Veeco 004-210-000, Instruction Manual

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Calibration, Maintenance, Troubleshooting and Warranty
SPM Calibration Overview
280 MultiMode SPM Instruction Manual Rev. B
15.1.2 Calibration References
As described above, each scanner exhibits its own unique sensitivities; therefore, it is necessary to
precisely measure these sensitivities, then establish software parameters for controlling the scanner.
This task is accomplished with the use of a calibration reference (see
Figure 15.1c ).
Figure 15.1c Veeco Silicon Calibration Reference
This calibration reference consists of a silicon substrate having a regular series of pits, each 200nm
deep. Pits are spaced apart on 10µm centers. This reference is typically used to calibrate J scanners.
For calibrating E or A scanners, please refer to the table below. Other, similar surfaces are available
with different dimensions. Atomic-scale calibrations are generally carried out with mica or
graphite, which exhibit very regular atomic lattices. Calibration references serve as the primary tool
by which SPMs are calibrated. They serve as measuring sticks with which to gauge scanner
displacement for a given voltage.
The SPM should be capable of measuring a calibration reference with an accuracy of 2 percent or
better while scanning at the maximum
Scan size setting. By using fi ne calibration techniques, it is
possible to calibrate the SPM with greater accuracy.
Table 15.1b Recommended Calibration Model # Associated with Specific Scanners
Scanner
HOPG
(STM)
MICA
(AFM)
498-000-026
498-000-025 PG
ISGS
Calibration
J or JV X-Y
√ see Align Calibration Reference:
Section 15.2.2
Z
√ see Calibrating Z:
Section 15.8
E or
EV X-Y
√ see Align Calibration Reference:
Section 15.2.2
Z
√ see Calibrating Z:
Section 15.8
A X-Y
√ √
see Calibration of “A” Scanners for Atomic-scale
Measurement:
Section 15.9
Z
√ see Calibrating Z:
Section 15.8
200nm deep
10µm 10µm