Veeco Dimension 3100, Manual

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Facilities Requirements
Acoustic/Vibration Isolation Systems
Rev. D Dimension 3100 Manual 45
3.3.2 VT-103-3K Dimensions, Utilities and Clearance
An isolation hood/table is required for acoustic and vibration isolation of the Dimension 3100. The
table must be moved to its final location before Veeco personnel can install and train on the SPM.
Figure 3.3f VT-103-3K - Front View
Figure 3.3g VT-103-3K - Side View with Acoustic Hood Open and Closed
34.2"
869 mm
4.0" square
102 mm
27.3"
693 mm
50.0"
1270 mm
4006
62.0"
1575 mm
32.2"
818 mm
15.0"
381 mm
4007