III. VSI – Mode (Vertical Scanning Interferometry):
VSI – Calibration:
1. Select the
MEASUREMENT OPTIONS
icon
from the toolbar.
2. Select the
INTENSITY
box from the Measurement Options window. Arrange both
windows side by side.
3. Select
VSI
from the measurement type box and verify the following settings:
Resolution = Full
Objective = 5X
FOV = 1.0X
4. Raise the objective by turning the “Z-Axis” control knob clockwise while holding
down the “Fast” button.
5. Place the
VSI
calibration sample (Fig. 2B) on the stage.
6. Using the Intensity window, setup the hardware for coarse focusing by going under
HARDWARE
→
FILTER
→
PSI LOW MAG.
7. Focus on the edge of the glass by slowly lowering the objective (You may need to
translate the stage to locate this edge).
DO NOT
allow the objective to contact any
surface.
8. Adjust the intensity as needed to avoid saturation using the slidebar (saturation is
indicated by red fringes). Once you have focused on the edge of the glass, find the
best focus at the TOP of the feature/step, dark fringes should now be visible on this
surface.
9. Hold down the “Tilt” button and use the “Tilt and Tip” knobs to orient 3-4 fringes
perpendicular to the step.
10. Now setup the hardware for the final focusing by going under
HARDWARE
→
FILTER
→
VSI,
then readjust your final focus and intensity
.
The
intensity should be set to just below the saturation limit of the CCD camera.
11. Select the
CALIBRATE
box from the Measurement Options window.
12. Select the
AUTO CALIBRATE
option.
13. Type in the
STEP HEIGHT VALUE
that is written on the calibration standard
(9.898
µ
m) then press
OK
and wait for the Wyko to finish calibrating.
14. Select
OK
to complete the calibration.
15. Repeat steps 6-13 to calibrate any remaining objectives that will be used.
16. When calibration is complete, raise the objective and carefully remove the calibration
standard and place it back into its container.
VSI – Measurements:
1. Place your sample in the center of the table. If your sample is small and requires
stabilization, turn on the vacuum located on the floor and verify that the switchbox
located on top of the CRT monitor is set to position “A”
2. If the Measurements Options window isn’t already open, open it by clicking on the
MEASUREMENT OPTIONS
icon
from the toolbar.
