VAT PM-4 Installation, Operating And Maintenance Download Page 13

 

ce

rti

fied

 QM-Sys

tem

g

ep

rüfte

s Q M-S

ys

te

m

ISO 9001

EN 29001

 

Installation, Operating, and Maintenance Instructions 

Series 64.1

 

 

 

 

 

VAT Vakuumventile AG, CH-9469 Haag, Schweiz 

Tel ++41 81 771 61 61   Fax ++41 81 771 48 30   Email [email protected]   http://www.vatvalve.com

 

225590EE

 

2005-04-26 

13/16 

 

9.3.1 Control commands 

Note: 

<CR> = Carriage Return (0D hexadecimal); <LF> = Linefeed (0A hexadecimal); _ = Space (20 hexadecimal) 

Control commands starting with ‘U:’ are accepted in REMOTE and LOCAL mode. All other control commands are accepted only, when the 
PM controller is in REMOTE mode. 

Control commands are acknowledged by one or two acknowledgements: 

1st acknowledgement: 

Confirmation that command has been received, within 40 ms 

2nd acknowledgement: 

If enabled, confirmation that command has been executed 

Please refer to chapter ‚9.2 RS232C Interface Configuration‘ to select 1 or 2 command acknowledgements. 

Description 

Commands 

Acknowledgements  
2nd acknowledgement in 
parenthesis 

Examples / Explanation 

Remote Operation 

U:01<CR><LF> U:<CR><LF> 

=  switch to Remote 

Local Operation 

U:02<CR><LF> U:<CR><LF> 

=  switch to Local 

Close valve 

C:<CR><LF> C:<CR><LF> 

(C:<CR<<LF>) 

= close 

Open valve 

O:<CR><LF> O:<CR><LF> 

(O:<CR<<LF>) 

= open 

Select valve position 
in 1/1000  of stroke 
(0000 = closed, 1000 = open) 

R:xxxxxx<CR><LF> R:<CR><LF> 

(R:<CR><LF>) 

R:000428<CR><LF> 
= 428  * 1/1000  of stroke 

Zero adjust  

Sensor offset adjustment 

Z:<CR><LF> Z:<CR><LF> Automatic zero adjustment 

Learn 
up to maximum pressure to be 
learned in 1/1000  of sensor 
full scale 

L:00xxxx<CR><LF> L:<CR><LF> 

L:001000<CR><LF> 
= up to sensor full scale 
L:000100<CR><LF> 
= up to 100 * 1/1000  = 10% 

Pressure command: ‘S:’  
Standard command 
xxxx = 0000 to 1000 Pressure  
           in 1/1000 of full scale

 

S:00xxxx<CR><LF> 
 

S:<CR><LF> 
(S:<CR><LF>) 
 

S:000119<CR><LF> 
 = 119 * 1/1000  of sensor full    
     scale 
 

Select Sensor 1 

U:12<CR><LF> U:<CR><LF> 

Default, after power on 

Select Sensor 2 

U:13<CR><LF> U:<CR><LF> 

 

Hold mode 
Freeze valve position 

H:<CR><LF> 
K:<CR><LF> 

H:<CR><LF> 
K:<CR><LF> 

= start hold 
= change to pressure mode 
Note: Command can be used in 
pressure and position mode. 

Reduced positioning speed 
in 1/1000  of maximum speed 
(remains stored until next 
speed is given and is set to 
1000 after mains is switched 
off) Function is active for R: 

V:xxxxxx<CR><LF> 
 
 
 

V:<CR><LF> 
 
 

V:000200<CR><LF> 
R:000428<CR><LF> 
= Actuator speed is 200* 1/1000  
= 20%  of maximum speed,  

while gate is moved to 
position 428* 1/1000 = 428 

Auto size adjust 

J:<CR><LF> J:<CR><LF> Automatic adjustment to valve 

size 

Disable Power Failure Option  
Enable Power Failure Option 

U:14<CR><LF> 
U:15<CR><LF> 

U:<CR><LF> 
U:<CR><LF> 

After power-up, PFO is always 
enabled. 

Interlock front panel keys 

U:03<CR><LF> 
 
U:04<CR><LF> 

U:<CR><LF> 
 
U:<CR><LF> 

= interlock Local/Remote 

buttons 

= release Local/Remote buttons 

Disable LOGIC INPUT 
Enable LOGIC INPUT 

U:16<CR><LF> 
U:17<CR><LF> 

U:<CR><LF> 
U:<CR><LF> 

=  Disable LOGIC INPUT 
= Enable LOGIC INPUT 

Summary of Contents for PM-4

Page 1: ...641P 6 Read these Installation Operating and Maintenance Instructions IOMI and the enclosed General Safety Instructions carefully before you start any other action Table of content 1 Intended Use of P...

Page 2: ...ranges specified below 1 1 Technical Data Mains voltage 100 240 VAC 10 50 60 Hz Temperature 0 50 C Sensor input signal 0 10 VDC max Sensor power supply 15 VDC 5 1400 mA max total current for sensor 1...

Page 3: ...apter 9 1 2 Connector for mains 5 Interface cable wiring information see chapter 9 1 3 Connector for interface 6 Sensor 1 standard and 2 option 7 Cable for sensor 1 and 2 wiring information see chapte...

Page 4: ...your system is higher than 1 of sensor full scale Evacuate process chamber to high vacuum When the base pressure is reached send RS232 command Z CR LF see 9 3 1 Control commands or use Logic command...

Page 5: ...Use or key to change set point value Store the set point value by pressing one of the four SET POINT keys for at least 2 seconds Freeze valve position interrupt pressure control While in PRESSURE MOD...

Page 6: ...new expiration date on back panel of PM controller Perform PM configuration routine SENSOR SETUP AUTO SIZE ADJUST ZERO LEARN IC3 SRAM IC3 Socket Power fail battery this is an option which is installed...

Page 7: ...y powered SRAM memory ROM ER displayed EPROM defective to be changed LED on CLOSE key is flashing valve is closed and does not respond to RS 232 or keyboard commands Logic CLOSE input on RS 232 interf...

Page 8: ...diately following delivery thereof by VAT provided that the same is properly operated under conditions of normal use and that regular periodic maintenance and service is performed or replacements made...

Page 9: ...or signal 8 Sensor signal 10 15 VDC max 5 1400 mA max 12 0 VDC 14 15 VDC max 5 1400 mA max total current for both sensors is 1400mA Mind Do not connect other Pins than indicated in the table above Rec...

Page 10: ...closed or open as long as the contact is closed Close has higher priority than open 5 DISABLE LOCAL Contact closed PM controller is switched into remote mode key pad LOCAL is disabled as long as cont...

Page 11: ...t Valve is open when contact between PIN 8 and 10 is closed 70V 0 5 A max 9 CLOSE VALVE output Valve is closed when contact between PIN 9 and 10 is closed 70V 0 5 A max 10 Common for digital output 70...

Page 12: ...tion for details If 2 nd command acknowledgement is enabled the PM controller will send a second acknowledgement after the command has been executed Example C CR LF command will close valve The PM con...

Page 13: ...28 CR LF 428 1 1000 of stroke Zero adjust Sensor offset adjustment Z CR LF Z CR LF Automatic zero adjustment Learn up to maximum pressure to be learned in 1 1000 of sensor full scale L 00xxxx CR LF L...

Page 14: ...logic inputs from RS232 are active Control mode M CR LF M POS CR LF M PRESS CR LF POSITION MODE PRESSURE MODE Self test T CR LF T ____OK CR LF T PAR ER CR LF T ROM ER CR LF memory o k parameter error...

Page 15: ...bar 2 Torr 3 mTorr 4 Pa 5 kPa 6 V 7 8 0001 1000 9 none A Position Mode only 2 pressure display in Torr d Gain Factor 0 1 00 1 1 33 2 1 78 3 2 37 4 3 16 5 4 22 6 5 62 7 7 50 8 0 1 9 0 13 A 0 18 B 0 23...

Page 16: ...mode or with S Command Pressure control starts after PRESSURE MODE and a SET POINT is selected or after a pressure control command is sent to the PM controller 9 4 2 How to optimize sensor signal res...

Reviews: