Series 642
OPERATION
813316EB
Edition 2017-11-24
75/107
5.5
Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control
performance. Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation:
(‘Control View’ resp. ‘Control Performance
Analyzer’)
Remote operation:
(Refer to chapter «OUTPUT Buffer» > «PRESSURE
SETPOINT» for details)
Select or enter pressure setpoint
1. In «OUTPUT Buffer» > «PRESSURE SETPOINT»
2. Select valid value
3. In «OUTPUT Buffer» > « CONTROL MODE
SETPOINT»
4. Select [Pressure] (value = 5)
