI Options at this time For multiple measurements under Averaging check the ON box For Modulation Threshold see definitions 11 After setting all options Select OK from the Measurement Options window 12 Close the intensity window 13 To mea...

Page 8: ...l four corners of your desired area to be measured Click Finish when done 5 You may have to re enter or re Teach the dimensions of your die if any part of the measurement area was outside the corners of the test pattern IV Turning off the Wyko If you will not be using the Wyko within the next hour or the time is after 5pm please shut down the machine as follows 1 Close Wyko Vision 3 22 2 Close win...

Page 9: ...Download Veeco Vision 3 43 www nanolab ucla edu downloads vision zip ...

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