TECHNICAL INFORMATION
26
87-900-897-01(C)
TECHNICAL SPECIFICATION
Pumping speed
With ISO 160
or CFF 8”:
N
2
: 280 l/s
He: 230 l/s
H
2
: 210 l/s
With ISO 100
or CFF 6”:
N
2
: 250 l/s
He: 220 l/s
H
2
: 220 l/s
Compression ra-
tio
N
2
: >2 x 10
8
He: 1 x 10
5
H
2
: 2 x 10
4
Base pressure*
with recommended mechanical forepump:
< 2 x 10
-9
mbar (< 1.5 x 10
-9
Torr)
with recommended diaphragm forepump:
2 x 10
-8
mbar (1.5 x 10
-8
Torr)
Inlet flange
ISO 160; ISO 100;
CFF 8”; CFF 6”
Foreline flange
KF 25 NW
Rotational speed
56000 RPM
Start-up time
< 3 minutes
Recommended
forepump
mechanical: Varian DS 302
diaphragm: Varian MD 60
Operating
position
any
Cooling
requirements
Natural air convection
Water optional (use water with electrical
conductivity
≤
500
µ
S/cm)
Operating ambient
temperature
+ 5° C to + 35° C
Coolant water
flow: 200 l/h (0.89 GPM)
temperature: + 10° C to + 30° C
pressure: 3 to 5 bar (45 to 75 Psi)
Bakeout
temperature
80° C at inlet flange
(with ISO flange)
120° C at inlet flange
(with CF flange)
Vibration level
(displacement)
<
0.01
µ
m at inlet flange
Noise level
≤
45 dB (A) at 1 meter
Input
90 Vac, three phase, 933 Hz
Lubricant permanent
lubrication
Storage
temperature
- 20° C to + 70° C
Weight kg (lbs)
4.5 (10)
* According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-
out, and using the recommended pre-vacuum
pump.
UPPER VIEW
BOTTOM VIEW
