3. Select the
INTENSITY
box from the Measurement Options window. Arrange both
windows side by side.
4. Select
PSI
from the measurement type box and set the following settings to your
desired field of view. (
The field of view for several optics combinations are in Table 1
)
Resolution = Full
Objective = 5X
FOV = 1.0X
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE
→
FILTER
→
PSI LOW MAG.
7. Focus onto the edge of your sample by slowly lowering the objective (You may need
to translate the stage to locate this edge).
DO NOT
allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). After focusing on the edge of the mirror, change the
objective to 20X and find the best focus on the surface. Dark fringes should now be
visible on this surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to display 3-4 fringes.
10. Now setup the hardware for the final focusing by going under
HARDWARE
→
FILTER
→
PSI HIGH MAG,
then readjust your final focus and
intensity
.
The intensity should be set to just below the saturation limit of the CCD
camera.
11. Change any
PSI Options
: at this time. For multiple measurements, under Averaging
check the
ON
box. For Modulation Threshold (see definitions).
11. After setting all options, Select
OK
from the Measurement Options window.
12. Close the intensity window.
13. To measure your sample, Select
NEW
.
Analyzing your data
In order the analyze your measurement data to return particular results about the test part,
several display analysis options are available. The following procedures include the
commands available on the Analysis menu.
2D Display
2D Analysis displays profile slices taken from the surface height data. You can adjust the
locations and size of the region from which the slices are taken. To access the 2D Plot
choose
ANALYSIS
→
PROCESSED
→
2D PROFILE,
by choosing
ANALYSIS
→
OTHER
→
OPTIONS
→
2D PLOT
.
3D Plot
3D Plot will create a 3-dimensional rendering of the surface area. Choose
ANALYSIS
→
PROCESSED
→
3D
. Right click on the graphic display to access plot
and analysis options. These options will allow you to change the view angle, highlights,
shading and/or to add perspectives to the plot.