Vistec EBPG5200, Notes, Page: 3 / 26

Vistec Lithography manual Page i
EBPG5200 Linux Workstation Notes Notes
Table of Contents
1. Introduction ...................................................................................... 1
1.1. Scope of this document ....................................................................................... 1
2. System specific information ........................................................... 2
3. How to use projects ......................................................................... 3
4. How to maintain BEAMS ................................................................. 4
4.1. Beams-script ........................................................................................................ 4
4.2. Upgrading beams................................................................................................. 4
5. Documentation ................................................................................. 5
6. Network ............................................................................................ 6
7. Raid 1 storage .................................................................................. 7
7.1. sas2ircu ................................................................................................................ 7
7.2. Failing disk ........................................................................................................... 7
8. Mail Setup ......................................................................................... 8
9. Linux Tools....................................................................................... 9
10. Backup ............................................................................................ 10
11. Linux (Re)Installation .................................................................... 11
11.1. Standard from a kickstart file ............................................................................. 11
11.2. Manual Linux installation ................................................................................... 12
12. Vacuum Controller (RE)install ...................................................... 14
12.1. Principle ............................................................................................................. 14
12.2. Create bootable USB stick ................................................................................. 14
12.3. Make the Automation PC USB stick bootable. .................................................. 15
12.4. Installation .......................................................................................................... 16
12.5. Trouble shooting ................................................................................................ 17
13. Vistec access to the machine ....................................................... 18
14. RGS ................................................................................................. 19
14.1. RGS through a ssh tunnel ................................................................................. 19
15. Appendix A ..................................................................................... 20