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Varian Turbo-V300 ICE, Instruction Manual

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Varian Turbo-V300 ICE Instruction Manual Download Page 1

 

 
 
 
 
 
 
 
 

 

Turbo-V300 ICE 

pumps 

 
 
 

Model 969-9076 
Model 969-9083 
Model 969-9095 
Model 969-9096

 

MANUALE DI ISTRUZIONI 
 
BEDIENUNGSHANDBUCH 
 
NOTICE DE MODE D’EMPLOI 
 
MANUAL DE INSTRUCCIONES 
 
MANUAL DE INSTRUÇÕES 
 
BEDRIJFSHANDLEIDING 
 
INSTRUKSTIONSBOG 
 
BRUKSANVISNING 
 
INSTRUKSJON MANUAL 
 
OHJEKÄSIKIRJA 
 

ODHGIES CRHSEWS

 

 
INSTRUCTION MANUAL 

 

 

87-900-897-01(C) 
APRIL 2002 

 

 

Summary of Contents for Turbo-V300 ICE

Page 1: ...del 969 9096 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE D EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87 900 897 01 C APRIL 2002 ...

Page 2: ...Turbo V300 ICE ...

Page 3: ......

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Page 5: ...KET INSTALLATION 30 WATER COOLING KIT INSTALLATION 30 VENT VALVE INSTALLATION 31 VENT DEVICE INSTALLATION 32 VIBRATION ISOLATOR INSTALLATION 32 SOLID STATE FLOWMETER INSTALLATION 33 PUMP USED WITH CORROSIVE GASES 33 TYPICAL LAYOUT DIAGRAM 34 Connection A HIGH VACUUM FLANGE 34 Connection configurations 35 Connection B FORE VACUUM PUMP 35 Connection C ELECTRICAL 35 SUGGESTED PUMP INSTALLATION 36 ROU...

Page 6: ...0 95 non condensante Se il tempo di immagazzinamento è molto lungo avviare la pompa nel modo SOFT START vedere il manuale del control ler PREPARAZIONE PER L INSTALLAZIONE La pompa viene fornita in un imballo protettivo speciale se si presentano segni di danni che potrebbero essersi verificati durante il trasporto contattare l ufficio vendite locale Durante l operazione di disimballaggio prestare p...

Page 7: ...e essere inferiore a 2 bar oltre la pressione atmosferica ATTENZIONE Evitare urti oscillazioni o bruschi spostamenti della turbopompa quando è in funzione I cuscinetti potrebbero danneggiarsi ATTENZIONE Per il pompaggio di gas aggressivi queste pompe sono dotate di una apposita porta attraverso la quale è necessario fornire alla pompa un flusso di gas inerte Azoto o Argon per proteggere i cuscinet...

Page 8: ...ehoben werden LAGERUNG Beim Transport und bei der Lagerung der Pumpen müssen folgende klimatische Verhältnisse vorliegen Temperatur von 20 C bis 70 C Relative Luftfeuchtigkeit 0 95 nicht kondensierend Nach extrem langer Lagerung muß die Pumpe bei Inbetriebsetzung im SOFT START Modus gestartet werden siehe Handbuch der Steuereinheit VOR DER INSTALLATION Die Pumpe wird mit einer speziellen Schutzver...

Page 9: ... verwenden Der Eingangsdruck am Belüftungsanschluß muß kleiner als 2 bar über dem atmosphärischen Druck sein ACHTUNG Während des Betriebs sind Stoß und Vibrationseinwirkungen sowie Ruckbewegungen an der Turbopumpe zu vermeiden da die Lager beschädigt werden könnten ACHTUNG Zum Pumpen von aggressiven Gasen sind die Pumpen mit einer Öffnungsklappe ausgestattet über die zum Schutz der Lager ausschlie...

Page 10: ...t et l emmagasinage des pompes il faudra veiller à respecter les conditions environnementales suivantes température de 20 C à 70 C humidité relative 0 95 non condensante Si le temps d emmagasinage est très long mettre la pompe en marche en mode SOFT START voir la notice du contrôleur PREPARATION POUR L INSTALLATION La pompe est fournie dans un emballage de protection spécial si l on constate des m...

Page 11: ...n d entrée à travers la porte prévue à cet effet doit être inférieure à 2 bar au delà de la pression atmosphérique ATTENTION Lorsque la turbopompe fonctionne éviter tout choc oscillation ou déplacement brusque car les paliers pourraient se détériorer ATTENTION Pour le pompage de gaz de combat ces pompes sont dotées d une porte spéciale à travers laquelle il est nécessaire de fournir à la pompe un ...

Page 12: ...macenamiento de las bombas se deberá cumplir con las condiciones ambientales siguientes temperatura de 20 C a 70 C humedad relativa 0 95 no condensadora Si el periodo de almacenamiento es muy largo poner en marcha la bomba en modalidad SOFT START véase el manual de la unidad de control PREPARACIÓN PARA LA INSTALACIÓN La bomba se suministra en un embalaje de protección dimensional si se observan se...

Page 13: ...ada a través de la puerta apropiada deberá ser inferior a 2 bar por encima de la presión atmosférica ATENCIÓN Evítense golpes oscilaciones o bruscos desplazamientos de la turbobomba durante su funcionamiento Los cojinetes podrían dañarse ATENCIÓN Para bombear gases agresivos estas bombas están dotadas de una puerta específica mediante la cual es necesario suministrar a la bomba un caudal de gas in...

Page 14: ...agem das bombas não devem ser superadas as seguintes condições ambientais temperatura de 20ºC a 70ºC humidade relativa 0 95 não condensante Se o tempo de armazenagem for muito longo accionar a bomba em SOFT START ver manual da unidade de controlo PREPARAÇÃO PARA A INSTALAÇÃO A bomba é fornecida numa embalagem protectora especial se apresentarem sinais de danos que poderiam verificar se durante o t...

Page 15: ...ntrada através da porta específica deve ser inferior a 2 bar além da pressão atmosférica ATENÇÃO Evitar colisões oscilações ou deslocamentos bruscos da turbobomba quando está a funcionar Os rolamentos poderiam sofrer danos ATENÇÃO Para bombear gases agressivos estas bombas estão equipadas com uma porta específica através da qual é necessário fornecer à bomba um fluxo de gás inerte Azoto ou Argon p...

Page 16: ...g van de pompen moeten de volgende omgevingscondities aanwezig zijn temperatuur van 20 C tot 70 C relatieve vochtigheid 0 95 niet condenserend Als de opslagperiode van lange duur is de pomp met de SOFT START wijze opstarten zie handleiding controller UITPAKKEN De pomp wordt in een speciale beschermende verpakking geleverd als er schade wordt geconstateerd die tijdens het transport veroorzaakt zou ...

Page 17: ...t moet minder dan 2 bar boven de atmsoferische druk bedragen ATTENTIE Vermijd schokken trillingen of bruuske verplaatsingen van de turbopomp wanneer deze in werking is De lagers kunnen anders beschadigd raken ATTENTIE Deze pompen zijn voor het pompen van agressieve gassen van een speciale poort voorzien waardoor de pomp een stroom inert gas stikstof of argon ter bescherming van de lagers krijgt ge...

Page 18: ...rligere oplysninger OPLAGRING Under transport og oplagring af pumperne skal følgende omgivelsesbetingelser være overholdt temperatur fra 20 C til 70 C relativ fugtighed 0 95 ikke kondenserende Hvis pumperne oplagres gennem lang tid skal de sættes i gang på den såkaldte SOFT START måde se håndbogen til kontrolenheden FORBEREDELSE TIL MONTERING Pumpen leveres med en særlig beskyttelsesemballage Kont...

Page 19: ... Undgå sammenstød vibrationer eller bratte bevægelser i forbindelse med brug af turbopumpen Der er risiko for beskadigelse af lejerne VIGTIGT Til pumpning af ætsende luftarter er disse pumper forsynet med en særlig åbning hvortil den passive luftart argon eller kvælstof skal sluttes for at beskytte lejerne se bilaget Technical Information ADVARSEL Når pumpen anvendes til pumpning af giftige brandf...

Page 20: ... FÖRVARING Följande krav på omgivningsförhållanden gäller vid transport och förvaring av pumpen temperatur från 20 C till 70 C relativ luftfuktighet 0 95 utan kondens Efter lång förvaring skall pumpen startas med MJUKSTART metoden se bruksanvisningen för styrenheten FÖRBEREDELSER FÖR INSTALLATIONEN Pumpen levereras i ett särskilt skyddande emballage Kontakta det lokala försäljningskontoret om emba...

Page 21: ...v pumpen Trycket vid inloppet får vara högst 2 bar över atmosfäriskt tryck VIKTIGT Undvik sammanstötningar svängningar eller plötsliga förflyttningar av turbopumpen när den är igång Lagren kan bli skadade VIKTIGT För pumpning av frätande gaser är dessa pumpar försedda med en speciell öppning igenom vilken man skall leda en ström av ädelgas kväve eller argon för att skydda lagren se bilagan Technic...

Page 22: ... LAGRING Når pumpene transporteres eller lagres må følgende miljømessige krav oppfylles temperatur fra 20 C til 70 C relativ fuktighet 0 95 uten kondens Skal utstyret lagres lengre må pumpen MYKSTARTES se kontrollenhetens manual KLARGJØRE TIL INSTALLASJON Pumpen leveres i en spesiell beskyttelsesemballasje Viser denne tegn på skader som kan ha oppstått under transporten må du ta kontakt med det lo...

Page 23: ...ære mindre enn 2 bar over atmosfærisk trykk FORSIKTIG Unngå støt svingninger eller plutselige bevegelser av turbinpumpen når den er i funksjon Lagrene kan skades FORSIKTIG Ved pumping av etsende gasser er disse pumpene utstyrt med en spesiell åpning Til denne åpningen skal flyt av inaktive gasser argon eller kvelstoff koples for å beskytte lagrene se Teknisk informasjon ADVARSEL Når pumpen brukes ...

Page 24: ...jen kuljetuksen ja varastoinnin aikana täytyy seuraavien ympäristöä koskevien ehtojen olla täytettyinä lämpötila 20 C 70 C suhteellinen kosteus 0 95 ei tiivistävä Jos varastointiaika on hyvin pitkä tulee pumppu käynnistää SOFT START tavalla katso valvojan käyttökirja VALMISTELUT ASENNUSTA VARTEN Pumpun toimitus tapahtuu erityisessä suojaavassa pakkauksessa mikäli havaittavissa on mahdollisesti kul...

Page 25: ...ua joissa ei ole pölyä tai hiukkasia Sisäänjohtavan paineen siihen sopivan aukon läpi täytyy olla alle 2 bar ia paitsi atmosfäärinen paine HUOMIO Vältä kolhuja heiluntaa tai äkkiliikkeitä turbopumpun toiminnan aikana sillä laakerit voivat vahingoittua HUOMIO Aggressiivisten kaasujen pumppausta varten nämä pumput on varustettu sopivalla aukolla jonka läpi tulee kuljettaa pumppuun ei aktiivisia kaas...

Page 26: ...oi akÒlouqej periballontik j sunqˇkej qermokras a apÒ 20 C m cri 70 C scetikˇ ugras a 0 95 asumpÚknwth An o crÒnoj apoqˇkeushj e nai polÚ makrÚj h antl a qa pr pei na teqe se k nhsh me trÒpo SOFT START bl to egceir dio thj mon daj el gcou PROETOIMASIA GIA THN EGKATASTASH H antl a e nai promhqeÚetai m sa se m a eidikˇ prostateutikˇ suskeuas a An up rcoun ende xeij bl bhj pou qa mporoÚsan na coun pr...

Page 27: ...osfairikˇ p esh PROSOCH Apofuvgete sugkrouvseiÇ olisqhvseiÇ hv apovtomeÇ metakinhvseiÇ thÇ antlivaÇ touvrmpo ovtan brivsketai se leitourgiva Qa mporouvsan na pavqoun zhmievÇ ta kouzinevta PROSOCH Gia thn ntlhsh polemikèn aer wn aut j oi antl ej e nai efodiasm nej me m a eidikˇ qur da m sw thj opo aj e nai anagka a h dioc teush adranoÚj aer ou zwto ˇ argÒn gia thn prostas a twn roulem n bl pe par r...

Page 28: ...e from 20 to 70 C relative humidity 0 95 non condensing If the storage time is long start the pump using the SOFT START mode see control unit manual PREPARATION FOR INSTALLATION The pump is supplied in a special protective packing If this shows signs of damage which may have occurred during transport contact your local sales office When unpacking the pump be sure not to drop it and avoid any kind ...

Page 29: ...N Avoid impacts oscillations or harsh movements of the pump when in operation The bearings may become damaged CAUTION For pumping aggressive gases these pumps are fitted with a special port to allow a steady flow of inert gas like N2 Ar for pump bearing protection see the appendix Technical Information WARNING When employing the pump for pumping toxic flammable or radioactive gases please follow t...

Page 30: ...ng ro tor discs These are made of aluminium alloy The Spiral Seal is a dynamic seal based on a Siegbahn disk that increases the protection of the bearings against corrosive gases The aluminium parts are protected against corro sion caused by chlorinated and fluorinated gases by means of a protective film The film called Ar morr Coating is deposited by means of a vacuum process allowing an uniformi...

Page 31: ...0 Operating position any Cooling requirements Natural air convection Water optional use water with electrical conductivity 500 µS cm Operating ambient temperature 5 C to 35 C Coolant water flow 200 l h 0 89 GPM temperature 10 C to 30 C pressure 3 to 5 bar 45 to 75 Psi Bakeout temperature 80 C at inlet flange with ISO flange 120 C at inlet flange with CF flange Vibration level displacement 0 01 µm ...

Page 32: ...ATION 27 87 900 897 01 C Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump ...

Page 33: ...nlet screen however does reduce the pump ing speed by about 10 The inlet screen is fitted in the upper part of the pump as shown in the figure The screen can be mounted on each pump model and is supplied with a small tab for easy removal see figure The following figure shows the overall flange di mensions with the protection screen fitted on pump ISO 100 A 102 2 4 02 B 12 0 47 ISO 160 A 153 6 02 B...

Page 34: ...button A dedicated temperature sensor into the heating jacket will keep the pump temperature at the de sired temperature NOTE Please make sure to have a perfect contact be tween the heating jacket thermistor and the pump envelope for a safe and efficient operation CAUTION If the chamber of the system is baked at a high temperature a shield should be installed to prevent thermal radiation heating t...

Page 35: ...tual discharge of the water or us ing a closed circuit cooling system The water temperature must be between 10 C and 30 C with an inlet pressure between 3 and 5 bar This allows a flow of about 200 l h VENT VALVE INSTALLATION The vent valve mod 969 9833 allows to avoid un desired venting of the pump during a temporary power failure 5 sec maximum and enables an automatic vent operation Unscrew the t...

Page 36: ...mod 969 9109 on the pump tak ing care of the o ring right position Assemble the seal ring and lock the vent device in position using the KF klamp VIBRATION ISOLATOR INSTALLATION Two vibration isolators for ISO flange are available as accessories The two model part numbers are the following model 969 9342 for ISO 100 flange model 969 9343 for ISO 160 flange They typically reduce the vibration trans...

Page 37: ...0 sccm CAUTION To prevent bearing damage the integrated purge valve is foreseen for a gas flow rate of 20 sccm 0 34 mbar l s Please contact Varian for specific applications The recommended gas flow maintains a pressure into the pump body higher than the forevacuum pressure The recommended procedure to vent the system and the pump avoiding the contact between the pump bearings and the corrosive gas...

Page 38: ...p Connection A HIGH VACUUM FLANGE To connect the Turbo V300 ICE pump to the ISO inlet flange remove the outer ring and position the centering ring as shown in the figure Then fix the two flanges with the clamps or claws as shown in the figure For ConFlat flange connections we recommend using Varian hardware To facilitate assembly and dismantling apply Fel pro C 100 high temperature lubricant to th...

Page 39: ...pors When using a mechanical oil sealed pump it is advisable to in stall a suitable trap between the turbopump and the fore vacuum pump in order to prevent oil back streaming Connection C ELECTRICAL The turbopump is connected to the controller through an 6 pin connector Pins B C and D are the 3 phase supply to the motor pins A and F are connected to the temperature sensor NTC type 30 KΩ resistance...

Page 40: ...m signal on the controller must be inter faced on the system to indicate any low purge flow condition Proper actions must be taken on the system when a low purge condition is present The special heater jacket should be used if con densable materials are known to be present during the process The heater jacket working tempera ture should be adjusted on the pump control unit see controller manual fo...

Page 41: ... problem should be expected However if the effect is grater than the case should be carefully reviewed by Varian s specialist As a matter of fact in case of high magnetic fields also important forces might be generated and ap plied to the rotor ACCESSORIES DESCRIPTION PART NUMBER Inlet screen ISO 100 969 9302 Inlet screen ISO 160 969 9304 Heating jacket 969 9818 Water cooling kit for American frac...

Page 42: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 43: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Page 44: ...ian India PVT LTD 101 108 1st Floor 1010 Competent House 7 Nangal Raya Business Centre New Delhi 110 046 India Tel 91 11 5548444 Fax 91 11 5548445 Italy Varian Vacuum Technologies Via F lli Varian 54 10040 Leini Torino Italy Tel 39 011 997 9111 Fax 39 011 997 9350 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax...

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