INSTALLATION
Series 642
18/107
Edition 2017-11-24
813316EB
4.2.3
Installation procedure
1. Install valve [1] into the vacuum system, with valve seat side to process chamber. The valve seat side
is indicated by the symbol "
∆
" on the valve flange.
•
Do not tighten the flange screws stronger than indicated under «Tightening
torque».
•
Do not admit higher forces to the valve than indicated under «Admissible forces».
•
Make sure that enough space is kept free to do preventive maintenance work.
The required space is indicated on the dimensional drawing.
2. Install the ground connection cable at controller. Refer to «Electrical connection»
3. Install connection cable between actuator (connector) and controller (connector: VALVE)
4. Install sensor(s) [4] according to the recommendations of the sensor manufacturer and directives
given under «Requirements to sensor connection».
5. Connect pressure sensor cable [5] to sensor(s) and then to valve (connector: SENSOR). Refer to
chapter «Electrical connection» for correct wiring.
6. Connect valve to CC-Link [6] (CC-Link connector). Refer to «CC-Link interface connection» for correct
wiring.
7. Connect power supply [7] to valve (connector: POWER). Refer to chapter «Electrical connection» for
correct wiring.
To provide power to the valve motor pins 2 and 3 must be bridged, otherwise motor
interlock is active and the valve enters the safety mode and is not operative. Refer
also to «Safety mode».
8. This valve may optionally be equipped with a heating device. Connect VAT heating device according
to manual of respective heating device.
9. Perform «Setup procedure» to prepare valve for operation.
Without performing the setup procedure the valve will not be able to do pressure
control.
