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VAT Series 612 DN 63-250, Installation, Operating, & Maintenance Instructions

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VAT Series 612 DN 63-250 Installation, Operating, & Maintenance Instructions Download Page 23

 

Installation, Operating & Maintenance Instructions 

Series 612 DN 63-250 (I.D. 2.5“ - 10”), RS485

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Switzerland 

Tel +41 81 771 61 61   Fax +41 81 771 48 30   [email protected]   www.vatvalve.com

 

289857EA

 

2011-07-13 

23/76 

 

3 Operation 

 
 

 

 

Valve opening 

Fingers and objects must be kept out of the valve opening and away from moving 
parts. Risk of injury. 

Do not connect the controller to power before the valve isn’t installed complete into the 
system. 

 
 

3.1 Introduction 

 
This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control 
mode or a position control mode. 
In both cases local or remote operation is possible. 
 

 

Summary of Contents for Series 612 DN 63-250

Page 1: ...ut analog outputs 15V SPS PFO 612 CK 2 sensor inputs analog outputs 15V SPS PFO SPS Sensor Power Supply PFO Power Failure Option configured with firmware 612P 1E 65 The fabrication number is indicated...

Page 2: ...ofilms or any other reproduction processes nor may it be manipulated with electronic systems duplicated or distributed without written permission from VAT Offenders are liable to pay damages The origi...

Page 3: ...onnection 15 VDC sensors with optional SPS module 21 2 6 6 RS485 interface connection 22 2 6 7 Service port connection 22 3 Operation 23 3 1 Introduction 23 3 1 1 Local operation 24 3 1 2 Remote opera...

Page 4: ...om 289857EA 2011 07 13 4 76 5 Maintenance repairs 60 5 1 Maintenance procedures 61 5 2 Option board 66 5 2 1 Durability of power fail battery 66 5 2 2 Retrofit replacement procedure 67 6 Drawing 70 7...

Page 5: ...pplications are only allowed with the written permission of VAT 1 1 Technical data Control and actuating unit Power input 1 24 VDC 10 0 5 V pk pk max connector POWER 612 A 612 G 612 C 612 H 38 W max o...

Page 6: ...eak max 0 5 ADC or 0 5 A peak max 10 W max PFO 4 battery pack 612 C 612 H Charging time Durability 2 minutes max up to 10 years 25 C ambient refer to Durability of power fail battery for details Ambie...

Page 7: ...10E 5 mbar l s Aluminum nickel coated 612 I 1 x 10E 9 mbar l s Stainless steel 612 E 1 x 10E 9 mbar l s Cycles until first service 2 000 000 Admissible operating temperature 10 C to 150 C Mounting pos...

Page 8: ...differential pressure on plate 1000 mbar 1000 mbar 800 mbar 300 mbar 150 mbar Min controllable conductance Cmin N2 molecular flow 0 45 l s 0 65 l s 0 85 l s 1 7 l s 2 8 l s Conductance in open positio...

Page 9: ...13 9 76 2 Installation 2 1 Unpacking Valves DN63 2 and larger must not be lifted solely by the actuator 2 2 Installation into the system Fingers and objects must be kept out of the valve opening and a...

Page 10: ...ensor s 2 according to the recommendations of the sensor manufacturer and directives given under Requirements to sensor connection 4 Connect sensor cable 3 to sensor s and then to valve connector SENS...

Page 11: ...ize max tightening torque Nm max tightening torque lbs ft mm inch ISO F ISO F 63 2 8 10 6 8 80 3 8 10 6 8 100 4 8 10 6 8 160 6 13 15 9 11 200 8 13 15 9 11 250 10 13 15 9 11 Refer to Spare parts and ac...

Page 12: ...4 1 Admissible forces for valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve The stress has to be relieved by suitable mea...

Page 13: ...Admissible forces at controller Attention Do not pushing shocking load or stressing the valve controller Do not deposit anything at valve controller The admissible force at valve controller in regard...

Page 14: ...ly connected to the chamber by a pipe To maintain that the response time is not degraded by this connection it needs to meet the following requirements Inner diameter of connection pipe 10 mm Length o...

Page 15: ...th max B1 min B2 min d1 d2 copper tinned 200 mm 25 mm 25 mm 4 5 mm customized Note Connection plates of ground strap must be total plane for a good electrical contact Note The connection point at chas...

Page 16: ...4 VDC sensors Refer to chapter 2 6 3 Power and sensor connection 24 VDC sensors for schematic and correct wiring External 15 VDC supplied to POWER connector is feed through to SENSOR connector to supp...

Page 17: ...se shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do no...

Page 18: ...rt as possible but locate it away from noise sources Connect the 24 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors...

Page 19: ...Use shielded sensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do...

Page 20: ...rt as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect other pins that may damage sensors...

Page 21: ...ensor cable s Keep cable as short as possible but locate it away from noise sources Connect the 15 VDC sensors at DB 15 female sensor connector exactly as shown in the drawing above Do not connect oth...

Page 22: ...service cable and software from VAT You can either use our freeware Control View which can be downloaded from www vatvalve com or purchase our Control Performance Analyzer Alternatively the VAT Servi...

Page 23: ...eration Valve opening Fingers and objects must be kept out of the valve opening and away from moving parts Risk of injury Do not connect the controller to power before the valve isn t installed comple...

Page 24: ...eric monitoring basic diagnostic Control Performance Analyzer supports parameter setup manual control sequence control numeric and graphical monitoring data recording data analysis advanced diagnostic...

Page 25: ...e cleaned or an obstruction is present A service request is indicated when the control unit detects that motor steps are apparently not effective This may happen when the valve unit is heavily contami...

Page 26: ...2 minutes max All parameters are stored in a power fail save memory 3 5 Display information There is a 4 digit display located on the panel It displays configuration status and position information Fo...

Page 27: ...rozen activated H ZERO running Z LEARN running L Safety mode established Refer to Safety mode for details D 0 100 valve position 0 closed 100 open Power failure F Service request 1 valve requires clea...

Page 28: ...RO Compensation of the sensor offset voltage Refer to chapter ZERO for details 5 LEARN Determination of the vacuum system characteristic to accommodate the PID controller Refer to chapter LEARN for de...

Page 29: ...485 2 RS485 Point to Point bbb RS485 address 0 255 c 0 full duplex 1 half duplex xxx 000 reserved do not change Note Each element is separated with square brackets for clarity Square brackets are not...

Page 30: ...witch to LOCAL 3 Go to Tools Terminal and send setup command according to application needs possibility of adjustment see below For Digital input to change the configuration s 2601abcdef CR to read th...

Page 31: ...peration Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 setup commands for details 1 Do power up configuration in menu Setup Valve 2 Do power fail c...

Page 32: ...cording to instruction below The result of LEARN is a pressure versus valve position data table This table is used to adapt the PID parameters The data table is stored in the device memory which is po...

Page 33: ...oint Pa m 3 s pWP pressure of working point Pa qWP CWP pWP CWP required conductance of working point l s qWP gasflow of working point mbar l s pWP pressure of working point mbar qWP CWP 78 7 pWP CWP r...

Page 34: ...ing to the position setpoint Local operation Control View Control Performance Analyzer or Service Box 2 Remote operation Refer to chapter RS485 control commands for details Select or enter position se...

Page 35: ...en the pressure gauges Max ratio is 100 1 It is required that the high range pressure gauge is connected to sensor 1 input and the low range pressure gauge to the sensor 2 input Between 90 and 100 of...

Page 36: ...ely below Strictly keep the procedure order Required information for support Go to Tools Create Diagnostic File in Control View resp Control Performance Analyzer and save file Pressure flow gas condit...

Page 37: ...ds for details Set gain factor in menu Setup Control Parameter Send PID CONTROLLER CONFIGURATION 3 10 2 2 Sensor delay adjustment Sensor delay adjustment effects Stability Default value is 0 Adjustmen...

Page 38: ...nding on units you are familiar with t Setpoint Ramp Adjustment procedure 1 Start with optimal gain factor and sensor delay time according to preceding tuning steps 2 Control a typical pressure flow s...

Page 39: ...e optimal gain factor sensor delay time and setpoint ramp according to preceding tuning steps 2 Open valve 3 Control a typical pressure flow situation 4 Repeat from step 2 with slower valve speed unti...

Page 40: ...61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 40 76 Active digital inputs have higher priority than RS485 commands a Configuration with switches for digital inputs Not...

Page 41: ...g Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 41 76 b Configuration with voltage source for digital inputs Note Do not connect other pins t...

Page 42: ...hown N nodes are connected in a multipoint RS485 network A termination resistance is necessary on both ends of the line to eliminate reflections Use 120 resistors R on both ends The RS485 network must...

Page 43: ...se RS485 control command have been received The function is activated when optocoupler is on in non inverted configuration The function is activated when optocoupler is off in inverted configuration C...

Page 44: ...necessary Commands and values are case sensitive Data length of value depends on command Number of characters is specified in the description Some commands do not require the value element CR is Carr...

Page 45: ...ading of position SETPOINT Note Reading returns position setpoint only in case pressure control is not selected Set H CR LF H CR LF HOLD This function stops the valve at the current position It is eff...

Page 46: ...on 2 POSITION CONTROL 3 CLOSED 4 OPEN 5 PRESSURE CONTROL 6 HOLD 7 LEARN 8 INTERLOCK OPEN by digital input 9 INTERLOCK CLOSED by digital input C power failure D safety mode E fatal error read FATAL ERR...

Page 47: ...URE CONTROL STATUS data length 8 characters a 0 no pressure control e g if position control is selected 1 wide range control PD control 2 close up control PID control cdefgh reserved do not use The co...

Page 48: ...sent c 0 power failure battery ready 1 power failure battery not ready d 0 compressed air supply ok 1 compressed air supply not ok efgh reserved do not use This function returns warning information ab...

Page 49: ...ing LEARN gasflow missing g 0 ok 1 sensor unstability during LEARN h reserved do not use This function checks the status of LEARN and indicates if the conditions during LEARN were ok Get i 34 CR LF i...

Page 50: ...one cycle Get i 72 CR LF i 72 xxxxxxxxxx CR LF POWER UP COUNTER data length 10 characters xxxxxxxxxx number of power ups This function returns the number of control unit power ups Get i 80 CR LF i 80...

Page 51: ...communication to service port is interrupted the valve will automatically change to remote operation Set s 20 abcdefgh CR LF s 20 CR LF Get i 20 CR LF i 20 abcdefgh CR LF INTERFACE CONFIGURATION 1 da...

Page 52: ...1 abcdefgh CR LF s 01 CR LF Get i 01 CR LF i 01 abcdefgh CR LF SENSOR CONFIGURATION data length 8 characters a 0 no sensor 1 1 sensor operation sensor 1 input 2 2 sensor operation with automatic chang...

Page 53: ...ange between the valve and the host computer for POSITION PRESSURE and SENSOR READING Note In case ZERO has been performed gauge offset for PRESSURE and SENSOR READING is compensated Note In case 2 se...

Page 54: ...starting with a zero xxxxxxx Pressure limit for LEARN value depends on configuration refer to RS485 setup commands RANGE CONFIGURATION for details This command starts LEARN By OPEN VALVE CLOSE VALVE...

Page 55: ...amp 0 0 0 1 0 5 2 1 0 3 1 5 4 2 0 5 2 5 6 3 0 7 3 5 8 4 0 9 4 5 A 5 0 B 5 5 C 6 0 D 6 5 E 7 0 F 7 5 G 8 0 H 8 5 I 9 0 J 9 5 K 10 0 efgh 0000 reserved do not change This command selects gain factor sen...

Page 56: ...verflow to many characters E 000002 CR LF Commands CR or LF missing E 000010 CR LF missing E 000011 CR LF Unknown command E 000020 CR LF E 000021 CR LF Invalid value E 000022 CR LF E 000023 CR LF Valu...

Page 57: ...s E 21 and position is 009999 fatal error rotation angle of valve plate limited during power up Valve plate centric adjusted Valve unit heavy contaminated Valve plate mechanically obstructed Adjust va...

Page 58: ...tails Refer to Display shows M100 in this table Display shows M C Maintenance mode active Pin 14 of service connector is connected to ground Plate will close Further movement of plate is blocked Note...

Page 59: ...for details Select PRESSURE CONTROL mode Refer to Pressure control for details Perform LEARN Refer to Setup procedure for details PRESSURE CONTROL not optimal Setup done completely LEARN done ZERO per...

Page 60: ...performed by the customer or has to be carried out by VAT The fabrication number on the valve made in Switzerland Fabrication No A Fabrication number has always to be specified All supplies e g compr...

Page 61: ...maintenance period is the lifetime of the vacuum grease being limited under increased temperature In this case grease will separate to PTFE and oil The oil may flow and contaminate the valve parts VAT...

Page 62: ...surface Attention Do not move the plate by hands when control and actuating unit is installed Depending on flange screws 3 Unfasten clamp coupling Allen Wrench 2mm Remove control and actuating unit f...

Page 63: ...ngs 9 Clean shaft feedthrough and valve body Lint and dust free cloth soaked with isopropyl alcohol 10 Lubricate seal contact surface of valve body with a slight film of vacuum grease 0 025 ml 11 Lubr...

Page 64: ...l 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 64 76 Description Required tool Mount mechanical unit to valve body 16 Assemble mechanical unit in reverse or...

Page 65: ...9 Center plate with feeler gauge as shown Size Feeler gauge mm 63 0 04 80 0 06 100 0 06 160 0 06 200 0 08 250 0 1 Assemble and adjust plate 20 Tighten plate screws with 2 Nm Allen Wrench 3mm Adequate...

Page 66: ...re PFO function the option board must be replaced after battery life has expired For ordering number of the modules refer to Spare parts and accessories 5 2 1 Durability of power fail battery The curv...

Page 67: ...tion All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage Top view on control and actuating unit with panel removed No...

Page 68: ...el 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 68 76 Description Required tool 1 Remove the panel screws Pozidriv screw driver size 1 2 Remove female screw...

Page 69: ...board 6 Remove or replace interface board 7 Remove or replace option board 8 Insert master board and interface board in reverse order as disassembled at correct positions see steps 6 5 9 Insert option...

Page 70: ...enance Instructions Series 612 DN 63 250 I D 2 5 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 70...

Page 71: ...the appropriate spare parts are supplied 7 1 Control and actuating unit Item Description Valve size Product ordering number All sizes 612 Control and actuating unit On request Option board with SPS m...

Page 72: ...valve unit 490143 489471 490093 489026 491729 489827 2 Spare parts kit mechanical unit 490144 489464 490094 489022 491728 489910 3 Spare parts kit valve body 232273 232274 232275 243026 237716 241204...

Page 73: ...trol View software for Windows 248126 free download from www vatvalve com or available on order against charge Service cable PC to valve connection 230327 free wiring information available for downloa...

Page 74: ...ption Valve size Product ordering number DN 63 2 61236 DN 80 3 61238 DN 100 4 61240 DN 160 6 61244 DN 200 8 61246 Aluminum 32036 QAZV 32038 QAZV 32040 QAZV 32044 QAZV 32046 QAZV Centering ring with Vi...

Page 75: ...or expense whether consequential special incidental direct or otherwise caused by arising out of or connected with the manufacture delivery including any delay in or failure to deliver packaging stor...

Page 76: ...e Instructions Series 612 DN 63 250 I D 2 5 10 RS485 VAT Vakuumventile AG CH 9469 Haag Switzerland Tel 41 81 771 61 61 Fax 41 81 771 48 30 CH vatvalve com www vatvalve com 289857EA 2011 07 13 76 76 Th...

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