Varian Turbo-V 2K-G, Instruction Manual

Page: 85 / 103

TECHNICAL INFORMATION
80 87-900-968-01(C)
N. Read/
Write
Data
Type
Description Admitted
Values
123
124 Reserved to Varian service
125 R/W L Valves oper-
ating mode
0 = auto (default)
1 = on command
(see win.146)
126 R/W N Vent valve
opening
delay
(expressed
in 0.2 sec)
0 to 65535
(corresponding to
0 to 13107 sec)
(default = 15)
130 Reserved to Varian service
145 R/W L Set purge
valve
open/close
0 = close
1 = open
(default = 0)
146 R/W L Set valves
command
source
0 = Serial
1 = Remote
(default = 0)
147 R/W N Vent Valve
Opening
Time (ex-
pressed in
0.2 sec)
0 to 65535 bit
(0=infinite,
1=0.2sec,
max=13107 sec)
(default =0)
152 R/W L HPS enable 0 = OFF
1 = ON
(default = 0)
write only in
STOP
155 R N Power limit
applied
Watt
157 R/W L Gas load
type
0 = Ar
1 = N
2
(default = 0)
158 R/W N Max fore-
seen water
cooling tem-
perature
(Twater,max)
°C, min = 15
max = 35
(default = 34)
159 R/W N Water cool-
ing hystere-
sYs
%
(default = 1)
164 R N Tbody,lim: body temperature corre-
sponding to Twater,max
200 R N Pump
current in
mA dc
201 R N Pump volt-
age in Vdc
202 R N Pump power
in W (pump
current X
pump voltage
X duty cycle)
203 R N Driving fre-
quency in
Hz
N. Read/
Write
Data
Type
Description Admitted
Values
204 R N Pump tem-
perature in
°C
0 to 70
205 R N Pump status Stop = 0
Waiting intlk = 1
Starting = 2
Auto-tuning = 3
Braking = 4
Normal = 5
Fail = 6
206 R N Error code Bit description:
see the following
figure
211 R N Controller
temperature
n. 1
°C
216 R N Pump body
temperature
°C
222 R N Controller
temperature
n. 2
°C
223 R N Flow meter
reading
sccm
300 R N Cycle time
in minutes
(zeroed by
the reset
command)
0 to 999999
301 R N Cycle num-
ber (zeroed
by the reset
command)
0 to 9999
302 R N Pump life in
hours (ze-
roed by the
reset com-
mand) 0 to 999999
303 R N High Power
Start cycles
number
304 R N High Power
Start tries
number of
last 9
310
to
399
Reserved to Varian service
400 R A CRC
EPROM
(QE)
QE5XXXX
(where “XXXX”
are variable)
402 R A CRC Pa-
ram. (PA)
PA5XXXX
(where “XXXX”
are variable)
502 Reserved to Varian service
503 R/W N RS 485 ad-
dress 0 to 31
(default = 0)
504 R/W L Serial type
select
0 = RS 232
1 = RS 485
(default = 0)