Veeco Dektak 150, User Manual

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Scan Routine Parameters 7-9
Scan Type
The Scan Type parameter allows you to specify which type of scan to be run.
1 Click any parameter in the Scan Parameters section of the Scan Routines window (see
Figure 7-1
) to
display the Nominal Parameters tab of the Scan Parameters dialog box.
2 In the Scan Type section, choose one of the following scan types from the drop-down list (see
Figure 7-9
).
•
Standard Scan : A normal scan type, in which the scan is performed across the surface of a sample. The
tower is nulled before each scan; therefore, each successive scan has its own reference point.
•
Static Tower Scan : A special scan type, in which the scan is performed across the surface of a sample,
but the tower is nulled before only the first scan. Each successive scan therefore uses the same initial
reference point.
•
Static Scan : A special scan type, in which the scan is performed at the same point (the stage does not
move). The tower is nulled before the scan. This scan type is primarily used for determining the noise and
drift of the system.
•
Map Scan : The Dektak 3D Mapping Option allows Dektak surface profiler customers to measure, analyze,
and view surface contour data in three dimensions (X, Y, and Z). See
Appendix E
for complete
information on 3D mapping.
•
Deflection Scan (optional) : See
Deflection Scan on page 7-14
.
3 Click OK to close the dialog box and enter the scan type into the scan program.
Figure 7-9: Scan Parameters Dialog Box: Scan Type
Stylus Force
You can set the stylus force from 1mg to 15 mg force. The Stylus Force parameter allows you to
adjust the stylus force. If your system includes the N-Lite Option, you can adjust the stylus force
down to 0.03 mg. For more information, see
Appendix F .