TECHNICAL INFORMATION
With Standard Rack Controller
Connection A - HIGH VACUUM FLANGE
To connect the Turbo-V301 pump to the ISO inlet
flange, remove the outer ring and position the cen-
tering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
1. Turbo-V standard rack controller
2. Vent
valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum
chamber
6. Ionization
gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way
valve
10. Fore-vacuum pump control relay
For ConFlat flange connections we recommend
using Varian hardware.
11. Connection for water cooling
12. Roughing line with valve (optional)
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
13. Turbopump
14. Flexible connection
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange
faces meet.
!
CAUTION
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
44
87-900-946-01(B)
